本文選題：氣浮工作臺(tái)　切入點(diǎn)：滑移　出處：《西安交通大學(xué)學(xué)報(bào)》2017年11期 　論文類型：期刊論文

【摘要】：針對(duì)超精密氣浮工作臺(tái)內(nèi)部微小間隙氣體的性能展開(kāi)研究,實(shí)現(xiàn)了微尺度下氣體滑移及黏度對(duì)氣浮工作臺(tái)性能影響的分析。基于氣體潤(rùn)滑理論和微尺度下氣體滑移和黏度的研究,實(shí)現(xiàn)了氣浮工作臺(tái)內(nèi)氣膜流態(tài)模型的修正,利用有限差分法給出了雷諾方程的數(shù)值求解過(guò)程;通過(guò)求解修正模型,分析不同供氣壓強(qiáng)和氣膜間隙下,滑移和黏度對(duì)氣浮工作臺(tái)性能影響的機(jī)理。研究結(jié)果表明:氣體滑移和黏度會(huì)引起氣浮工作臺(tái)承載力的降低和氣膜剛度的增大,但不會(huì)改變供氣壓強(qiáng)和氣膜間隙對(duì)工作臺(tái)的影響趨勢(shì),只是影響程度發(fā)生改變,當(dāng)同時(shí)考慮滑移和黏度時(shí),承載力比忽略時(shí)降低最多(約為21.95%),最大剛度比忽略時(shí)提升最大(約為15%)�；坪宛ざ鹊拇嬖谑沟脷飧」ぷ髋_(tái)的實(shí)際性能最優(yōu)參數(shù)小于理想的最優(yōu)性能參數(shù),最優(yōu)氣膜間隙由原來(lái)的10μm變?yōu)?μm。最后,通過(guò)試驗(yàn)驗(yàn)證發(fā)現(xiàn),同時(shí)考慮氣體滑移和黏度時(shí),氣浮工作臺(tái)的性能最接近實(shí)際工況,承載力的仿真曲線與試驗(yàn)曲線最吻合,剛度的試驗(yàn)值與仿真值的誤差約為9.59%。
[Abstract]:The performance of micro-gap gas in ultra-precision air floatation table is studied. The effect of gas slippage and viscosity on the performance of air floating table is analyzed. Based on the theory of gas lubrication and the study of gas slip and viscosity in micro scale, the model of gas film flow in air floating table is modified. The numerical solution process of Reynolds equation is given by the finite difference method, and the modified model is solved to analyze the different pressure of gas supply and the gap of gas film. The mechanism of the effect of slippage and viscosity on the performance of air floatation table. The results show that gas slip and viscosity will cause the reduction of bearing capacity and the increase of film stiffness. But it will not change the influence trend of air supply pressure and film clearance on the worktable, but the influence degree will change, when the slippage and viscosity are considered at the same time, The bearing capacity is much lower than the neglected one (about 21.95), and the maximum stiffness is the largest (about 15%). The existence of slippage and viscosity makes the actual performance optimum parameter of the air-floating table smaller than the ideal optimal performance parameter. The optimal film clearance is changed from 10 渭 m to 6 渭 m. Finally, it is found that the performance of the air floating table is the closest to the actual working condition, and the simulation curve of bearing capacity is the most consistent with the test curve when the gas slip and viscosity are taken into account at the same time. The error between the test value and the simulation value is about 9.59.
【作者單位】： 北京工業(yè)大學(xué)先進(jìn)制造技術(shù)北京市重點(diǎn)實(shí)驗(yàn)室;
【基金】：國(guó)家自然科學(xué)基金資助項(xiàng)目(51475010,51105005)
【分類號(hào)】：TG502
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本文編號(hào)：1631337