本文選題：超純水制備 + 數(shù)據(jù)管理系統(tǒng)��； 參考：《浙江大學(xué)》2016年碩士論文

【摘要】：浸沒式光刻是新一代集成電路制造中的關(guān)鍵技術(shù),它在傳統(tǒng)光刻工藝的基礎(chǔ)上,通過在物鏡和硅片之間填充入一層高折射率的浸沒液體,來提升光刻的分辨率。超純水是浸沒式光刻中所使用的浸沒液體,超純水的水質(zhì)極大地影響了光刻的質(zhì)量。因此,在我國(guó)提出的極大規(guī)模集成電路制造項(xiàng)目中,將超純水制備作為一個(gè)非常重要的子課題來進(jìn)行開展。本文研制了一套以半導(dǎo)體廠務(wù)水為原料,制備用于浸沒式光刻浸沒液體的超純水制備系統(tǒng)。該系統(tǒng)實(shí)現(xiàn)對(duì)廠務(wù)水中TOC、離子、溶解氧、顆粒等污染物進(jìn)行深度去除,并將超純水以相對(duì)穩(wěn)定的壓力提供給下一級(jí)浸沒液體傳輸設(shè)備。本文的內(nèi)容涵蓋超純水制備系統(tǒng)工藝選型、流程設(shè)計(jì)、設(shè)備選型、結(jié)構(gòu)設(shè)計(jì)、控制系統(tǒng)選型、系統(tǒng)加工集成以及調(diào)試。此外,本文還設(shè)計(jì)了一套對(duì)超純水系統(tǒng)運(yùn)行數(shù)據(jù)進(jìn)行遠(yuǎn)程采集和發(fā)布的解決方案,大大提升了超純水系統(tǒng)的數(shù)據(jù)管理能力。本文共分為四章：第一章介紹了浸沒式光刻對(duì)超純水的要求以及超純水的發(fā)展現(xiàn)狀。同時(shí)指出了開發(fā)超純水信息管理系統(tǒng)的重要意義和目前的發(fā)展現(xiàn)狀。最后,本章提出了課題主要的研究?jī)?nèi)容,規(guī)定了系統(tǒng)設(shè)計(jì)的規(guī)格和要求。第二章介紹了超純水系統(tǒng)的設(shè)計(jì)、加工和調(diào)試。本章首先介紹了超純水系統(tǒng)的工藝技術(shù)選型、關(guān)鍵部件選用和工藝流程的設(shè)計(jì),然后詳細(xì)地介紹了系統(tǒng)的結(jié)構(gòu)設(shè)計(jì)過程,對(duì)其中的難點(diǎn)展開了討論,隨后分析了超純水系統(tǒng)可選用的控制方式并做了技術(shù)選型,最后,介紹了超純水系統(tǒng)加工和安裝調(diào)試的過程和結(jié)果。第三章介紹的是超純水系統(tǒng)信息管理系統(tǒng)的開發(fā)。本章從超純水系統(tǒng)數(shù)據(jù)管理系統(tǒng)的數(shù)據(jù)傳輸、數(shù)據(jù)儲(chǔ)存、數(shù)據(jù)分析發(fā)布三個(gè)方面開展了介紹。首先描述了需要傳輸?shù)臄?shù)據(jù)、并對(duì)其進(jìn)行技術(shù)選型和方案討論,提出了發(fā)送的格式和保障方式,隨后,介紹了數(shù)據(jù)儲(chǔ)存的數(shù)據(jù)庫選型和數(shù)據(jù)庫設(shè)計(jì),最后,介紹了數(shù)據(jù)發(fā)布方案的技術(shù)選型和頁面設(shè)計(jì)。第四章對(duì)本文的工作進(jìn)行了總結(jié),并對(duì)超純水系統(tǒng)的未來工作進(jìn)行了展望。
[Abstract]:Immersion lithography is a key technology in the manufacture of new generation integrated circuit. Based on the traditional lithography technology, the resolution of lithography is improved by filling a layer of immersion liquid with high refractive index between objective lens and silicon wafer. Ultrapure water is a submerged liquid used in immersion lithography. The quality of ultrapure water greatly affects the quality of lithography. Therefore, the preparation of ultra-pure water is regarded as a very important sub-topic in the project of maximum scale integrated circuit manufacturing proposed in our country. In this paper, a ultrapure water preparation system using semiconductor factory water as raw material for submerged lithographic immersion liquid has been developed. The system realizes the deep removal of TOC, ion, dissolved oxygen, particles and other pollutants in plant water, and provides ultra-pure water with relatively stable pressure to the next stage of submerged liquid transport equipment. The contents of this paper include process selection, process design, equipment selection, structure design, control system selection, system processing integration and debugging. In addition, this paper also designs a solution for remote data acquisition and distribution of ultra-pure water system, which greatly improves the data management ability of ultra-pure water system. This paper is divided into four chapters: the first chapter introduces the requirements of immersion lithography for ultra-pure water and the development of ultra-pure water. At the same time, it points out the importance of developing super-pure water information management system and the present development situation. Finally, this chapter puts forward the main research contents of the subject, and specifies the specifications and requirements of the system design. The second chapter introduces the design, processing and debugging of ultra-pure water system. In this chapter, the selection of process technology, the selection of key components and the design of process flow are introduced, then the structural design process of the system is introduced in detail, and the difficulties are discussed. Then it analyzes the control mode of ultra-pure water system and makes the selection of technology. Finally, the process and result of processing, installation and debugging of ultra-pure water system are introduced. The third chapter introduces the development of super-pure water system information management system. This chapter introduces the data transmission, data storage, data analysis and release of the data management system of the ultra-pure water system. This paper first describes the data that needs to be transmitted, and discusses its technical selection and scheme, and puts forward the format and guarantee mode of transmission. Then, it introduces the database selection and database design of data storage. The technology selection and page design of data release scheme are introduced. In chapter 4, the work of this paper is summarized, and the future work of ultra-pure water system is prospected.
【學(xué)位授予單位】：浙江大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2016
【分類號(hào)】：TN305.7

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本文編號(hào)：2099597