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基于壓電陶瓷的摩擦可調(diào)粘滑定位平臺(tái)

發(fā)布時(shí)間:2018-10-18 18:30
【摘要】:為了提高粘滑式納米定位臺(tái)對(duì)不同負(fù)載,尤其是大質(zhì)量負(fù)載的適用性,設(shè)計(jì)了驅(qū)動(dòng)模塊化的粘滑定位平臺(tái)。將質(zhì)量塊、柔性鉸鏈及鉸鏈架一體制造,將壓電陶瓷致動(dòng)器、預(yù)緊墊塊及預(yù)緊螺釘安裝在鉸鏈架上,共同組成一個(gè)獨(dú)立的驅(qū)動(dòng)模塊,安裝在底座的槽內(nèi),在調(diào)節(jié)螺釘?shù)淖饔孟驴烧{(diào)整垂直方向的位置,改變與載物臺(tái)接觸面間的摩擦力。對(duì)粘滑驅(qū)動(dòng)平臺(tái)建立動(dòng)力學(xué)模型并進(jìn)行仿真分析,研究摩擦力對(duì)平臺(tái)性能的影響。實(shí)驗(yàn)結(jié)果表明,負(fù)載200g時(shí),平臺(tái)的最小步長(zhǎng)為8.84nm,最大速度為3.727mm/s,行程約20mm;2kg負(fù)載下,未調(diào)節(jié)摩擦?xí)r最大速度為2.373mm/s,調(diào)節(jié)摩擦力后最大速度為3.063mm/s。實(shí)驗(yàn)證明,該設(shè)計(jì)能同時(shí)滿足小尺寸、高精度、高速度、大行程及適應(yīng)大負(fù)載的要求。
[Abstract]:In order to improve the applicability of stick-slip nano-positioning platform to different loads, especially to large mass loads, a fuel-slip positioning platform driven by modularization was designed. A mass block, a flexure hinge and a hinge frame are made, and piezoelectric ceramic actuators, pretightening pads and pretightening screws are mounted on the hinge frame to form an independent driving module, which is installed in the slot of the base. Under the action of adjusting screw, the vertical position can be adjusted to change the friction between the contact surface and the platform. The dynamic model of viscous slip driving platform is established and simulated to study the influence of friction force on the performance of the platform. The experimental results show that when the load is 200 g, the minimum step length is 8.84 nm, the maximum velocity is 3.727 mm / s, the maximum velocity is 2.373 mm / s when the friction is unadjusted and the maximum velocity is 3.063 mm / s after adjusting the friction force. Experiments show that the design can meet the requirements of small size, high precision, high speed, large stroke and large load.
【作者單位】: 蘇州大學(xué)江蘇省先進(jìn)機(jī)器人技術(shù)重點(diǎn)實(shí)驗(yàn)室&蘇州納米科技協(xié)同創(chuàng)新中心;
【基金】:國(guó)家重大科研儀器設(shè)備研制專項(xiàng)基金資助項(xiàng)目(61327811) 蘇州市科學(xué)發(fā)展計(jì)劃納米技術(shù)專項(xiàng)基金資助項(xiàng)目(ZXG201433)
【分類號(hào)】:TH703;TQ174.75

【相似文獻(xiàn)】

相關(guān)碩士學(xué)位論文 前3條

1 郭瑤仙;大應(yīng)變PSN-PNN-PZT壓電陶瓷的制備與性能研究[D];天津大學(xué);2016年

2 朱軍輝;全壓電驅(qū)動(dòng)的二維大行程納米定位平臺(tái)研究[D];蘇州大學(xué);2015年

3 吳春婷;壓電陶瓷微定位平臺(tái)的遲滯補(bǔ)償控制方法研究[D];吉林大學(xué);2016年



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