本文選題：硅基光電子 + 光柵耦合器��； 參考：《國(guó)防科學(xué)技術(shù)大學(xué)》2015年碩士論文

【摘要】：光柵作為一種重要的光學(xué)元件,在漫長(zhǎng)的歷史長(zhǎng)河中被不斷的探索。二十世紀(jì)五十年光柵技術(shù)開(kāi)始蓬勃發(fā)展,至今工藝已經(jīng)十分成熟。隨著信息技術(shù)的不斷發(fā)展,硅基光子學(xué)研究的不斷深入,硅基光柵耦合器以其工藝簡(jiǎn)單,易對(duì)準(zhǔn),對(duì)準(zhǔn)容差大,無(wú)需劃片,便于集成的優(yōu)勢(shì)得到了廣泛的關(guān)注。本文根據(jù)平面波導(dǎo)的導(dǎo)模原理,在分析光柵耦合的位矢條件和光在波導(dǎo)中的偏振特性的基礎(chǔ)上,利用等效介質(zhì)模法和有限時(shí)域差(FDTD)分計(jì)算方法,對(duì)偏振無(wú)關(guān)光柵耦合器,紫外光柵耦合器,以及基于silicon-on-sapphire材料的波長(zhǎng)為2.78)的光柵耦合器進(jìn)行了研究。本文的理論工作如下:(1)設(shè)計(jì)了一種偏振無(wú)關(guān)光柵耦合器。傳統(tǒng)偏振無(wú)關(guān)光柵耦合器討論的都是TE波和TM波的基模,通過(guò)設(shè)計(jì)復(fù)雜的結(jié)構(gòu)來(lái)實(shí)現(xiàn)偏振無(wú)關(guān)的設(shè)計(jì)。本文中,則討論TE波的基模TE0和TM波的一階模TM1,設(shè)計(jì)出了結(jié)構(gòu)更簡(jiǎn)單的偏振無(wú)關(guān)光柵耦合器,并且取得的效果更好。這種偏振無(wú)關(guān)耦合器可以實(shí)現(xiàn)TE波和TM波的同時(shí)耦合。當(dāng)為1.56μm時(shí),TE波和TM波的耦合效率相等,并且超過(guò)60%。TE波和TM的耦合能量最高分別是72%和75.15%,1dB帶寬分別為30nm和40nm,耦合能量峰值所對(duì)應(yīng)的波長(zhǎng)之間的差異大約有35nm。(2)設(shè)計(jì)了一種偏振無(wú)關(guān)的光柵分束器。這種光柵分束器是基于布拉格衍射條件和位相匹配方程設(shè)計(jì)的。有限時(shí)域差分法(FDTD)方法模擬結(jié)果顯示,當(dāng)光通過(guò)光柵分束器后,向兩不同方向的波導(dǎo)中分束,兩方向所分的能量幾乎相等。TE波耦合進(jìn)右邊波導(dǎo)和左邊波導(dǎo)中的耦合效率分別是42.54%和43.68%。TM波為46.03%和44.07%。該光柵分束器采用周期性結(jié)構(gòu)設(shè)計(jì),最小線(xiàn)寬為360nm,工藝上可以實(shí)現(xiàn),也是現(xiàn)在所有同類(lèi)型設(shè)計(jì)中最簡(jiǎn)單的結(jié)構(gòu)。(3)設(shè)計(jì)了一種紫外波段的光柵耦合器,可以使波長(zhǎng)為300nm的紫外光,通過(guò)光柵耦合進(jìn)SiO2波導(dǎo)中,耦合效率超過(guò)60%;在波長(zhǎng)為296nm時(shí),耦合效率可達(dá)88.5%。經(jīng)理論分析和數(shù)值模擬,最終得到光柵周期為0.28μm,光柵脊寬154nm,1dB帶寬為5nm,這種設(shè)計(jì)可以很好的應(yīng)用于片上光譜儀的研究。(4)在硅基藍(lán)寶石上設(shè)計(jì)一種光柵適用于2.7μm波長(zhǎng)的光耦合進(jìn)波導(dǎo),耦合效率可達(dá)75%,通過(guò)引入反射光柵布拉格反射層使耦合效率提高到80%以上。主要可用于片上光譜儀的研究
[Abstract]:As an important optical element, grating has been continuously explored in the long history. Grating technology began to flourish in 50 years of the twentieth century, and the technology has been very mature. With the development of information technology and the development of silicon-based photonics, the advantages of silicon based grating couplers, such as simple process, easy alignment, large alignment tolerance, no need for slicing and easy integration, have been paid more and more attention. According to the guiding mode principle of planar waveguide, on the basis of analyzing the position vector condition of grating coupling and the polarization characteristic of the light in the waveguide, the polarization independent grating coupler is calculated by using the equivalent dielectric mode method and the finite time domain difference (FDTD) method. The UV grating coupler and the grating coupler with wavelength of 2.78 based on silicon-on-sapphire are studied. The theoretical work of this paper is as follows: (1) A polarization-independent grating coupler is designed. The traditional polarization-independent grating couplers all discuss the fundamental modes of te and TM waves. The polarization-independent design is realized by designing complex structures. In this paper, the fundamental mode TE0 of te wave and the first order mode TM1 of TM wave are discussed, and the polarization independent grating coupler with simpler structure is designed, and the effect is better. The polarization independent coupler can realize simultaneous coupling of te wave and TM wave. At 1.56 渭 m, the coupling efficiency of te wave and TM wave is equal. And the coupling energy of above 60.te wave and TM is 72% and 75.15dB bandwidth is 30nm and 40nm, respectively. The difference between the wavelength corresponding to the coupling energy peak is about 35nm. (2) A polarization-independent grating beam splitter is designed. The grating beam splitter is designed based on Bragg diffraction condition and phase matching equation. The simulation results of the finite-time-domain difference method (FDTD) show that when the light passes through the grating splitter, it splits the beam into two waveguides in different directions. The coupling efficiency of te wave coupled to the right waveguide and the left waveguide is 42.54% and 43.68% respectively, and the coupling efficiency of TM wave is 46.03% and 44.07% respectively. The grating splitter is designed with periodic structure, the minimum linewidth is 360 nm, which can be realized in technology and is the simplest structure of all the same type designs. (3) A grating coupler in ultraviolet band is designed, which can make the wavelength of 300nm ultraviolet light. When the grating is coupled into the Sio _ 2 waveguide, the coupling efficiency is over 60 and the coupling efficiency can reach 88.5when the wavelength is 296nm. Through theoretical analysis and numerical simulation, Finally, the grating period is 0.28 渭 m, and the grating ridge width is 154nm-1 dB bandwidth is 5 nm. This design can be applied to the study of on-chip spectrometer. (4) A grating coupled waveguide with 2.7 渭 m wavelength is designed on Si-based sapphire. The coupling efficiency can reach 75%, and the coupling efficiency can be increased to more than 80% by introducing reflection grating Bragg reflectance layer. It can be used in the study of on-chip spectrometer.
【學(xué)位授予單位】：國(guó)防科學(xué)技術(shù)大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2015
【分類(lèi)號(hào)】：TN256;TN622

【參考文獻(xiàn)】

相關(guān)碩士學(xué)位論文 前1條

1 周闊;硅基光柵耦合器和波導(dǎo)分束器的研究[D];國(guó)防科學(xué)技術(shù)大學(xué);2013年

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本文編號(hào)：2060800