【摘要】：浸沒(méi)光刻機(jī)是應(yīng)用于集成電路制造的關(guān)鍵設(shè)備,其浸沒(méi)系統(tǒng)的浸液溫度是影響其性能指標(biāo)的關(guān)鍵因素之一。浸液溫度控制的性能主要由浸液系統(tǒng)的結(jié)構(gòu)與浸液系統(tǒng)的控制算法決定,本文主要研究浸液系統(tǒng)的結(jié)構(gòu)。主要研究工作和結(jié)論如下:提出了使用冷卻水通過(guò)熱交換器控制浸液溫度和調(diào)節(jié)冷卻水的流量控制浸液溫度的穩(wěn)定性的浸液溫控原理。與通過(guò)直接加熱和制冷方式控制浸液溫度的原理相比,有效地利用了工廠(chǎng)的冷卻水系統(tǒng),無(wú)需制冷加熱裝置,降低了用戶(hù)使用成本,且可以獲得更高的溫度穩(wěn)定性和抗干擾能力。提出了在浸液溫控回路中嵌套循環(huán)回路的初步技術(shù)方案,使部分浸液一直處于溫控狀態(tài),增大回路中浸液流量,從而使其抗環(huán)境溫度變化產(chǎn)生的擾動(dòng)的能力更強(qiáng),同時(shí),將流量伺服閥設(shè)計(jì)在循環(huán)回路中對(duì)出口流量進(jìn)行調(diào)節(jié),避免了對(duì)出口溫度的影響。并建立了實(shí)驗(yàn)裝置對(duì)該技術(shù)方案進(jìn)行了實(shí)驗(yàn)驗(yàn)證,實(shí)驗(yàn)數(shù)據(jù)表明,該技術(shù)方案可以獲得更好的溫度穩(wěn)定性。樣機(jī)設(shè)計(jì)將溫控系統(tǒng)與浸液處理系統(tǒng)進(jìn)行了集成,分析了污染處理器件、去氣器件和流量泵等產(chǎn)生熱量對(duì)浸液溫度的干擾,將上述器件設(shè)計(jì)在循環(huán)回路的前端,有效降低了其對(duì)溫控控制的影響。完成了結(jié)構(gòu)詳細(xì)設(shè)計(jì),并實(shí)現(xiàn)了樣機(jī)的制造集成。樣機(jī)的測(cè)試結(jié)果表明該系統(tǒng)達(dá)到了22±0.01℃@30分鐘的溫度控制性能,實(shí)現(xiàn)了用戶(hù)需求的主要功能,并通過(guò)了用戶(hù)的測(cè)試,為浸沒(méi)光刻機(jī)浸液控制系統(tǒng)的研發(fā)奠定了良好的技術(shù)基礎(chǔ)。
[Abstract]:Immersion lithography machine is a key equipment used in integrated circuit manufacturing. The immersion temperature of immersion system is one of the key factors affecting its performance. The performance of temperature control is mainly determined by the structure of the immersion system and the control algorithm of the immersion system. In this paper, the structure of the immersion system is studied. The main research work and conclusions are as follows: the principle of controlling the temperature of leachate by using cooling water through heat exchanger and regulating the flow rate of cooling water to control the stability of temperature is put forward. Compared with the principle of controlling the immersion temperature by direct heating and refrigeration, the cooling water system of the factory is utilized effectively, without the need of refrigeration and heating device, and the cost of the user is reduced. And can obtain higher temperature stability and anti-interference ability. A preliminary technical scheme of nested circulating loop in the temperature control loop of dipping fluid is put forward, which makes part of the leachate in the state of temperature control always in the state of temperature control, increases the flow rate of the leachate in the loop, so that it has a stronger ability to resist the disturbance caused by the change of ambient temperature, at the same time, The flow servo valve is designed to adjust the outlet flow rate in the circulation loop to avoid the influence on the outlet temperature. The experimental results show that the scheme can achieve better temperature stability. The prototype design integrates the temperature control system with the immersion treatment system, analyzes the interference of heat produced by the pollution treatment device, degassing device and flow pump on the immersion temperature, and designs the above devices in the front end of the circulation loop. It can effectively reduce its influence on temperature control. The structure is designed in detail, and the manufacturing integration of the prototype is realized. The test results of the prototype show that the system achieves the temperature control performance of 22 鹵0.01 鈩，

本文編號(hào)：2299896