【摘要】：隨著現(xiàn)代科學(xué)技術(shù)和生產(chǎn)生活的飛速發(fā)展,精密測量技術(shù)越來越成為各國高技術(shù)發(fā)展水平的重要標(biāo)志,發(fā)達(dá)國家都將精密測量技術(shù)作為機(jī)械行業(yè)首要發(fā)展的關(guān)鍵技術(shù)。激光干涉?zhèn)鞲衅饔捎谙到y(tǒng)固有的結(jié)構(gòu)簡單、測量精度高及非接觸等優(yōu)點,在實現(xiàn)對速度等物理量的高精度測量上,具有廣闊的應(yīng)用前景。本文通過將現(xiàn)代信號處理方法和激光傳感技術(shù)相結(jié)合,實現(xiàn)對速度和位移高精密測量理論及其關(guān)鍵技術(shù)的研究。提出了基于毫赫茲頻率檢測算法的新型測速方法,設(shè)計了結(jié)構(gòu)簡單的雙折射雙頻激光多普勒測速儀。儀器采用低頻鎖相放大技術(shù),具有結(jié)構(gòu)緊湊、成本低廉以及頻差穩(wěn)定等顯著優(yōu)點。文中給出了測速儀理論推導(dǎo)和仿真分析結(jié)果,并對測量過程中各種可能的誤差來源及其對測量精度的影響進(jìn)行了分析。實驗結(jié)果表明:相較于已報道的測速儀,所研制的測速儀結(jié)構(gòu)簡單,抗干擾能力強(qiáng),測量精度高,達(dá)到0.0281mm/s。本文還研制了一套實用性強(qiáng)的零差激光干涉儀,并將其應(yīng)用到大量程的位移測量中。文中研究了改進(jìn)型零差激光干涉儀的位移測量原理及其信號處理方法,并對測量過程中主要的誤差來源及其對測量精度的影響進(jìn)行了分析。實驗中,使用PI高分辨率的商用電動位移平移臺來標(biāo)定測量結(jié)果進(jìn)而驗證干涉儀的性能。結(jié)果表明:在百毫米級大范圍位移測量中該零差激光干涉儀可以達(dá)到小于0.7 μm的測量誤差。該零差干涉儀具有結(jié)構(gòu)簡單,成本低廉及可重復(fù)性高等特點,具有實用價值。本文還研究了一種結(jié)構(gòu)簡單實用、緊湊且成本低廉的激光鼠標(biāo)自混合干涉位移測量系統(tǒng)。系統(tǒng)基于激光自混合干涉的基本原理,并結(jié)合藍(lán)牙通信技術(shù),在Linux平臺下實現(xiàn)了目標(biāo)靶鏡位移信息的采集與分析。論文重點研究了基于Linux平臺的藍(lán)牙通信技術(shù)。從實驗測量結(jié)果可以看出:該位移測量系統(tǒng)能較好地實現(xiàn)位移波形的恢復(fù)。系統(tǒng)結(jié)構(gòu)簡單、性價比高且抗干擾能力強(qiáng)。同時,系統(tǒng)不再受到外部光反饋強(qiáng)度的限制,降低了對目標(biāo)物體表面反射率的要求,擴(kuò)展了系統(tǒng)應(yīng)用范圍。
[Abstract]:With the rapid development of modern science and technology and production and life, precision measurement technology has become an important symbol of the level of high-tech development in various countries. Developed countries regard precision measurement technology as the most important key technology in the development of mechanical industry. Because of the advantages of simple structure, high measurement precision and non-contact, laser interferometer has a broad application prospect in the realization of high precision measurement of physical quantities such as velocity. In this paper, by combining modern signal processing method with laser sensing technology, the theory of high precision measurement of velocity and displacement and its key techniques are studied. A new velocity measurement method based on millihertz frequency detection algorithm is proposed. A birefringent laser Doppler velocimeter with simple structure is designed. The instrument adopts low frequency phase locking amplification technology, which has the advantages of compact structure, low cost and stable frequency difference. In this paper, the theoretical derivation and simulation results of the velocimeter are given, and the possible error sources in the measurement process and their influence on the measurement accuracy are analyzed. The experimental results show that compared with the reported velocimeter, the developed velocimeter has the advantages of simple structure, strong anti-interference ability and high measuring accuracy, reaching 0.0281 mm / s. A practical homodyne laser interferometer is also developed and applied to the displacement measurement of a large range. In this paper, the displacement measurement principle and signal processing method of the improved homodyne laser interferometer are studied, and the main error sources in the measurement process and their influence on the measurement accuracy are analyzed. In the experiment, Pi high resolution commercial electric displacement translation platform is used to calibrate the measurement results and verify the performance of the interferometer. The results show that the error of the zero-difference laser interferometer is less than 0.7 渭 m in the large range displacement measurement of 100 mm. The homodyne interferometer has the advantages of simple structure, low cost and high repeatability. A simple, practical, compact and low cost laser mouse self-mixing interferometric displacement measurement system is also studied in this paper. Based on the principle of laser self-mixing interference and Bluetooth communication technology, the system realizes the acquisition and analysis of target mirror displacement information under Linux platform. This paper focuses on Bluetooth communication technology based on Linux platform. It can be seen from the experimental results that the displacement measurement system can achieve the recovery of displacement waveform. The structure of the system is simple, the cost-performance ratio is high and the anti-interference ability is strong. At the same time, the system is no longer restricted by the external optical feedback intensity, which reduces the requirement of the surface reflectivity of the target object and expands the application scope of the system.
【學(xué)位授予單位】：南京師范大學(xué)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2017
【分類號】：TN249

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