本文選題：運(yùn)動(dòng)學(xué) + 機(jī)構(gòu)特性�。� 參考：《哈爾濱工業(yè)大學(xué)》2015年碩士論文

【摘要】：隨著移動(dòng)互聯(lián)網(wǎng)的快速發(fā)展,IC產(chǎn)業(yè)在國(guó)內(nèi)也得到了迅速發(fā)展,從而對(duì)于IC設(shè)備的需求也日益增加。但是國(guó)內(nèi)的設(shè)備主要依靠進(jìn)口,同時(shí),高端設(shè)備對(duì)我國(guó)禁運(yùn),從而導(dǎo)致成本增加。因此,展開對(duì)高速高精度平面定位平臺(tái)的研究具有深遠(yuǎn)的戰(zhàn)略意義。本文首先通過對(duì)現(xiàn)有的高速高精度機(jī)構(gòu)進(jìn)行分析研究,依據(jù)半導(dǎo)體封裝設(shè)備的任務(wù)要求及技術(shù)指標(biāo),采用一種適應(yīng)于高速高精場(chǎng)合的平面2自由度并聯(lián)機(jī)器人。采用閉環(huán)矢量法對(duì)機(jī)構(gòu)的運(yùn)動(dòng)學(xué)進(jìn)行詳細(xì)地分析推導(dǎo),得到其正解及逆解,在此基礎(chǔ)之上,對(duì)機(jī)構(gòu)的速度及加速度特性進(jìn)行研究,根據(jù)其任務(wù)要求規(guī)劃定位平臺(tái)的速度加速度,并分析定位平臺(tái)的工作空間�；谘趴吮染仃噷�(duì)高速高精度平面定位平臺(tái)的靈巧度和奇異性等運(yùn)動(dòng)學(xué)特性進(jìn)行研究,分析機(jī)構(gòu)的奇異特性,為后期規(guī)避奇異位型做理論基礎(chǔ)�；谘趴吮染仃嚱㈧`巧度的性能指標(biāo),研究不同構(gòu)型下定位平臺(tái)的靈巧度分布特性,從而選擇合適的機(jī)構(gòu)構(gòu)型�；诶窭嗜辗椒ń⒏咚俑呔绕矫娑ㄎ黄脚_(tái)的剛體動(dòng)力學(xué)模型,并利用MATLAB進(jìn)行數(shù)值仿真分析其動(dòng)力學(xué)特性。在剛體動(dòng)力學(xué)的基礎(chǔ)上建立機(jī)器人的彈性動(dòng)力學(xué),并應(yīng)用精細(xì)積分法求取末端定位平臺(tái)的動(dòng)態(tài)響應(yīng)的數(shù)值解,研究定位平臺(tái)的彈性變形對(duì)于定位精度的影響,并研究其固有頻率特性,達(dá)到避開激振頻率的目的。深入研究了混沌理論,并將其應(yīng)用于機(jī)器人的參數(shù)優(yōu)化。通過對(duì)現(xiàn)有的幾種典型的混沌序列的遍歷性進(jìn)行比較研究,提出遍歷性的指標(biāo),比較各個(gè)混沌序列的優(yōu)劣性,選擇適用于混沌優(yōu)化的序列,對(duì)現(xiàn)有的混沌優(yōu)化算法進(jìn)行分析研究,分析其存在的缺陷,針對(duì)易陷入局部最優(yōu)解及搜索空間不變等缺陷提出對(duì)應(yīng)的改進(jìn)措施,從而提高算法的準(zhǔn)確性和效率,利用改進(jìn)的混沌算法對(duì)機(jī)構(gòu)的尺寸參數(shù)進(jìn)行優(yōu)化。
[Abstract]:With the rapid development of mobile Internet, the IC industry has also been developed rapidly in China, so the demand for IC equipment is increasing day by day. But the domestic equipment mainly depends on the import, at the same time, the high-end equipment to our country embargo, thus causes the cost to increase. Therefore, the research on high-speed and high-precision plane positioning platform has profound strategic significance. Based on the analysis and research of the existing high speed and high precision mechanism, according to the task requirements and technical specifications of semiconductor packaging equipment, a planar 2 DOF parallel robot suitable for high speed and high precision situations is adopted in this paper. The kinematics of the mechanism is analyzed and deduced in detail by using the closed-loop vector method, and the forward and inverse solutions are obtained. On the basis of this, the velocity and acceleration characteristics of the mechanism are studied, and the acceleration of the positioning platform is planned according to the requirements of the task. The workspace of the positioning platform is analyzed. Based on the Jacobian matrix, the kinematics characteristics of high-speed and high-precision planar positioning platform such as dexterity and singularity are studied, and the singularity characteristics of the mechanism are analyzed, which is the theoretical basis for avoiding the singular bit type in the later stage. Based on the Jacobian matrix, the performance index of dexterity is established, and the distribution characteristics of dexterity of positioning platform under different configurations are studied, and the appropriate mechanism configuration is selected. Based on Lagrange method, the rigid body dynamics model of high speed and high precision plane positioning platform is established, and its dynamic characteristics are analyzed numerically by MATLAB. On the basis of rigid body dynamics, the elastic dynamics of the robot is established, and the numerical solution of dynamic response of the terminal positioning platform is obtained by using the precise integration method, and the influence of the elastic deformation of the positioning platform on the positioning accuracy is studied. The characteristic of its natural frequency is studied to avoid the exciting frequency. The chaos theory is studied and applied to the optimization of robot parameters. By comparing and studying the ergodicity of several typical chaotic sequences, the index of ergodicity is put forward, the advantages and disadvantages of each chaotic sequence are compared, and the sequences suitable for chaos optimization are selected. This paper analyzes and studies the existing chaos optimization algorithm, analyzes its defects, and puts forward corresponding improvement measures for the defects such as easy to fall into the local optimal solution and invariant search space, so as to improve the accuracy and efficiency of the algorithm. The improved chaotic algorithm is used to optimize the dimension parameters of the mechanism.
【學(xué)位授予單位】：哈爾濱工業(yè)大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2015
【分類號(hào)】：TN405

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本文編號(hào)：2039889