【摘要】：聲表面波(SAW,Surface Acoustic Waves)器件由于具有無源、體積小、易集成等優(yōu)勢,已廣泛應用于移動通信、廣播、電視等眾多領域。但是,目前針對聲表面波器件設計,尚未有成熟的軟件出現(xiàn),使得器件設計存在周期長、強度大、易出錯等問題。另外,聲表面波器件在測試中很容易受外界溫度、濕度等環(huán)境參量的影響,因此設計一個環(huán)境參量相對穩(wěn)定且可控的獨立環(huán)境,對于實現(xiàn)聲表面波器件參數(shù)的準確測量和獲取具有十分重要的意義。本文針對這兩個問題,對聲表面波器件設計軟件和器件測試裝置進行設計、研究。在聲表面波器件設計研究中,利用MATLAB的數(shù)值計算功能和GUI數(shù)據(jù)可視化技術,開發(fā)設計了聲表面波器件設計軟件。軟件由聲表面波器件的版圖輸出和數(shù)據(jù)提取兩個部分組成。用戶在GUI設計界面輸入襯底材料、中心頻率等參數(shù),即可得到器件相應的版圖圖形。而數(shù)據(jù)提取設計是將MATLAB運算得出的器件坐標數(shù)據(jù)進行提取,并在GUI界面顯示。通過對一個中心頻率為101.079MHz,32對叉指換能器典型聲表面波器件的版圖設計及版圖數(shù)據(jù)的輸出,說明了該軟件的可行性。在聲表面波器件的測試裝置研究中,為滿足器件測試環(huán)境的要求,搭建了一個獨立的測試裝置。該測試裝置包括獨立測試空間以及置于其中的溫度控制模塊,加速混氣模塊和擴展的液汽轉(zhuǎn)換模塊。其中,溫度控制模塊是利用PID算法,控制PWM脈沖輸出,進而實現(xiàn)溫控模塊工作方式的控制。該測試裝置實現(xiàn)了環(huán)境溫度實時可控,加速均勻氣體,無輔助裝置下液體轉(zhuǎn)換成氣體等功能,提供一個溫度穩(wěn)定的實驗環(huán)境。
[Abstract]:Surface acoustic wave (saw) devices have been widely used in many fields, such as mobile communication, radio, television and so on, due to their advantages of passive, small size and easy integration. However, at present, there is no mature software for surface acoustic wave device design, which makes the device design has many problems, such as long period, high strength, easy to make mistakes and so on. In addition, surface acoustic wave devices are easily affected by environmental parameters such as temperature and humidity, so an independent environment with relatively stable and controllable environmental parameters is designed. It is very important for the accurate measurement and acquisition of saw device parameters. Aiming at these two problems, the design software and the device testing device of saw device are designed and studied in this paper. In the research of saw device design, the software of saw device design is developed by using the numerical calculation function of MATLAB and GUI data visualization technology. The software consists of layout output and data extraction of saw device. Users input substrate material, center frequency and other parameters in the GUI design interface to obtain the corresponding layout of the device. The design of data extraction is to extract the coordinate data from MATLAB and display it in GUI interface. The feasibility of this software is illustrated by the layout design and layout data output of a typical saw device with a center frequency of 101.079MHz / 32. In order to meet the requirements of testing environment, an independent testing device is built in the research of saw device testing device. The test device includes an independent test space and a temperature control module placed therein, an accelerated gas mixing module and an extended liquid steam conversion module. The temperature control module uses pid algorithm to control the PWM pulse output, and then realizes the control of the working mode of the temperature control module. The testing device realizes the functions of real-time control of ambient temperature, acceleration of uniform gas, conversion of liquid to gas without auxiliary device, and provides a stable experimental environment.
【學位授予單位】：長安大學
【學位級別】：碩士
【學位授予年份】：2015
【分類號】：TN65

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本文編號：2125909