本文選題：主軸回轉(zhuǎn)誤差 + 動態(tài)干涉儀��； 參考：《哈爾濱理工大學(xué)》2017年碩士論文

【摘要】：隨著超精密加工技術(shù)的高速發(fā)展,人們對于加工零部件的精度要求越來越高。主軸是機床的重要組成部分,機床主軸的回轉(zhuǎn)精度直接決定了加工零件的精度,因此主軸回轉(zhuǎn)精度的檢測成為一項極具挑戰(zhàn)的課題。此外,開展一種新的測量超精密主軸回轉(zhuǎn)精度的方法,對提高我國超精密加工設(shè)備主軸關(guān)鍵部件,以及超精密設(shè)備的研制開發(fā)具有重要意義。首先,系統(tǒng)的研究了國內(nèi)外學(xué)者提出的各種主軸回轉(zhuǎn)精度檢測方法,以及對主軸回轉(zhuǎn)誤差原理進行分析,提出了一種新的主軸回轉(zhuǎn)精度檢測方法,即采用動態(tài)干涉儀測量主軸回轉(zhuǎn)誤差。搭建了動態(tài)干涉儀測量高精度伺服電機主軸回轉(zhuǎn)誤差的實驗平臺,通過分析干涉條紋的位移量從而計算出主軸回轉(zhuǎn)誤差。其次,對干涉條紋圖像特征進行深入研究,設(shè)計了干涉條紋圖像的實時采集系統(tǒng)。基于干涉條紋追蹤實現(xiàn)位移測量理論,獲取平面平晶在軸向方向的位移。再次,采用動態(tài)干涉儀采集平面平晶隨伺服電機主軸回轉(zhuǎn)過程中,不同相位的干涉條紋。通過對原始干涉條紋進行圖像處理,得到質(zhì)量較高的干涉條紋邊緣圖像。對原始干涉條紋依次進行灰度值處理、中值濾波處理、膨脹腐蝕處理、二值化、以及邊緣提取等處理方法。最后選取相鄰干涉條紋等灰度值的像素點進行追蹤,以獲取主軸軸向回轉(zhuǎn)誤差。最后,搭建了基于干涉條紋特征分析的伺服電機主軸軸向回轉(zhuǎn)精度檢測系統(tǒng),并進行了實驗。通過實驗數(shù)據(jù)驗證了本文這種主軸回轉(zhuǎn)誤差測量方法的準(zhǔn)確性和適用性,并在此基礎(chǔ)上對實驗誤差進行了分析。
[Abstract]:With the rapid development of ultra-precision machining technology, the precision of machining parts is becoming more and more high. Spindle is an important part of machine tools. The precision of spindle rotation directly determines the precision of machining parts. Therefore, the measurement of spindle rotation accuracy has become a very challenging task. In addition, it is of great significance to develop a new method for measuring the rotation accuracy of ultra-precision spindle, which is of great significance to the improvement of the key parts of the spindle of ultra-precision machining equipment in China, as well as to the research and development of ultra-precision equipment. First of all, this paper systematically studies all kinds of spindle rotation accuracy detection methods proposed by domestic and foreign scholars, and analyzes the principle of spindle rotation error, and puts forward a new spindle rotation accuracy detection method. Dynamic interferometer is used to measure the rotation error of spindle. An experimental platform for measuring the spindle rotation error of high precision servo motor with dynamic interferometer is set up, and the spindle rotation error is calculated by analyzing the displacement of interference fringes. Secondly, a real-time acquisition system of interference fringe image is designed. Based on the theory of interferometric fringe tracking, the displacement of flat crystal in axial direction is obtained. Thirdly, dynamic interferometer is used to collect the interference fringes with different phases in the rotation process of plane flat crystal with the main axis of servo motor. The edge image of interference fringes with high quality is obtained by processing the original interference fringes. The original interference fringes are processed with gray value, median filter, expansion corrosion, binarization, edge extraction and so on. Finally, the pixels of adjacent interference fringes and other gray values are selected to track to obtain the axial rotation error of the spindle. Finally, an axial rotation precision measurement system of servo motor spindle based on interference fringe feature analysis is built and the experiment is carried out. The accuracy and applicability of this method are verified by experimental data, and the experimental error is analyzed.
【學(xué)位授予單位】：哈爾濱理工大學(xué)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2017
【分類號】：TG502.3

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