【摘要】：本文介紹了氮化鋁蘭姆波MEMS諧振器以及基于該諧振器的帶通濾波器、傳感器的設(shè)計與制造。氮化鋁蘭姆波MEMS諧振器是一種新型壓電諧振器,其制造工藝與集成電路工藝兼容,且可實現(xiàn)多頻率器件的單片集成;其品質(zhì)因子較高,可應(yīng)用于振蕩器、濾波器及傳感器的設(shè)計中,故其相關(guān)研究受到了廣泛關(guān)注。本文首先介紹了氮化鋁蘭姆波諧振器的工作原理,對其設(shè)計和制造進行了深入研究。研究表明諧振器尺寸對其性能系數(shù)(FOM)有較大影響,諧振器的最優(yōu)設(shè)計尺寸可使FOM達到最佳�；谠撘�(guī)律,本文設(shè)計制造了基于該諧振器的中頻窄帶濾波器,該濾波器表現(xiàn)出了較低的插入損耗和陡峭的滾降。之后,本文繼續(xù)優(yōu)化了濾波器設(shè)計。通過結(jié)合電容電感網(wǎng)絡(luò),濾波器實現(xiàn)了與50歐姆射頻系統(tǒng)的匹配;本文進一步將蘭姆波濾波器與電容集成,系統(tǒng)整體的面積進一步縮小,電路設(shè)計進一步簡化。另外,本文還研究了蘭姆波諧振器作為傳感器的特征,尤其是其在液相環(huán)境下的表現(xiàn)。為減小液體對諧振器性能的削弱,本文將微流體技術(shù)與諧振器集成,這樣,傳感器不僅可以實現(xiàn)極小量樣本檢測,其優(yōu)良性能還可以得到維持,保證傳感器擁有更小的探測極限和更高的靈敏度。
[Abstract]:In this paper, the design and fabrication of MEMS resonator based on aluminum nitride and its bandpass filter and sensor are introduced. Aluminum nitride Lamb wave MEMS resonator is a new type of piezoelectric resonator. Its fabrication process is compatible with integrated circuit technology, and it can realize monolithic integration of multi-frequency devices. Because of its high quality factor, it can be used in the design of oscillator, filter and sensor. In this paper, the working principle of aluminum nitride Lamb wave resonator is introduced, and its design and manufacture are studied. The results show that the size of the resonator has a great influence on the performance coefficient (FOM), and the optimum design size of the resonator can make the FOM achieve the best. Based on this rule, the intermediate frequency narrow band filter based on the resonator is designed and manufactured. The filter shows low insertion loss and steep roll down. After that, this paper continues to optimize the filter design. By combining the capacitive inductance network, the filter is matched with the 50 ohms RF system, the Lamb wave filter is further integrated with the capacitor, the whole area of the system is further reduced, and the circuit design is further simplified. In addition, the characteristics of Lamb wave resonator as a sensor, especially its performance in liquid phase environment, are studied. In order to reduce the weakening of the performance of the resonator by liquid, the micro-fluid technology is integrated with the resonator in this paper. In this way, the sensor can not only realize the minimal sample detection, but also maintain its excellent performance. Ensure that the sensor has a smaller detection limit and higher sensitivity.
【學位授予單位】：天津大學
【學位級別】：碩士
【學位授予年份】：2015
【分類號】：TN713;TP212

【共引文獻】

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本文編號：2348889