【摘要】：針對目前集成電路和光學器件向微型化、集成化的發(fā)展趨勢，以及構(gòu)建大規(guī)模光電一體化集成系統(tǒng)的現(xiàn)實需求，基于SOI（Silicon On Insulator）的微環(huán)諧振腔由于其高集成度、與CMOS工藝兼容等優(yōu)點，迅速成為了熱點研究課題，并在高靈敏度傳感器、全光網(wǎng)絡(luò)、光陀螺、光開關(guān)等領(lǐng)域顯示出了巨大的應(yīng)用潛力。 本文結(jié)合國內(nèi)外的微環(huán)諧振腔的研究現(xiàn)狀，采用理論推導(dǎo)分析與模擬仿真驗證相結(jié)合的方法，研究設(shè)計并加工測試了多種基于SOI的微環(huán)諧振腔結(jié)構(gòu)，旨在通過微環(huán)諧振腔的結(jié)構(gòu)優(yōu)化，提高諧振腔的Q值。 首先，本文研究了基于回音壁諧振模（WGM）的微環(huán)諧振腔的理論，，采用耦合模理論和光的干涉理論，對多種單微環(huán)和雙微環(huán)諧振腔結(jié)構(gòu)進行了理論推導(dǎo)和傳輸特性分析。詳細討論了串聯(lián)雙微環(huán)結(jié)構(gòu)（2R1B）的諧振分離特性與兩環(huán)周長比的關(guān)系和并聯(lián)雙微環(huán)結(jié)構(gòu)（2R2B）的耦合誘導(dǎo)透明效應(yīng)（CRIT）的產(chǎn)生條件。 然后，建立了基于有限時域差分算法（FDTD）的多種微環(huán)諧振腔的模擬仿真模型，分別對單微環(huán)耦合雙波導(dǎo)結(jié)構(gòu)（1R2B）和并聯(lián)雙微環(huán)結(jié)構(gòu)（2R2B）的參數(shù)進行了仿真分析和優(yōu)化，并分析了其生物傳感性能。仿真結(jié)果表明，基于CRIT效應(yīng)的2R2B結(jié)構(gòu)其生物傳感靈敏度達到了223.3nm/RIU，約是單微環(huán)的3倍。 最后，本文總結(jié)了仿真的微環(huán)諧振腔結(jié)構(gòu)參數(shù)，并結(jié)合微加工工藝對其進行了版圖設(shè)計和加工測試，為下一步的實驗研究奠定了基礎(chǔ)。
[Abstract]:In view of the development trend of miniaturization and integration of integrated circuits and optical devices, as well as the practical demand of constructing large-scale optoelectronic integrated system, the microloop resonator based on SOI (Silicon On Insulator) has rapidly become a hot research topic because of its high integration and compatibility with CMOS process, and has shown great application potential in the fields of high sensitivity sensors, all-optical networks, optical gyroscopes, optical switches and so on. In this paper, according to the research status of microring resonator at home and abroad, the structure of microring resonator based on SOI is designed and tested by using the method of theoretical derivation analysis and simulation verification. The purpose of this paper is to improve the Q value of microring resonator by optimizing the structure of microring resonator. Firstly, the theory of microring resonator based on echo wall resonance mode (WGM) is studied in this paper. by using coupled mode theory and light interference theory, the theoretical derivation and transmission characteristics of various single and double microring resonator structures are carried out. The relationship between the resonant separation characteristics of series double microring structure (2R1B) and the perimeter ratio of two rings is discussed in detail, and the conditions for the generation of transparency effect (CRIT) induced by the coupling of parallel double microring structure (2R2B) are discussed in detail. Then, the simulation models of various microring resonators based on finite time domain difference (FDTD) algorithm are established. The parameters of single microloop coupled double waveguide structure (1R2B) and parallel double microloop structure (2R2B) are simulated and optimized, and their biosensor performance is analyzed. The simulation results show that the biosensor sensitivity of 2R2B structure based on CRIT effect is 223.3 nm 鈮

本文編號：2502434