基于印刷電子工藝的聲表面波器件制備及性能研究
發(fā)布時間：2019-04-20 11:35
【摘要】：印刷電子(Printed Electronics,PE)技術近幾年在電子學領域內發(fā)展迅速,應用印刷電子技術,各類電子產(chǎn)品可以像印刷紙制品一樣被大批量地生產(chǎn)出來,包括各類柔性存儲及顯示器件、傳感器和驅動器、可以拉伸、彎折的薄膜太陽能電池等。論文在研究了印刷電子技術和SAW技術的應用熱點和研究現(xiàn)狀的基礎上,探討了將印刷電子工藝技術應用于聲表面波(Surface Acoustic Wave,SAW)器件制備的方法。采用印刷電子工藝可以較為靈活地在壓電襯底上定義圖形。同時,金屬納米顆粒墨水的快速發(fā)展和廣泛應用,也為應用印刷電子技術制備SAW器件提供了條件。文中分別應用印刷電子工藝中的噴墨打印技術和絲網(wǎng)印刷技術制備SAW濾波器。主要內容包括濾波器的設計與仿真、工藝步驟及參數(shù)說明和SAW器件性能測試及結果分析。文中設計的SAW濾波器為橫向型濾波器,具有單電極、等叉指寬和等指間間隔的IDT模型結構。分別在石英、鈮酸鋰和鉭酸鋰三種壓電材料上應用噴墨打印工藝和絲網(wǎng)印刷工藝制備叉指線寬為50μm和200μm的SAW濾波器,對比三種材料的壓電特性并對制備的濾波器性能進行測試。針對濾波器性能的測試,論文分別進行了形貌測試和電學性能測試,其中形貌測試包括顯微鏡觀測和臺階儀測試,電學性能測試包括阻抗測試,信號傳輸測試以及用網(wǎng)絡分析儀分析其幅頻特性等方式。噴墨打印工藝制備的SAW濾波器在顯微鏡觀測下的叉指線條在尺寸上存在誤差;用萬用表測量其叉指電極的阻抗,基本位于0.3-2.0Ω之間,導電性能良好;臺階儀測試的叉指電極厚度為0.3-0.5μm,叉指換能器周期與設計值基本吻合,鈮酸鋰為襯底的濾波器性能較為突出;應用絲網(wǎng)印刷工藝制備的SAW濾波器的叉指線條邊沿不夠整齊,誤差約為50-100μm,導電層厚度為5-10μm,應用鈮酸鋰和鉭酸鋰作為襯底制備的濾波器能實現(xiàn)濾波特性。論文通過理論分析和大量實驗驗證了應用印刷電子技術制備SAW器件的可行性。以鈮酸鋰作為壓電襯底的噴墨打印制作的SAW濾波器的濾波性能較為突出;以鈮酸鋰和鉭酸鋰作為壓電襯底的絲網(wǎng)印刷制作的SAW濾波器基本實現(xiàn)了濾波特性。測試結果表明,雖然應用印刷電子工藝制備的SAW器件的精確度與微電子工藝相比還有一定的差距,器件的制備工藝方面還有很大的提升空間,但其具有的工藝流程簡單、設備和生產(chǎn)成本低廉、不產(chǎn)生廢液、廢氣等有害物質,且適于大規(guī)模生產(chǎn)等優(yōu)勢具有十分重要的研究價值和經(jīng)濟意義。
[Abstract]:Printed electronics (Printed Electronics,PE) technology has developed rapidly in the field of electronics in recent years. With the application of printed electronic technology, all kinds of electronic products can be produced in large quantities like printed paper products, including all kinds of flexible storage and display devices. Sensors and actuators that can stretch and bend thin film solar cells, etc. Based on the research of printing electronics and SAW technology, the paper discusses the fabrication method of surface acoustic wave (Surface Acoustic Wave,SAW (saw) devices by using printed electronics technology. The graphic can be defined on piezoelectric substrate flexibly by printing electronic process. At the same time, the rapid development and wide application of metal nanoparticle ink also provide conditions for the fabrication of SAW devices by printing electronic technology. In this paper, inkjet printing technology and screen printing technology are used to fabricate SAW filters. The main contents include filter design and simulation, process steps and parameter description, SAW device performance test and results analysis. The SAW filter designed in this paper is a transverse filter with IDT model structure with single electrode, equal finger width and equal interfinger interval. SAW filters with InterDigital linewidth of 50 渭 m and 200 渭 m were fabricated on quartz, lithium niobate and lithium tantalum piezoelectric materials by inkjet printing and screen printing, respectively. The piezoelectric properties of the three materials were compared and the performance of the fabricated filters was tested. For the test of filter performance, the morphology test and electrical performance test are carried out respectively, in which the morphology test includes microscope observation and step meter test, the electrical performance test includes impedance test, and the electrical performance test includes impedance test. Signal transmission test and network analyzer analysis of its amplitude-frequency characteristics and so on. There is an error in the size of the InterDigital line of the SAW filter prepared by the ink jet printing process, and the impedance of the InterDigital electrode is measured by a multimeter, which is basically between 0.3 and 2.0 惟, and the electrical conductivity is good. The thickness of the InterDigital electrode measured by the step meter is 0.3-0.5 渭 m, and the period of the InterDigital transducer is in good agreement with the designed value. The filter performance on the substrate of lithium niobate is relatively prominent. The edge of the SAW filter fabricated by screen printing is not neat, the error is about 50-100 渭 m, and the thickness of conductive layer is 5-10 渭 m. The filter fabricated by using lithium niobate and lithium tantalum as the substrate can achieve the filtering characteristics. The feasibility of using printed electronic technology to fabricate SAW devices is verified by theoretical analysis and a lot of experiments. The filter performance of SAW filter fabricated by ink jet printing using lithium niobate as piezoelectric substrate is outstanding, and the filter performance of SAW filter fabricated by screen printing with lithium niobate and lithium tantalum as piezoelectric substrate is basically realized. The test results show that although the precision of SAW devices fabricated by printed electronic process is still lower than that of microelectronic technology, there is still a lot of room for improvement in the fabrication process of the devices, but the process flow of the device is simple. Low cost of equipment and production, no waste water, waste gas and other harmful substances, and suitable for large-scale production and other advantages have very important research value and economic significance.
【學位授予單位】：天津理工大學
【學位級別】：碩士
【學位授予年份】：2015
【分類號】：TN65
本文編號：2461570
[Abstract]:Printed electronics (Printed Electronics,PE) technology has developed rapidly in the field of electronics in recent years. With the application of printed electronic technology, all kinds of electronic products can be produced in large quantities like printed paper products, including all kinds of flexible storage and display devices. Sensors and actuators that can stretch and bend thin film solar cells, etc. Based on the research of printing electronics and SAW technology, the paper discusses the fabrication method of surface acoustic wave (Surface Acoustic Wave,SAW (saw) devices by using printed electronics technology. The graphic can be defined on piezoelectric substrate flexibly by printing electronic process. At the same time, the rapid development and wide application of metal nanoparticle ink also provide conditions for the fabrication of SAW devices by printing electronic technology. In this paper, inkjet printing technology and screen printing technology are used to fabricate SAW filters. The main contents include filter design and simulation, process steps and parameter description, SAW device performance test and results analysis. The SAW filter designed in this paper is a transverse filter with IDT model structure with single electrode, equal finger width and equal interfinger interval. SAW filters with InterDigital linewidth of 50 渭 m and 200 渭 m were fabricated on quartz, lithium niobate and lithium tantalum piezoelectric materials by inkjet printing and screen printing, respectively. The piezoelectric properties of the three materials were compared and the performance of the fabricated filters was tested. For the test of filter performance, the morphology test and electrical performance test are carried out respectively, in which the morphology test includes microscope observation and step meter test, the electrical performance test includes impedance test, and the electrical performance test includes impedance test. Signal transmission test and network analyzer analysis of its amplitude-frequency characteristics and so on. There is an error in the size of the InterDigital line of the SAW filter prepared by the ink jet printing process, and the impedance of the InterDigital electrode is measured by a multimeter, which is basically between 0.3 and 2.0 惟, and the electrical conductivity is good. The thickness of the InterDigital electrode measured by the step meter is 0.3-0.5 渭 m, and the period of the InterDigital transducer is in good agreement with the designed value. The filter performance on the substrate of lithium niobate is relatively prominent. The edge of the SAW filter fabricated by screen printing is not neat, the error is about 50-100 渭 m, and the thickness of conductive layer is 5-10 渭 m. The filter fabricated by using lithium niobate and lithium tantalum as the substrate can achieve the filtering characteristics. The feasibility of using printed electronic technology to fabricate SAW devices is verified by theoretical analysis and a lot of experiments. The filter performance of SAW filter fabricated by ink jet printing using lithium niobate as piezoelectric substrate is outstanding, and the filter performance of SAW filter fabricated by screen printing with lithium niobate and lithium tantalum as piezoelectric substrate is basically realized. The test results show that although the precision of SAW devices fabricated by printed electronic process is still lower than that of microelectronic technology, there is still a lot of room for improvement in the fabrication process of the devices, but the process flow of the device is simple. Low cost of equipment and production, no waste water, waste gas and other harmful substances, and suitable for large-scale production and other advantages have very important research value and economic significance.
【學位授予單位】：天津理工大學
【學位級別】：碩士
【學位授予年份】：2015
【分類號】：TN65
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