【摘要】：針對(duì)單晶硅超精密切削過(guò)程中金剛石刀具磨損問(wèn)題,對(duì)單晶硅進(jìn)行超精密車(chē)削試驗(yàn)。通過(guò)觀察金剛石刀具磨損演變過(guò)程,分析刀具的磨損過(guò)程對(duì)表面加工質(zhì)量的影響,得到刀具磨損機(jī)理。結(jié)果表明,在超精密切削單晶硅過(guò)程中,隨著切削距離的增加,刀具磨損面積逐漸增加,加工過(guò)程中產(chǎn)生的碳化硅及類似金剛石碳顆粒與刀具后刀面發(fā)生劃擦造成磨粒磨損;同時(shí),由于交變載荷作用導(dǎo)致的應(yīng)力疲勞現(xiàn)象,進(jìn)而伴有解理斷裂產(chǎn)生。當(dāng)切削路程小于4km時(shí),加工表面的粗糙度Ra值在200nm以內(nèi),切削路程大于8km時(shí),表面粗糙度Ra值在350nm~400nm之間。
[Abstract]:Aiming at the wear problem of diamond tool in the process of single crystal silicon ultra-precision cutting, the ultra-precision turning test of single crystal silicon is carried out. By observing the evolution process of diamond tool wear and analyzing the influence of tool wear process on surface machining quality, the tool wear mechanism is obtained. The results show that the tool wear area increases gradually with the increase of cutting distance during ultra-precision cutting of monocrystalline silicon. At the same time, stress fatigue caused by alternating load is accompanied by cleavage fracture. When the cutting distance is less than 4km, the roughness Ra value of the machined surface is within 200nm. When the cutting distance is larger than 8km, the Ra value of surface roughness is between 350nm~400nm.
【作者單位】： 沈陽(yáng)航空航天大學(xué)航空制造工藝數(shù)字化國(guó)防重點(diǎn)學(xué)科實(shí)驗(yàn)室;
【基金】：航空科學(xué)基金(2013ZE54002)
【分類號(hào)】：TN305.1

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