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Zinc tin oxide thin films prepared by MOCVD with different S

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  Zinc tin oxide(ZTO) thin films, with zinc acetate and tributyltin chloride as raw materials, were deposited on glass substrates by the method of metal organic chemical vapor deposition(MOCVD). The crystallization, microstructure and optical properties were investigated by scanning electronic microscope(SEM),X-ray diffraction(XRD) and ultraviolet-visible(UV-Vis)spectrophotometer. The results show that with the increase in Sn/Zn ratio, the crystal changes from wurtzite to rutile phase. When the ra... 

【文章來源】:Rare Metals. 2017年09期 第753-757頁

【文章頁數(shù)】:5 頁


本文編號:2898927

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