本文關(guān)鍵詞： 薄壁微構(gòu)件 氣體靜壓導(dǎo)軌 精度檢測 微銑削 研磨　出處：《哈爾濱工業(yè)大學(xué)》2017年碩士論文　論文類型：學(xué)位論文

【摘要】：微小尺寸零部件在航空航天、醫(yī)學(xué)及微電子工業(yè)等領(lǐng)域發(fā)揮著舉足輕重的作用。在傳統(tǒng)機械加工基礎(chǔ)上發(fā)展起來的微細機械加工技術(shù)具有很大的靈活性,可以完成各種形式的銑削、車削、磨削等操作,同時相對于刻蝕類加工,微細機械加工擁有更高的加工效率,所以該技術(shù)擁有很好的發(fā)展和應(yīng)用前景。具有特征尺寸的微小關(guān)鍵部件制造是目前制造領(lǐng)域的重點和難點。本課題主要面向航空重點型號技改項目中具有薄壁微結(jié)構(gòu)的彈性敏感元件(薄壁微構(gòu)件),研制超精密銑研復(fù)合微細加工機床,本文將分析并依據(jù)其技術(shù)指標(biāo)要求進行復(fù)合加工系統(tǒng)設(shè)計,解決包含超精密運動系統(tǒng)的精度檢測、高精度位置控制與微力感知檢測等技術(shù)難題。根據(jù)微構(gòu)件的加工需求,完成了超精密銑研復(fù)合加工系統(tǒng)的總體設(shè)計;根據(jù)氣體靜壓支撐工作原理,推導(dǎo)了矩形空氣靜壓導(dǎo)軌在節(jié)流孔單列分布與雙列分布時靜態(tài)性能的計算公式,并給出了節(jié)流孔單列分布時靜態(tài)性能計算的一種修正方法,進一步完成了矩形氣體靜壓導(dǎo)軌的靜態(tài)特性計算。對十字形氣體靜壓導(dǎo)軌進行設(shè)計,完成基于氣體靜壓導(dǎo)軌的運動系統(tǒng)設(shè)計、裝配調(diào)試以及精度檢測。針對垂直方向精確進給的需求,完成了高精度垂直位移工作臺的設(shè)計、制造以及精度檢測。針對高速銑削方案,對微銑削中高速氣浮電主軸進行通訊控制和調(diào)試,采用VS與LABVIEW編寫控制軟件;針對微構(gòu)件的研磨加工的需求,對在位研磨中微力感知二維力傳感器的進行設(shè)計和制造,完成在位研磨系統(tǒng)的調(diào)試以及研磨加工中對刀方案的確定。利用超精密銑研復(fù)合加工加床,進行了一系列的加工和驗證性試驗。對于微銑削加工工藝實驗,探究了每齒進給量以及切削深度對微構(gòu)件槽底表面質(zhì)量的影響,進一步優(yōu)化微銑削參數(shù)改善微構(gòu)件的加工質(zhì)量;完成了變質(zhì)層精確去除的研磨工藝實驗,研究研磨膏粒度以及研磨軌跡對微構(gòu)件加工的影響。成功加工出合格的微構(gòu)件,為將來微構(gòu)件的批量加工提供技術(shù)支持。
[Abstract]:Micro-size parts play an important role in the fields of aerospace, medicine and microelectronics. The micro-machining technology developed on the basis of traditional machining has great flexibility. Can complete various forms of milling, turning, grinding and other operations, while compared to etching processing, micro-machining has a higher processing efficiency, Therefore, the technology has a good development and application prospects. The manufacture of small key parts with characteristic size is the key and difficult point in the field of manufacture. This subject is mainly aimed at the thin-walled micro in the key aeronautical model technical innovation project. The elastic sensitive element of the structure (thin-walled micro-member) is developed for ultra-precision milling and grinding composite micro-machining machine, This paper will analyze and design the compound machining system according to its technical specifications, solve the technical problems including precision detection of ultra-precision motion system, high-precision position control and micro-force sensing detection. The overall design of the ultra-precision milling and grinding compound machining system is completed, and the formula for calculating the static performance of the rectangular air static guide rail under the single and double row distribution of the throttle hole is derived according to the working principle of the gas static pressure support. A modified method of static performance calculation for single row distribution of throttle holes is presented, and the static characteristic calculation of rectangular gas hydrostatic guide rail is further completed. The cross gas static pressure guide rail is designed. The design of motion system, assembly debugging and precision testing based on pneumatic static guide rail is completed. According to the demand of accurate feed in vertical direction, the design of high precision vertical displacement table is completed. Manufacturing and precision testing. For high-speed milling scheme, communication control and debugging of high-speed air-floating motorized spindle in micro-milling, programming control software with vs and LABVIEW, aiming at the requirement of grinding processing of micro-components, The design and manufacture of the micro force sensing two dimensional force sensor in in-situ grinding, the debugging of the in situ grinding system and the determination of the tool scheme in the grinding process are carried out. A series of machining and validating experiments were carried out. The effects of feed per tooth and cutting depth on the surface quality of groove bottom of micro-components were investigated in order to optimize the parameters of micro-milling to improve the machining quality of micro-components. The grinding process experiment of precise removal of metamorphic layer was completed, and the influence of grinding paste size and grinding track on the machining of micro-components was studied. The qualified micro-components were successfully processed, which provided technical support for batch processing of micro-components in the future.
【學(xué)位授予單位】：哈爾濱工業(yè)大學(xué)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2017
【分類號】：TG65

【參考文獻】

相關(guān)期刊論文 前10條

1 梁迎春;陳國達;孫雅洲;陳家軒;陳萬群;于楠;;超精密機床研究現(xiàn)狀與展望[J];哈爾濱工業(yè)大學(xué)學(xué)報;2014年05期

2 張鵬;王波;盧禮華;梁迎春;;微小型超精密微細銑削機床的研制[J];制造技術(shù)與機床;2010年06期

3 李立軍;張飛虎;董申;袁哲俊;;非球面模芯ELID磨削系統(tǒng)的研制[J];工具技術(shù);2007年11期

4 姚榮慶;;薄壁零件的加工方法[J];機床與液壓;2007年08期

5 張霖;趙東標(biāo);張建明;孫學(xué)峗;龐長濤;;微細切削用小型數(shù)控銑床的研制[J];東南大學(xué)學(xué)報(自然科學(xué)版);2007年01期

6 邱時前;陳志同;;五坐標(biāo)微銑削機床的研制[J];機械制造;2007年01期

7 李榮彬,杜雪,張志輝,高棟,趙偉明;光學(xué)微結(jié)構(gòu)的超精密加工技術(shù)[J];納米技術(shù)與精密工程;2003年01期

8 錢勁,劉o，

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