【摘要】：針對半導(dǎo)體制造中有滯留時(shí)間約束的集束型裝備,研究了客戶緊急訂單、返工、新產(chǎn)品試制等臨時(shí)晶圓到達(dá)時(shí)的在線調(diào)度問題,提出了不改變已有晶圓調(diào)度的前提下,利用資源空閑時(shí)間區(qū)間的兩層在線調(diào)度方法。外層算法通過改進(jìn)量子進(jìn)化算法用以優(yōu)化臨時(shí)晶圓加工排序;內(nèi)層算法在給定晶圓排序的基礎(chǔ)上,采用后向逐級遞推的策略從資源的空閑時(shí)間區(qū)間獲得可行解,利用逆序最大逐級回溯策略在可行解空間獲得晶圓的加工開始時(shí)間。通過不同規(guī)模測試問題上的仿真實(shí)驗(yàn)和算法比較,驗(yàn)證了提出方法的有效性。
[Abstract]:For cluster equipment with retention time constraint in semiconductor manufacturing, the on-line scheduling problem of temporary wafer arrival such as customer emergency order, rework, new product trial production and so on is studied, and the premise of not changing the existing wafer scheduling is put forward. A two-layer online scheduling method based on resource idle time interval is proposed. The outer layer algorithm uses the improved quantum evolutionary algorithm to optimize the processing order of the temporary wafer, and the inner layer algorithm obtains the feasible solution from the free time interval of the resource by using the strategy of backward stepwise recursion on the basis of the given order of wafer. The starting time of wafer processing is obtained in the feasible solution space by using the reverse order maximum step by step backtracking strategy. The effectiveness of the proposed method is verified by simulation experiments and algorithm comparisons on different scale test problems.
【作者單位】： 大連外國語大學(xué)軟件學(xué)院;遼寧警察學(xué)院公安信息系;
【基金】：國家自然科學(xué)基金(61501082) 遼寧省教育廳科學(xué)研究一般項(xiàng)目(L2015137,L2014011,L2014455,L2014456)
【分類號】：TN305;TP18
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本文編號：2174608