Al-doped zinc oxide（AZO） and Ga-doped zinc oxide（GZO） thin films with the same doping concentration（3.6 at%） were deposited on glass substrates at room temperature by direct current（DC） magnetron sputtering.Consequently,we comparatively studied the doped thin films on the basis of their structural,morphological,electrical,and optical properties for optoelectronic applications.Both thin films exhibited excellent optical properties with more than 85%transmission in the visible range.The GZO thin f... 

【文章來源】：Journal of Wuhan University of Technology（Materials Science）. 2017,32(01)EISCI

【文章頁數(shù)】：4 頁


本文編號：3102029