【摘要】：近些年來,探索將射頻和光頻成像探測(cè)技術(shù)相融合的有效方法和技術(shù)措施,已成為國(guó)際國(guó)內(nèi)的一個(gè)研究熱點(diǎn),受到了廣泛關(guān)注和重視�；A(chǔ)研究表明,發(fā)展基于超材料的太赫茲成像探測(cè)方法,可為實(shí)現(xiàn)真正意義上的射頻、光頻一體化圖像信息捕獲提供可能手段。超材料是一種人工復(fù)合材料,擁有獨(dú)特的電磁傳輸、介電和物質(zhì)作用屬性�；谔厥庑枨笤O(shè)計(jì)的圖案化微納介電結(jié)構(gòu),可使其介電和磁導(dǎo)系數(shù)呈現(xiàn)所需要的量值甚至負(fù)值從而呈現(xiàn)特殊物性。一般而言,頻率約在0.1~10THz范圍內(nèi)的太赫茲波處在特殊電磁譜段,具有光頻、射頻二元波譜屬性。太赫茲成像探測(cè)技術(shù),具有較射頻更高的成像分辨率、對(duì)比度和均勻性,以及較光頻更大的穿透深度和更遠(yuǎn)的觀察與作用距離。迄今為止,能有效探測(cè)太赫茲和長(zhǎng)波紅外輻射的材料及功能架構(gòu)極端缺乏。超材料的出現(xiàn),為解決這一問題帶來了契機(jī)。本文主要針對(duì)基于超材料的太赫茲和長(zhǎng)波紅外輻射探測(cè)結(jié)構(gòu)開展研究工作,主要內(nèi)容和創(chuàng)新點(diǎn)如下:基于納米金屬模和高純砷化鎵復(fù)合結(jié)構(gòu),分別構(gòu)建了多種太赫茲與長(zhǎng)波紅外超材料探測(cè)架構(gòu)。利用該架構(gòu)與入射電磁波的共振響應(yīng)特性,可以得到更佳的探測(cè)效能,通過調(diào)變超材料架構(gòu)的結(jié)構(gòu)形貌和特征尺寸,可以有效改變其基于輻射探測(cè)的共振頻率;利用有限元法和自適應(yīng)網(wǎng)格加密技術(shù),對(duì)所構(gòu)建的超材料探測(cè)架構(gòu)的電、磁特性以及表面瞬態(tài)電流分布特性進(jìn)行了仿真計(jì)算;利用傳輸矩陣算法模擬了超材料探測(cè)架構(gòu)的傳輸率特性;通過優(yōu)化結(jié)構(gòu)和參數(shù)配置,確定了超材料探測(cè)架構(gòu)的結(jié)構(gòu)特征和核心參數(shù)指標(biāo);根據(jù)陣列化超材料探測(cè)架構(gòu)的結(jié)構(gòu)特征與制作工藝要求,設(shè)計(jì)了典型器件及其變體的形貌結(jié)構(gòu)指標(biāo),基于標(biāo)準(zhǔn)微電子工藝完成了多組器件的制作、測(cè)評(píng)及封裝;設(shè)計(jì)了信號(hào)測(cè)試電路,搭建了器件測(cè)試平臺(tái),獲得了特征光電響應(yīng)特性,基于測(cè)試結(jié)果與仿真數(shù)據(jù),分析并規(guī)劃了進(jìn)一步的技術(shù)發(fā)展路線;通過綜合太赫茲成像探測(cè)和太赫茲相控陣的結(jié)構(gòu)特征,設(shè)計(jì)了一種太赫茲相控陣并完成了結(jié)構(gòu)制作和測(cè)試,比較和分析了這種結(jié)構(gòu)通過不同陣元相位的調(diào)節(jié)來達(dá)到最強(qiáng)探測(cè)輸出,該探測(cè)方法較傳統(tǒng)方法具有更高的探測(cè)波束掃描速度。
[Abstract]:In recent years, exploring the effective methods and technical measures of combining radio-frequency imaging and optical frequency imaging detection technology has become a research hotspot at home and abroad, and has received extensive attention and attention. The basic research shows that the development of terahertz imaging detection method based on metamaterials can provide a possible means for the realization of real radio-frequency and optic-frequency integrated image information acquisition. Metamaterials are artificial composites with unique electromagnetic transmission, dielectric and material properties. The patterned micro-nano dielectric structure designed based on special requirements can make the dielectric and magnetic conductance coefficients present the required values or even negative values and thus present special physical properties. In general, terahertz waves with frequencies in the range of 0.1~10THz are in special electromagnetic spectrum, and have the properties of optical frequency and radio frequency binary spectrum. Terahertz imaging detection technology has higher imaging resolution, greater contrast and uniformity, greater penetration depth and longer observation and action distance than radiofrequency. To date, there is an extreme shortage of materials and functional structures capable of effectively detecting terahertz and long-wave infrared radiation. The emergence of metamaterials brings an opportunity to solve this problem. This paper mainly focuses on terahertz and long-wave infrared radiation detection structures based on metamaterials. The main contents and innovations are as follows: based on nano-metal mode and high-purity gallium arsenide composite structure, Several terahertz and long wave infrared metamaterials detection architectures are constructed. By using the resonance response characteristics of the structure and the incident electromagnetic wave, the detection efficiency can be obtained, and the resonance frequency based on radiation detection can be changed effectively by changing the structure morphology and characteristic size of the supermaterial structure. By using finite element method and adaptive mesh encryption technique, the electrical, magnetic and surface transient current distribution characteristics of the supermaterial detection architecture are simulated and calculated. The transmission rate characteristics of the metamaterial detection architecture are simulated by using the transfer matrix algorithm, and the structural characteristics and core parameters of the metamaterial detection architecture are determined by optimizing the structure and parameter configuration. According to the structural characteristics and fabrication process requirements of the array supermaterial detection architecture, the morphologies and structure indexes of typical devices and their variants are designed, and the fabrication, evaluation and packaging of multiple devices are completed based on the standard microelectronic technology. The signal test circuit is designed, the device testing platform is built, and the characteristic photoelectric response characteristic is obtained. Based on the test results and simulation data, the further technical development route is analyzed and planned. A terahertz phased array is designed by synthesizing the structure characteristics of terahertz imaging detection and terahertz phased array. It is compared and analyzed that the structure achieves the strongest detection output by adjusting the phase of different array elements. The detection method has higher scanning speed than the traditional method.
【學(xué)位授予單位】：華中科技大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2015
【分類號(hào)】：TN215;O441

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本文編號(hào)：2291085