【摘要】：以CVD生產(chǎn)的碳化硅為原料在高溫高壓下進(jìn)行退火處理,探究退火溫度對(duì)碳化硅性能的影響。實(shí)驗(yàn)結(jié)果表明:隨著退火溫度的增加,碳化硅的顏色由淺綠色變?yōu)闊o色;體積有明顯的縮小、密度增加;退火后碳化硅的抗壓強(qiáng)度顯著增強(qiáng),機(jī)械強(qiáng)度有所增加;退火后的SiC結(jié)構(gòu)并沒有發(fā)生變化,15R-SiC在798.6 cm~(-1)處拉曼峰強(qiáng)度減少,4H-SiC在970 cm-1拉曼峰強(qiáng)度有所增強(qiáng)。
[Abstract]:Silicon carbide produced by CVD was annealed at high temperature and high pressure to investigate the effect of annealing temperature on the properties of silicon carbide. The experimental results showed that with the increase of annealing temperature, the color of sic changed from light green to colorless, the volume decreased obviously and the density increased, the compressive strength and mechanical strength of sic increased significantly after annealing. The structure of SiC did not change after annealing. The intensity of Raman peak of 15R-SiC decreased at 798.6 cm~ (- 1), and the intensity of Raman peak of 4H-SiC increased at 970 cm-1.
【作者單位】： 牡丹江師范學(xué)院黑龍江省新型碳基功能與超硬材料重點(diǎn)實(shí)驗(yàn)室;
【基金】：牡丹江師范學(xué)院項(xiàng)目(GG2017001,GP201605,SY2014007) 黑龍江省自然基金(E201341)
【分類號(hào)】：TN304.24
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本文編號(hào)：2466493