發(fā)布時(shí)間：2018-11-24 13:00

【摘要】：隨著激光技術(shù)的發(fā)展,激光由于其特殊的優(yōu)異性質(zhì)在很多領(lǐng)域展現(xiàn)了無(wú)與倫比的優(yōu)勢(shì)。激光微加工是激光加工應(yīng)用中的一個(gè)重要研究方向。我國(guó)目前的激光微加工研究集中在基于平面上進(jìn)行的各種精微加工領(lǐng)域。隨著激光微加工應(yīng)用的不斷深入,對(duì)于三維結(jié)構(gòu)或工件進(jìn)行微加工的要求越來(lái)越迫切。依靠現(xiàn)有的二維和準(zhǔn)三維方式很難實(shí)現(xiàn)高速高精度的三維精微加工。因此,發(fā)展一種三維掃描加工系統(tǒng)對(duì)于擴(kuò)展激光微加工的應(yīng)用領(lǐng)域,提高我國(guó)激光微加工技術(shù),縮短與發(fā)達(dá)國(guó)家激光應(yīng)用技術(shù)水平的差距具有重要意義。提出將激光動(dòng)態(tài)聚焦系統(tǒng)整合進(jìn)激光微加工系統(tǒng)中的方案,對(duì)現(xiàn)有激光準(zhǔn)三維加工系統(tǒng)進(jìn)行分析,通過(guò)計(jì)算、設(shè)計(jì)和ZEMAX模擬,設(shè)計(jì)了搭載于現(xiàn)有激光準(zhǔn)三維微加工系統(tǒng)的動(dòng)態(tài)聚焦鏡。實(shí)現(xiàn)了激光大尺度三維動(dòng)態(tài)加工系統(tǒng),激光三維掃描加工范圍達(dá)到150mm×150mm×50mm,激光焦斑直徑小于10um。本文從傳統(tǒng)的激光二維和三維加工技術(shù)入手,介紹了當(dāng)前激光三維加工技術(shù)的現(xiàn)狀和三維加工系統(tǒng)的不足。然后介紹了動(dòng)態(tài)聚焦掃描系統(tǒng)的原理,包括分析二維振鏡掃描原理,介紹動(dòng)態(tài)聚焦鏡光杠桿原理。并在此分析的初上,詳細(xì)介紹了基于ZEMAX的遠(yuǎn)心F-Theta鏡、動(dòng)態(tài)聚焦鏡光學(xué)設(shè)計(jì)。選定音圈電機(jī)作為動(dòng)態(tài)聚焦鏡驅(qū)動(dòng)機(jī)構(gòu)并切實(shí)搭建了激光大尺度三維動(dòng)態(tài)掃描加工系統(tǒng),提出了動(dòng)態(tài)聚焦掃描系統(tǒng)的兩種掃描方式-準(zhǔn)三維動(dòng)態(tài)聚焦掃描和三維聯(lián)動(dòng)動(dòng)態(tài)聚焦掃描。通過(guò)實(shí)驗(yàn)研究了本系統(tǒng)的動(dòng)態(tài)聚焦特性,對(duì)兩種掃描方式進(jìn)行了實(shí)驗(yàn)驗(yàn)證。
[Abstract]:With the development of laser technology, laser has shown unparalleled advantages in many fields because of its special excellent properties. Laser micromachining is an important research direction in the application of laser processing. At present, the research of laser micromachining in China is focused on various fine machining fields based on plane. With the development of laser micromachining, the requirement of 3D structure or workpiece micromachining is becoming more and more urgent. It is difficult to realize high-speed and high-precision three-dimensional micro machining by existing two-dimensional and quasi-three-dimensional methods. Therefore, it is of great significance to develop a 3D scanning machining system for expanding the application field of laser micromachining, improving the technology of laser micromachining in China, and shortening the gap between China and the developed countries in the level of laser application technology. The scheme of integrating laser dynamic focusing system into laser micromachining system is put forward. The existing laser quasi-three-dimensional machining system is analyzed, and through calculation, design and ZEMAX simulation, A dynamic focusing mirror mounted on the existing laser quasi-three-dimensional micromachining system is designed. The laser large scale 3D dynamic machining system is realized. The laser scanning range is 150mm 脳 150mm 脳 50mm, and the laser focal spot diameter is less than 10um. In this paper, the current situation of laser 3D machining technology and the deficiency of 3D machining system are introduced, starting with the traditional two dimensional and three dimensional laser machining techniques. Then the principle of dynamic focusing scanning system is introduced, including analyzing the scanning principle of two dimensional vibroscope and introducing the principle of optical lever of dynamic focusing mirror. At the beginning of this analysis, the optical design of telecentric F-Theta mirror and dynamic focusing mirror based on ZEMAX is introduced in detail. The sound coil motor is chosen as the driving mechanism of the dynamic focusing mirror and the laser large scale 3D dynamic scanning machining system is built. In this paper, two kinds of scanning methods of dynamic focusing scanning system, namely, quasi-3D dynamic focusing scanning and three dimensional linkage dynamic focusing scanning, are proposed. The dynamic focusing characteristics of the system are studied experimentally, and the two scanning methods are verified experimentally.
【學(xué)位授予單位】：華中科技大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2015
【分類號(hào)】：TN249

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