本文選題：激光誘導(dǎo)前向轉(zhuǎn)移 + 飛秒激光　； 參考：《中國民航大學(xué)》2016年碩士論文

【摘要】：通過激光的誘導(dǎo)作用實(shí)現(xiàn)微量物質(zhì)的轉(zhuǎn)移是一項新的激光加工技術(shù)。飛秒激光具有脈寬極短,峰值功率極高的特點(diǎn),與材料作用的機(jī)理不同于普通長脈沖激光。本文選擇飛秒激光作為加工光源,采用激光誘導(dǎo)前向轉(zhuǎn)移技術(shù),在鈦合金表面轉(zhuǎn)移沉積SiC薄膜和NiCoGrAl-Y2O3薄膜,對不同實(shí)驗參數(shù)下的薄膜的轉(zhuǎn)移規(guī)律進(jìn)行研究。尋找合適的實(shí)驗參數(shù),在鈦合金表面制備SiC涂層,對轉(zhuǎn)移后的涂層進(jìn)行分析。主要研究內(nèi)容如下:制備了符合EB-PVD實(shí)驗標(biāo)準(zhǔn)的Ni CoGrAl-Y2O3靶材,采用電子束蒸發(fā)鍍膜系統(tǒng)在石英片上制備了不同厚度SiC薄膜和NiCoGrAl-Y2O3薄膜,對薄膜進(jìn)行物相分析,測試結(jié)果表明采用電子束轟擊靶材進(jìn)行薄膜制備時,材料從晶態(tài)向非晶態(tài)發(fā)生轉(zhuǎn)變。實(shí)驗對NiCoGrAl-Y2O3薄膜和Si C薄膜進(jìn)行了飛秒激光誘導(dǎo)轉(zhuǎn)移,總結(jié)了掃描速度,飛秒激光功率,離焦距離,薄膜厚度對薄膜的轉(zhuǎn)移沉積規(guī)律。結(jié)果表明:在激光能量足夠高且一定的條件下,為了保證沉積薄膜具有較好的搭接率,對掃描速度有一定要求,通過改變離焦的方式,增加有效光斑直徑,在改善沉積薄膜搭接率的同時能夠增加沉積薄膜的線寬,提高掃描速度,從而提高加工效率;激光功率選擇有一個較合適的范圍,激光功率較小時,沉積薄膜線寬較小甚至無法轉(zhuǎn)移薄膜,當(dāng)激光功率較大,在薄膜轉(zhuǎn)移的同時,會對基底材料造成燒蝕。實(shí)驗上首次利用飛秒激光成功實(shí)現(xiàn)SiC薄膜的轉(zhuǎn)移沉積,在鈦合金表面制備了碳化硅涂層。研究表明:涂層組織沒有出現(xiàn)裂紋;SiC薄膜在轉(zhuǎn)移的過程,有了一定程度的結(jié)晶;SiC涂層與鈦合金基底形成了緊密結(jié)合。
[Abstract]:It is a new laser processing technology to transfer trace matter by laser induction. Femtosecond laser has the characteristics of very short pulse width and high peak power, and the mechanism of interaction with material is different from that of ordinary long pulse laser. In this paper, femtosecond laser is chosen as the processing light source. The SiC and NiCoGrAl-Y2O3 films are deposited on the surface of titanium alloy by laser induced forward transfer technique. The transfer law of the films under different experimental parameters is studied. SiC coating was prepared on titanium alloy surface with suitable experimental parameters, and the transferred coating was analyzed. The main research contents are as follows: the Ni CoGrAl-Y2O3 target which meets the standard of EB-PVD experiment was prepared. SiC and NiCoGrAl-Y2O3 thin films of different thickness were prepared on quartz substrates by electron beam evaporation coating system. The phase of the films was analyzed. The results show that when the target is prepared by electron beam bombardment, the material changes from crystalline state to amorphous state. Femtosecond laser induced transfer was carried out on NiCoGrAl-Y2O3 and sic thin films, and the transfer and deposition rules of scanning speed, femtosecond laser power, defocus distance and film thickness on the films were summarized. The results show that under the condition of high enough laser energy and certain laser energy, the effective spot diameter is increased by changing the mode of defocusing in order to ensure the better lap rate of the deposited film and the scanning speed. At the same time, it can increase the linewidth of the deposited film and improve the scanning speed, thus improving the processing efficiency, the laser power selection has a more suitable range, the laser power is small. When the laser power is high, the thin film will be ablated while the film is transferred. The transfer deposition of SiC thin films was successfully realized by femtosecond laser for the first time, and silicon carbide coating was prepared on the surface of titanium alloy. The results show that there is no crack in the microstructure of the coating, and there is a certain degree of crystalline sic coating to form a tight bond with the titanium alloy substrate.
【學(xué)位授予單位】：中國民航大學(xué)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2016
【分類號】：TG174.4

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