【摘要】：分布反饋染料激光器基板上的高精度微米級(jí)(通常為10μm以下)布拉格光柵是實(shí)現(xiàn)激光波長(zhǎng)調(diào)諧和保證激光輸出質(zhì)量的關(guān)鍵。布拉格光柵是線性三維周期微溝槽陣列,通常采用MEMS技術(shù)和能量輔助技術(shù)加工。但是上述技術(shù)普遍存在加工精度低、被加工材料單一、加工成本高、生產(chǎn)周期長(zhǎng)等問題,從而限制了激光輸出效率和質(zhì)量的提高。結(jié)合實(shí)際需要和加工條件,本課題使用金剛石飛刀切削技術(shù)在PMMA(有機(jī)玻璃)基板加工布拉格光柵,借助數(shù)值模擬、基礎(chǔ)實(shí)驗(yàn)類比、有限元仿真和工藝實(shí)驗(yàn)驗(yàn)證相結(jié)合的方法,研究PMMA基板的力學(xué)特性和加工性能,類比地分析飛刀切削過程中的切屑流動(dòng)過程對(duì)加工質(zhì)量的影響,預(yù)測(cè)各加工參數(shù)對(duì)飛刀切削過程中切屑流動(dòng)性好壞、應(yīng)力應(yīng)變的影響規(guī)律,采用聲發(fā)射技術(shù)完成亞微米級(jí)精度對(duì)刀,通過單因素試驗(yàn)驗(yàn)證理論與仿真的預(yù)測(cè)結(jié)果,優(yōu)化工藝參數(shù)。這些工作對(duì)最終在PMMA基板上獲得高質(zhì)量布拉格光柵具有重要的理論借鑒意義和實(shí)際應(yīng)用價(jià)值。本文通過顯微壓痕試驗(yàn)測(cè)量出材料維氏硬度和壓痕形貌,并研究材料在微米級(jí)去除量下的彈塑性表現(xiàn)。結(jié)合納米壓痕試驗(yàn)計(jì)算材料基本力學(xué)性能參數(shù),模擬材料的應(yīng)力-應(yīng)變曲線,為仿真試驗(yàn)做準(zhǔn)備。采用超精密車削獲得高質(zhì)量的PMMA工件端面,借助微刨削實(shí)驗(yàn)與飛刀切削實(shí)驗(yàn)過程、結(jié)果的類比,深入了解飛刀切削布拉格光柵的優(yōu)勢(shì)和劣勢(shì)。并結(jié)合飛刀切削力公式分析影響切削質(zhì)量的因素,得出:刀尖前刀面非自由切屑區(qū)域內(nèi)切屑流動(dòng)性對(duì)加工質(zhì)量具有重要影響。應(yīng)用有限元仿真方法,根據(jù)實(shí)際加工過程,建立三維刀具、工件切削模型,用grooving模式對(duì)刀尖前刀面非自由切屑區(qū)域內(nèi)的切削過程進(jìn)行簡(jiǎn)化仿真,同時(shí)結(jié)合壓痕試驗(yàn)結(jié)果選擇軟件自帶本構(gòu)模型并完成各項(xiàng)參數(shù)的設(shè)置。研究了背吃刀量、切削速度和刀尖夾角對(duì)切削過程中切屑流動(dòng)性、應(yīng)力、應(yīng)變的影響。搭建實(shí)驗(yàn)平臺(tái),創(chuàng)新地采用聲發(fā)射技術(shù)完成飛刀切削亞微米級(jí)精度對(duì)刀,并應(yīng)用聲發(fā)射系統(tǒng)分析飛刀切削狀態(tài);通過單因素工藝試驗(yàn)結(jié)果對(duì)比,研究并驗(yàn)證各因素對(duì)加工質(zhì)量的影響規(guī)律,在此基礎(chǔ)上,優(yōu)化工藝參數(shù),獲得高質(zhì)量的布拉格光柵。
[Abstract]:The high precision micrometer Bragg grating (usually less than 10 渭 m) on the substrate of distributed feedback dye laser is the key to realize the wavelength tuning and ensure the laser output quality. Bragg grating (FBG) is a linear three-dimensional periodic microgroove array, which is usually machined by MEMS and energy-assisted technology. However, the problems such as low machining precision, single processed material, high processing cost and long production cycle limit the improvement of laser output efficiency and quality. According to the practical needs and processing conditions, this paper uses the diamond flying knife cutting technology to process the Bragg grating on the PMMA substrate, and combines the numerical simulation, the basic experimental analogy, the finite element simulation and the technological experiment to verify the FBG. The mechanical properties and machining properties of PMMA substrate are studied. The influence of chip flow process on machining quality is analyzed by analogy, and the influence of processing parameters on chip fluidity and stress strain during flying knife cutting is predicted. The submicron precision tool is realized by acoustic emission technology. The prediction results of theory and simulation are verified by single factor test, and the process parameters are optimized. These works have important theoretical reference significance and practical application value for obtaining high quality Bragg grating on PMMA substrate. In this paper, the Vickers hardness and indentation morphology were measured by microindentation test, and the elastoplastic behavior of the materials at micron removal was studied. Combined with nano-indentation test to calculate the basic mechanical properties of the material and simulate the stress-strain curve of the material to prepare for the simulation test. The end face of PMMA workpiece with high quality is obtained by ultra-precision turning. The advantages and disadvantages of Flying knife cutting Bragg grating are deeply understood by means of the experiment of micro-planing and the experimental process of flying knife cutting. Combined with the cutting force formula of flying knife, the factors affecting cutting quality are analyzed. It is concluded that chip fluidity in the non-free chip area of the front cutting face of the cutter has an important effect on the machining quality. Using finite element simulation method, according to the actual machining process, the cutting model of 3D tool and workpiece is established, and the cutting process in the non-free chip area of the front cutter face of the cutter tip is simplified by using grooving mode. At the same time, combined with the indentation test results, the constitutive model of the software was selected and the parameters were set up. The effects of cutting speed, cutting speed and angle on chip fluidity, stress and strain during cutting are studied. The experiment platform was set up, and the cutting precision alignment of submicron was accomplished by using acoustic emission technology, and the cutting state of flying knife was analyzed by acoustic emission system, and the results of single factor process test were compared. The influence of various factors on machining quality is studied and verified. On the basis of this, the process parameters are optimized to obtain high quality Bragg gratings.
【學(xué)位授予單位】：哈爾濱工業(yè)大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2015
【分類號(hào)】：TN248

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本文編號(hào)：2158326