本文選題：六自由度誤差 + 外差干涉��； 參考：《北京交通大學》2016年博士論文

【摘要】：直線軸或直線導軌是數(shù)控機床、加工中心和坐標測量機等高精密加工和測量設備的重要組成部件,其制造和裝配誤差是影響上述設備加工和測量精度的主要因素。激光干涉儀是檢測直線導軌幾何運動誤差的常用儀器,但是其測量效率極低且無法滿足數(shù)控機床多誤差快速高精度測量的要求。因此,本領域亟待解決的問題和發(fā)展趨勢是發(fā)展一種直線導軌六自由度幾何運動誤差同時測量的方法及相應的儀器設備,顯著提高數(shù)控機床的檢測效率和精度。為了解決上述問題,本論文在綜合分析了國內(nèi)外相關研究的基礎上,依據(jù)小型化和高集成度的原則,提出了兩種可用于數(shù)控機床直線導軌幾何運動誤差檢測的六自由度誤差同時測量的方案,研制了相應的測量儀器,通過一系列實驗驗證了所研制的測量系統(tǒng)的可靠性和有效性。概括起來,本學位論文的主要工作及創(chuàng)新有：1.提出了一種基于激光干涉和激光準直結合的六自由度幾何運動誤差同時測量的方法,分析了各自由度幾何誤差的測量原理并介紹了共路光線漂移測量和補償?shù)姆椒�。根�?jù)所提出的測量原理進行了光路結構、信號處理單元和測量軟件的設計,研制了基于He-Ne雙頻激光器和單模光纖耦合的半導體激光器的測量系統(tǒng)。通過一系列實驗對所研制的測量系統(tǒng)的性能進行了評估,實驗結果表明系統(tǒng)位置誤差、直線度誤差、俯仰角、偏擺角和滾轉(zhuǎn)角測量的標準偏差分別為0.8μm、0.5pm、 0.5"、0.5"、 1",在700mm的測量范圍內(nèi)重復性誤差的最大偏差分別為±0.6μm、 ±1.2μm.±1"、±0.8"、±1.8",證明了該系統(tǒng)能滿足精密數(shù)控機床的檢測要求。2.提出了一種基于外差干涉和激光光纖準直結合的六自由度幾何運動誤差同時測量方法。提出了基于單根保偏光纖傳輸雙頻激光的外差干涉位置誤差測量。根據(jù)所提出的測量原理進行了光路結構、硬件和軟件的設計,研制了利用單根保偏光纖耦合的He-Ne雙頻激光器的測量系統(tǒng)。通過一系列實驗對所研制的測量系統(tǒng)的性能進行了評估,實驗結果表明系統(tǒng)位置誤差、直線度誤差、俯仰角、偏擺角和滾轉(zhuǎn)角測量的穩(wěn)定性誤差分別為31.1nm、60nm、0.04"、0.03"、0.29",直線度誤差、俯仰角、偏擺角和滾轉(zhuǎn)角測量的重復性誤差分別為±0.15μm、±0.18”、±0.24”、±0.35”,證明了保偏光纖的應用對提升系統(tǒng)測量精度和熱穩(wěn)定性的有效性,驗證了該系統(tǒng)適用于高精密數(shù)控機床的檢測。3.討論了六自由度幾何運動誤差同時測量系統(tǒng)的誤差構成并詳細分析了直線度誤差測量的系統(tǒng)誤差。根據(jù)理論分析和基于控制變量法的標定實驗提出了一種修正測量分辨率變化的方法。利用棱鏡展開原理和矩陣光線追跡建立了誤差補償模型,理論上消除了由制造誤差和安裝偏差、誤差串擾引入的系統(tǒng)誤差。分析了阿貝誤差的產(chǎn)生原因和作用效果,介紹了基于齊次變換矩陣的阿貝誤差的補償模型。搭建了基于激光準直的直線度誤差測量裝置并與標準儀器進行了對比,實驗結果表明補償前后水平和豎直直線度誤差測量的對比偏差分別由1.8μm和2.8μm降至0.9μm和0.8μm,證明了所建立的誤差補償模型的有效性。
[Abstract]:Linear or linear guide rail is an important component of high precision machining and measuring equipment such as CNC machine tools, machining centers and coordinate measuring machines. The manufacturing and assembly errors are the main factors affecting the machining and measuring accuracy of the above equipment. The laser interferometer is a common instrument for measuring the geometric motion error of the linear guide, but its measurement efficiency It is very low and unable to meet the requirements of fast and accurate measurement of multi error of CNC machine tools. Therefore, the problem and trend of development in this field are to develop a method of simultaneous measurement of geometric motion error of six degrees of freedom of linear guide and corresponding instrument and equipment, and improve the detection efficiency and accuracy of the NC machine bed significantly. On the basis of comprehensive analysis of relevant research at home and abroad, this paper puts forward two schemes for simultaneous measurement of six degrees of freedom error for geometric kinematic error detection of linear guide rail of CNC machine tools, which can be used to measure the geometric motion error of numerical control machine tools. The corresponding measuring instrument is developed and the measurement developed is verified by a series of experiments. The main work and innovation of this dissertation are as follows: 1. a method of simultaneous measurement of geometric motion error of six degrees of freedom based on laser interference and laser collimation is proposed. The measurement principle of geometric errors of each degree of freedom is analyzed and the square of common path ray drift measurement and compensation is introduced. Method. Based on the proposed measurement principle, the optical path structure, signal processing unit and measurement software are designed. The measurement system of semiconductor laser based on He-Ne dual frequency laser and single mode fiber coupling is developed. The performance of the developed measurement system is evaluated through a series of experiments. The experimental results show that the system position is wrong. The standard deviations of the error, the straightness error, the pitching angle, the deflection angle and the roll angle are 0.8 mu m, 0.5pm, 0.5 ", 0.5", 1 ", the maximum deviation of the repeatability error in the range of 700mm is + 0.6 mu m, + 1.2 mu m. + 1", + 0.8 ", + 1.8", which proves that the system can meet the requirements of the precision NC machine tool and put forward a kind of outside based on the outside. A simultaneous measurement of six degrees of freedom geometric motion error combined with differential interference and laser collimation. A measurement of heterodyne interference position error based on Dan Genbao biased optical fiber transmission dual frequency laser is proposed. Based on the proposed measurement principle, the optical path structure, hardware and software are designed, and the He-Ne coupling of single polarization optical fiber is developed. The measurement system of a dual frequency laser. The performance of the developed measurement system is evaluated through a series of experiments. The experimental results show that the stability errors of the system position error, the straightness error, the pitching angle, the deflection angle and the roll angle are 31.1nm, 60NM, 0.04, 0.03, 0.29 ", straightness error, pitching angle, deflection angle and roll angle. The repeatability error of the measurement is + 0.15 mu m, + 0.18 ", + 0.24, + 0.35". It is proved that the application of the polarization preserving fiber is effective to the measurement accuracy and thermal stability of the lifting system. It is proved that the system is suitable for the detection of high precision CNC machine tools, and the error composition of the simultaneous measurement system of geometric motion error of six degrees of freedom is discussed and detailed. The systematic error of measurement of straightness error is analyzed. A method of correcting the change of measurement resolution is proposed based on the theoretical analysis and the calibration experiment based on the control variable method. The error compensation model is established by using the prism expansion principle and the ray tracing of the matrix, which is theoretically eliminated by the error and installation deviation and the error crosstalk. The cause and effect of A Bei error are analyzed. The compensation model of A Bei error based on homogeneous transformation matrix is introduced. A straightness error measuring device based on laser collimation is set up and compared with the standard instrument. The experimental results show that the measurement of horizontal and vertical straightness error before and after compensation deviation is biased. The difference is reduced from 1.8 m and 2.8 m to 0.9 m and 0.8 m respectively, which proves the validity of the established error compensation model.

【學位授予單位】：北京交通大學
【學位級別】：博士
【學位授予年份】：2016
【分類號】：TG659

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