LTCC基板用堇青石微晶玻璃的制備與流延工藝研究
發(fā)布時間:2018-03-31 21:17
本文選題:低溫共燒陶瓷 切入點:堇青石 出處:《鄭州大學》2015年碩士論文
【摘要】:低溫共燒陶瓷(LTCC,Low Temperature Cofired Ceramics)技術是電子封裝領域中發(fā)展最快,優(yōu)勢最明顯的一個分支,作為此技術的核心部分,LTCC基板材料的研究始終得到眾多研究者的關注。而在眾多的材料體系中,微晶玻璃體系以其性能的可調控性與良好的熱穩(wěn)定性受到廣泛關注。本論文選用非化學計量比的堇青石微晶玻璃為研究對象,以Mg F2、Ti O2、P2O5、Ce O2為晶核劑,用燒結法制備堇青石微晶玻璃。采用差熱分析、X射線衍射、掃描電子顯微鏡、熱膨脹系數(shù)測試、阻抗分析等現(xiàn)代先進材料研究與表征方法,系統(tǒng)研究了燒結溫度與Mg F2的加入量對微晶玻璃的析晶特性、相組成與相轉變、燒結特性、熱膨脹系數(shù)、介電常數(shù)與介電損耗的影響,詳細探究了晶核劑Ti O2、P2O5、Ce O2對材料析晶特性及相轉變的影響,對流延工藝進行了一定的探究結果表明:F的引入大幅降低了體系的玻璃化轉變溫度與析晶峰值溫度,能夠在較低溫度下燒結致密化,并促進α堇青石的析出。單純通過提高燒結溫度也可以起到同樣的效果。F的引入能通過影響體系析晶的種類和數(shù)量而影響微晶玻璃的熱膨脹系數(shù),燒結溫度則可以影響堇青石的結晶性進而影響其熱膨脹系數(shù),所以通過改變F的含量與燒結溫度可以實現(xiàn)熱膨脹系數(shù)在一定范圍內的調整。樣品的介電性能受晶相組成及燒結致密程度的影響,含F(xiàn)量過大時會導致介電損耗激增。Mg F2添加量為8 wt%的樣品可以在850℃下實現(xiàn)燒結致密化,熱膨脹系數(shù)為3.48×10-6 K-1(25-600℃),介電常數(shù)為5.2,介電損耗為0.0032,有望用于低溫共燒陶瓷基板材料。詳細探究了晶核劑Ti O2、P2O5、Ce O2對材料析晶特性及相轉變的影響。結果表明少量Ti O2或Ce O2的引入有助于α堇青石的析出,過多時則會抑制α堇青石的析出。摻1 wt%Ti O2或Ce O2的樣品熱膨脹系數(shù)小,與硅匹配,介電性能也在合適范圍內,有望用于LTCC電路基板材料。而P2O5的加入不利于α堇青石的析出,且樣品介電損耗過大,不適合用于電子封裝領域。堇青石玻璃粉體含量為24 vol%,分散劑添加量為玻璃粉體質量的2 wt%時,漿料的粘度合適,均勻穩(wěn)定,有利于涂布成膜。燒結后生帶平面方向收縮率13.2%,導熱系數(shù)為2.1 W/m·K,各項性能與國外主流產品性能接近,有望用于LTCC基板材料。
[Abstract]:LTCC low Temperature Cofired Ceramics (LTCC) technology is one of the fastest growing and most obvious branches in the field of electronic packaging. As the core part of this technology, the research of LTCC substrate materials has always been paid attention to by many researchers.Among the many material systems, glass-ceramics has attracted much attention for its controllable properties and good thermal stability.In this paper, cordierite glass-ceramics with non-stoichiometric ratio were selected as the research object, and the cordierite glass-ceramics were prepared by sintering with MgF _ 2O _ 2O _ 2O _ 2P _ 2O _ 5C _ 2O _ 2 as the nucleating agent.By means of differential thermal analysis (DTA) X-ray diffraction, scanning electron microscope (SEM), thermal expansion coefficient test, impedance analysis and other modern advanced material research and characterization methods, the crystallization characteristics of glass-ceramics with sintering temperature and mg F2 content were systematically studied.The effects of phase composition and phase transition, sintering characteristics, thermal expansion coefficient, dielectric constant and dielectric loss on the crystallization characteristics and phase transition of the materials were investigated in detail.The same effect can be achieved by increasing the sintering temperature. The introduction of F can influence the thermal expansion coefficient of glass-ceramics by influencing the type and quantity of crystallization.The crystallization of cordierite and the coefficient of thermal expansion can be affected by sintering temperature, so the coefficient of thermal expansion can be adjusted in a certain range by changing the content of F and sintering temperature.The dielectric properties of the samples are affected by the crystal phase composition and the sintering densification degree. When the content of F is too high, the dielectric loss of the sample with 8 wt% mg F2 can be sintered densified at 850 鈩,
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