本文選題：IGZO靶材 + 共沉淀�。� 參考：《材料熱處理學(xué)報(bào)》2017年07期

【摘要】：分別用化學(xué)共沉淀粉和單元氧化物混合粉為原料燒結(jié)制備In_2Ga_2ZnO_7(IGZO)靶材,對(duì)比研究了煅燒溫度、燒結(jié)溫度、燒結(jié)氣氛、保溫對(duì)靶材燒結(jié)致密度和微觀(guān)結(jié)構(gòu)的影響。結(jié)果表明,混合粉比共沉淀粉更容易促進(jìn)燒結(jié)致密化,但通過(guò)選擇合適的煅燒溫度和燒結(jié)工藝,兩種原料粉均可獲得密度高于99.5%的IGZO靶材。靶材燒成前1100℃保溫效果最好,最佳燒成溫度區(qū)間為1400~1450℃。共沉淀粉優(yōu)選煅燒溫區(qū)為900~1050℃,燒結(jié)時(shí)對(duì)氧氣氣氛更敏感;混合粉優(yōu)選煅燒溫區(qū)為750~900℃,且在氧氣氣氛下燒結(jié)優(yōu)于空氣。此外,共沉淀粉燒結(jié)體晶粒均勻分布、晶界清晰,而混合粉的燒結(jié)體表面晶界模糊,呈"網(wǎng)格狀"和"層狀"形貌。
[Abstract]:Ince _ 2Ga _ 2ZnO _ (7) IGZO targets were sintered by chemical coprecipitation powder and unit oxide mixed powder respectively. The effects of calcination temperature, sintering atmosphere and heat preservation on the density and microstructure of the target sintered were compared. The results show that the mixed powder can promote the sintering densification more easily than the coprecipitation powder, but by choosing the proper calcination temperature and sintering process, the IGZO target with density higher than 99.5% can be obtained by selecting the proper calcination temperature and sintering process. The best heat preservation effect is 1100 鈩，

本文編號(hào)：1904032