【摘要】：MOCVD設(shè)備作為LED產(chǎn)業(yè)鏈上游的重要設(shè)備之一,國內(nèi)研發(fā)起步較晚,在其原位監(jiān)測系統(tǒng)方面尤其短缺,本文以MOCVD原位監(jiān)測系統(tǒng)為研究對象,旨在設(shè)計出一套可用于南昌大學(xué)自主研發(fā)的大型MOCVD設(shè)備的原位監(jiān)測系統(tǒng),通過硬件設(shè)計及軟件開發(fā),力圖為外延片生長過程的觀測,原位監(jiān)測系統(tǒng)的思路拓展提供參照。本文主要工作內(nèi)容包括硬件設(shè)計及軟件開發(fā)。硬件設(shè)計中,通過多種芯片對比,選用DSP為SOC系統(tǒng)核心,完成局部電路設(shè)計及模塊設(shè)計。繼而對比串口通信,以太網(wǎng)通信及無線通信三種通信方式,選用合理方案。之后根據(jù)設(shè)備實際需求,使用程控放大器對微弱溫度信號放大并整波,通過小波變換的濾波方式對信號的強噪聲進行處理。加以整合后完成硬件部分的設(shè)計工作。軟件開發(fā)主要從軟件的整體結(jié)構(gòu),通信協(xié)議設(shè)計,數(shù)據(jù)庫模塊及數(shù)據(jù)處理模塊展開工作。通信協(xié)議基于TCP協(xié)議及RS232通信協(xié)議分別進行改寫,根據(jù)MOCVD數(shù)據(jù)傳輸特點,減少部分控制字,提高有用信號占比,提升傳輸效率。數(shù)據(jù)庫模塊對比了MSSQL,Fire Bird,ACCESS三種不同數(shù)據(jù)庫,基于數(shù)據(jù)庫處理速度及數(shù)據(jù)庫兼容性選用ACCESS作為軟件數(shù)據(jù)庫,并有針對性的設(shè)計數(shù)據(jù)表結(jié)構(gòu)。數(shù)據(jù)處理模塊完成了從下位機上傳的原始數(shù)據(jù)處理為可用的實際數(shù)據(jù),數(shù)據(jù)篩選,可視化處理及數(shù)據(jù)壓縮的工作。在完成以上工作后通過軟件整體設(shè)計,建立可視化界面,完成可用于實際生產(chǎn)的MOCVD原位監(jiān)測系統(tǒng)上位機軟件。通過以上工作,完成原位監(jiān)測系統(tǒng)樣機并進行整體調(diào)試,調(diào)試結(jié)果良好,通信及數(shù)據(jù)傳輸穩(wěn)定,速率滿足工藝要求,上位機軟件使用方便,數(shù)據(jù)圖像清晰,監(jiān)測效果良好。可以滿足MOCVD設(shè)備生產(chǎn)應(yīng)用中的需求。通過本文工作,精簡了監(jiān)控設(shè)備,降低MOCVD設(shè)備成本,優(yōu)化數(shù)據(jù)處理過程,提升外延片生長過程的監(jiān)控效率,給外延片生長工藝的優(yōu)化提供了數(shù)據(jù)支持,為南昌大學(xué)自主研發(fā)的大型生產(chǎn)型MOCVD設(shè)備后續(xù)的優(yōu)化設(shè)計提供參考。
[Abstract]:As one of the important equipments in the upstream of LED industry chain, MOCVD equipment started late in domestic research and development, especially in its in-situ monitoring system. This paper takes MOCVD in-situ monitoring system as the research object. The purpose of this paper is to design an in-situ monitoring system for large-scale MOCVD equipment independently developed by Nanchang University. Through hardware design and software development, this paper tries to provide a reference for the observation of the growth process of the epitaxial wafer and the extension of the train of thought of the in-situ monitoring system. The main work of this paper includes hardware design and software development. In the hardware design, DSP is chosen as the core of the SOC system through the comparison of various chips, and the local circuit design and module design are completed. Then compare the serial communication, Ethernet communication and wireless communication, choose a reasonable scheme. Then according to the actual demand of the equipment, the weak temperature signal is amplified and integrated by the programmable amplifier, and the strong noise of the signal is processed by the filtering method of wavelet transform. After the integration of the hardware part of the design. Software development mainly includes the whole structure of software, communication protocol design, database module and data processing module. The communication protocol is rewritten based on TCP protocol and RS232 protocol. According to the characteristics of MOCVD data transmission, the communication protocol can reduce some control words, improve the proportion of useful signals and improve the transmission efficiency. The database module compares three different databases of MSSQL,Fire Bird,ACCESS. Based on the database processing speed and database compatibility, ACCESS is chosen as the software database, and the data table structure is designed. The data processing module completes the processing of raw data uploaded from the lower computer to usable actual data, data filtering, visual processing and data compression. After the above work has been completed, the software of MOCVD in-situ monitoring system can be realized through the overall design of the software and the establishment of the visual interface. Through the above work, the prototype of the in-situ monitoring system is completed and debugged as a whole. The debugging results are good, the communication and data transmission are stable, the speed meets the technological requirements, the upper computer software is convenient to use, the data image is clear and the monitoring effect is good. Can meet the requirements of MOCVD equipment production applications. Through the work of this paper, the monitoring equipment is simplified, the cost of MOCVD equipment is reduced, the process of data processing is optimized, the monitoring efficiency of the growth process of the epitaxial wafer is improved, and the data support is provided for the optimization of the growth process of the epitaxial wafer. It provides a reference for further optimization design of large production MOCVD equipment independently developed by Nanchang University.
【學(xué)位授予單位】：南昌大學(xué)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2017
【分類號】：TN304.055;TP311.52

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