Propagation characteristics of surface acoustic waves（SAWs） in ZnO films/glass substrates are theoretically investigated by the three-dimensional（3D） finite element method. At first, for（11ˉ20） ZnO films/glass substrates, the simulation results confirm that the Rayleigh waves along the [0001] direction and Love waves along the [1ˉ100] direction are successfully excited in the multilayered structures. Next, the crystal orientations of the ZnO films are rotated, and the influences of ZnO films wit... 

【文章來源】：Chinese Physics B. 2017,26(08)

【文章頁數(shù)】：6 頁

【文章目錄】：
1. Introduction
2. Modeling and simulation
3. Results and discussion
    3.1. Characteristics ofk2in Zn O film/glass sub-strate structures
    3.2. Influences of crystal orientations of Zn O films on SAW properties
    3.3. TCF characterizations in Zn O film/glass substrate structures
    3.4. Love wave displacement in （11ˉ20） Zn O film/glass substrate structures
4. Conclusions



本文編號：3079976