【摘要】：相比于傳統(tǒng)的氣體檢測器件,SAW器件具有精度高、體積小、功耗低、適合遠距離傳輸?shù)忍攸c。影響聲表面波器件檢測性能的主要因素有壓電材料的種類、切向及波傳播方向的選取,叉指換能器的設(shè)計,以及敏感膜材料的確定等,本文主要從以上三個方面對SAW器件展開研究。通過對壓電材料的SAW波速和機電耦合系數(shù)的分析,確定壓電材料的種類和切向。本文利用有限元仿真軟件COMSOL Multiphysics 5.0對該材料中SAW傳播的過程進行了正反模態(tài)的研究,給出最后的仿真結(jié)果。對叉指換能器的研究中,給出了影響叉指換能器性能的主要因素,討論了電極二次效應(yīng)的影響,設(shè)計了一種性能較好的叉指換能器,并給出相應(yīng)的有限元仿真模型。在鈮酸鋰壓電晶體表面設(shè)計制作了線寬為5μm和10μm的SAW器件,給出具體的工藝過程。并利用磁控濺射技術(shù)在SAW器件的敏感區(qū)形成氧化鋅氣體敏感膜,并用X射線衍射儀和掃描電鏡對所制備的敏感膜進行了測試,并建立了兩種類型的SAW氣體檢測器件的有限元仿真模型,最后成功制備了延遲線型SAW二氧化氮氣體檢測器件。
[Abstract]:Compared with conventional gas detection devices, saw devices have the advantages of high accuracy, small size, low power consumption and suitable for long-distance transmission. The main factors affecting the performance of saw devices are the types of piezoelectric materials, the selection of tangential and wave propagation directions, the design of cross finger transducers, and the determination of sensitive film materials, etc. In this paper, SAW devices are studied from the above three aspects. Through the analysis of SAW wave velocity and electromechanical coupling coefficient of piezoelectric materials, the type and tangential direction of piezoelectric materials are determined. In this paper, the forward and negative modes of SAW propagation in the material are studied by using the finite element simulation software COMSOL Multiphysics 5.0, and the final simulation results are given. In the research of interDigital transducer, the main factors affecting the performance of the interDigital transducer are given, the influence of the secondary effect of electrode is discussed, a better performance interDigital transducer is designed, and the corresponding finite element simulation model is given. SAW devices with line widths of 5 渭 m and 10 渭 m were designed and fabricated on the surface of lithium niobate piezoelectric crystal. Zinc oxide gas sensing film was formed by magnetron sputtering technique in the sensitive region of SAW device. The sensitive film was tested by X-ray diffraction and scanning electron microscope. The finite element simulation models of two types of SAW gas detection devices are established. Finally, the delay line SAW nitrogen dioxide gas detection devices are successfully fabricated.
【學(xué)位授予單位】：黑龍江大學(xué)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2015
【分類號】：TN65

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本文編號：2158214