【摘要】：SiC單晶憑借優(yōu)良的特性成為了第三代半導體的核心材料,但是SiC材料高硬度、高耐磨的機械特性和穩(wěn)定的化學特性使加工成為了難點。在將SiC碇加工成晶片的過程中,切割工藝占有重要的地位,切割質量對后續(xù)加工工藝影響甚大。實驗顯示,在固結金剛石線鋸切割SiC單晶片的過程中,線鋸的振動對切割質量有著顯著的影響,而線鋸張力是影響線鋸振動的重要因素,對線鋸張力的控制能夠有效地減小線鋸的振動,從而提高切割晶片的表面質量。本文基于單線往復式金剛石線切割走絲系統(tǒng)的動力學特性,構建了走絲系統(tǒng)張力的數(shù)學模型,研究了走絲速度、導輪摩擦系數(shù)、導輪轉動慣量等參數(shù)對走絲系統(tǒng)線鋸張力的影響規(guī)律,其中:走絲速度與張力變化量成線性關系,線鋸的張力隨著走絲速度的增大而增大;導輪的摩擦系數(shù)與導輪的轉動慣量主要影響的是走絲系統(tǒng)啟動、換向和制動過程中張力變化量的波動特性,前者越大,后者波動越大。設計了一種基于壓力傳感器與絲杠傳動的線鋸張力控制器。完成了控制器機械結構的設計、主要零部件的選型以及控制器硬件系統(tǒng)的設計�；赥MS320F28335型DSP芯片實現(xiàn)了線鋸張力的實時采集、電機轉速控制以及控制器與上位機的通訊等功能。使用LabVIEW圖形化編程軟件開發(fā)了張力控制器的人機交互界面,實現(xiàn)了張力控制器控制參數(shù)的設置、張力的實時顯示以及記錄等功能;提出了一種用于走絲系統(tǒng)張力控制的模糊-PID控制器,與傳統(tǒng)PID控制器相比,模糊-PID控制器能夠在不同走絲速度時對線鋸張力進行更有效地控制。完成了張力控制器的軟硬件調試與實驗,驗證了線鋸張力控制器的有效性。實驗結果顯示,換向時線鋸張力在開環(huán)控制中會急劇的增大或者減小,并且線鋸的張力變化量具有分段性。本文設計的張力控制器在走絲速度為8.52m/s～15.55m/s時可有效抑制換向張力的突變,使得線鋸張力變化量的范圍從開環(huán)時的3.6N到閉環(huán)時的0.4N。
[Abstract]:SiC single crystals have become the core materials of the third generation semiconductors by virtue of their excellent properties, but the high hardness, high wear resistance and stable chemical properties of SiC materials make it difficult to process. In the process of SiC Anchorage processing, cutting technology plays an important role, and the cutting quality has a great influence on the subsequent processing process. The experiment shows that the vibration of the wire saw has a significant effect on the cutting quality during the process of cutting the SiC single crystal slice with the consolidation diamond wire saw, and the tension of the wire saw is an important factor affecting the vibration of the wire saw. The control of the wire saw tension can effectively reduce the vibration of the wire saw and improve the surface quality of the cutting wafer. In this paper, based on the dynamic characteristics of single wire reciprocating diamond wire cutting system, a mathematical model of wire walking system tension is constructed, and the speed of wire walking and the friction coefficient of guide wheel are studied. The influence of the parameters such as the moment of inertia of the guide wheel on the tension of wire saws is discussed. Among them, the wire speed is linearly related to the variation of wire tension, and the tension of wire saws increases with the increase of wire speed. The friction coefficient of the guide wheel and the moment of inertia of the guide wheel mainly affect the fluctuation characteristics of the tension variation in the starting, reversing and braking process of the running wire system. The greater the former is, the greater the fluctuation of the latter is. A wire saw tension controller based on pressure sensor and screw drive is designed. The design of mechanical structure of controller, the selection of main parts and the design of controller hardware system are completed. Based on TMS320F28335 DSP chip, the functions of real time acquisition of wire saw tension, motor speed control and communication between controller and upper computer are realized. The man-machine interactive interface of tension controller is developed by using LabVIEW graphical programming software. The functions of setting control parameters of tension controller, displaying and recording tension in real time are realized. This paper presents a fuzzy pid controller for tension control of wire walking system. Compared with the traditional PID controller, the fuzzy pid controller can effectively control the tension of wire saws at different wire speeds. The software and hardware debugging and experiment of the tension controller are completed, and the validity of the wire saw tension controller is verified. The experimental results show that the tension of the wire saw increases or decreases sharply in the open-loop control and the tension variation of the wire saw is piecewise. The tension controller designed in this paper can effectively restrain the abrupt change of commutative tension when the wire speed is 8.52m/s~15.55m/s. The range of tension variation of wire saw is from 3.6 N in open loop to 0.4 N in closed loop.
【學位授予單位】：西安理工大學
【學位級別】：碩士
【學位授予年份】：2017
【分類號】：TQ163.4

【參考文獻】

相關期刊論文 前10條

1 何超;王英民;李斌;徐偉;郝唯佑;;SiC晶片加工技術現(xiàn)狀與趨勢[J];電子工業(yè)專用設備;2016年06期

2 楊劍;蔡宇宏;張海龍;王田剛;朱恩寶;許國太;;基于LabVIEW的制冷機控制器交互界面設計[J];低溫與超導;2016年04期

3 文波;孟令軍;張曉春;韓朝輝;趙盼盼;;基于增量式PID算法的水溫自動控制器設計[J];儀表技術與傳感器;2015年12期

4 陸程;時偉;;往復走絲線切割電極絲恒張力控制系統(tǒng)研究[J];機床與液壓;2015年23期

5 劉潔;魏金成;伍林;;基于模糊神經(jīng)網(wǎng)絡PID的線切割張力控制系統(tǒng)的分析[J];制造業(yè)自動化;2015年01期

6 王磊;王添依;張弛;張海磊;馮玢;;游離磨粒切割法和金剛石線切割法切割SiC的對比[J];電子工業(yè)專用設備;2014年10期

7 王百順;張志軍;劉凱;張永超;;多線切割機床新型恒張力機構的設計[J];沈陽理工大學學報;2014年03期

8 肖強;何雪莉;;SiC單晶材料加工工藝研究進展[J];材料導報;2014年01期

9 單秀慶;;金屬帶材壓力加工中張力控制系統(tǒng)的探究[J];科技創(chuàng)業(yè)家;2013年20期

10 宋萌萌;肖順根;;基于模糊PID算法的WEDM-LS恒速走絲控制系統(tǒng)的設計[J];江西理工大學學報;2013年05期

相關博士學位論文 前2條

1 蔣近;太陽能硅片多線切割機張力系統(tǒng)控制機理研究及應用[D];湖南大學;2011年

2 高玉飛;電鍍金剛石線鋸切割單晶硅技術及機理研究[D];山東大學;2009年

相關碩士學位論文 前7條

1 張志勇;往復走絲電火花線切割機床電極絲恒張力控制研究[D];哈爾濱工業(yè)大學;2014年

2 李東亞;用于硅晶片加工的劃刀片結構優(yōu)化及其工藝研究[D];蘇州大學;2013年

3 孟磊;碳化硅的線鋸切片技術與加工機理研究[D];山東大學;2011年

4 宋萌萌;基于智能PID的電極絲恒速恒張力控制系統(tǒng)的研究[D];江西理工大學;2010年

5 王亮;太陽能硅片電火花線切割制絨技術研究[D];南京航空航天大學;2009年

6 吳海洋;固結金剛石線鋸的復合電鍍工藝研究[D];大連理工大學;2006年

7 李楊;船用發(fā)電燃氣輪機的仿真研究[D];哈爾濱工程大學;2007年

，

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