本文選題：運動學 + 機構特性�。� 參考：《哈爾濱工業(yè)大學》2015年碩士論文

【摘要】：隨著移動互聯(lián)網(wǎng)的快速發(fā)展,IC產業(yè)在國內也得到了迅速發(fā)展,從而對于IC設備的需求也日益增加。但是國內的設備主要依靠進口,同時,高端設備對我國禁運,從而導致成本增加。因此,展開對高速高精度平面定位平臺的研究具有深遠的戰(zhàn)略意義。本文首先通過對現(xiàn)有的高速高精度機構進行分析研究,依據(jù)半導體封裝設備的任務要求及技術指標,采用一種適應于高速高精場合的平面2自由度并聯(lián)機器人。采用閉環(huán)矢量法對機構的運動學進行詳細地分析推導,得到其正解及逆解,在此基礎之上,對機構的速度及加速度特性進行研究,根據(jù)其任務要求規(guī)劃定位平臺的速度加速度,并分析定位平臺的工作空間。基于雅克比矩陣對高速高精度平面定位平臺的靈巧度和奇異性等運動學特性進行研究,分析機構的奇異特性,為后期規(guī)避奇異位型做理論基礎。基于雅克比矩陣建立靈巧度的性能指標,研究不同構型下定位平臺的靈巧度分布特性,從而選擇合適的機構構型�；诶窭嗜辗椒ń⒏咚俑呔绕矫娑ㄎ黄脚_的剛體動力學模型,并利用MATLAB進行數(shù)值仿真分析其動力學特性。在剛體動力學的基礎上建立機器人的彈性動力學,并應用精細積分法求取末端定位平臺的動態(tài)響應的數(shù)值解,研究定位平臺的彈性變形對于定位精度的影響,并研究其固有頻率特性,達到避開激振頻率的目的。深入研究了混沌理論,并將其應用于機器人的參數(shù)優(yōu)化。通過對現(xiàn)有的幾種典型的混沌序列的遍歷性進行比較研究,提出遍歷性的指標,比較各個混沌序列的優(yōu)劣性,選擇適用于混沌優(yōu)化的序列,對現(xiàn)有的混沌優(yōu)化算法進行分析研究,分析其存在的缺陷,針對易陷入局部最優(yōu)解及搜索空間不變等缺陷提出對應的改進措施,從而提高算法的準確性和效率,利用改進的混沌算法對機構的尺寸參數(shù)進行優(yōu)化。
[Abstract]:With the rapid development of mobile Internet, the IC industry has also been developed rapidly in China, so the demand for IC equipment is increasing day by day. But the domestic equipment mainly depends on the import, at the same time, the high-end equipment to our country embargo, thus causes the cost to increase. Therefore, the research on high-speed and high-precision plane positioning platform has profound strategic significance. Based on the analysis and research of the existing high speed and high precision mechanism, according to the task requirements and technical specifications of semiconductor packaging equipment, a planar 2 DOF parallel robot suitable for high speed and high precision situations is adopted in this paper. The kinematics of the mechanism is analyzed and deduced in detail by using the closed-loop vector method, and the forward and inverse solutions are obtained. On the basis of this, the velocity and acceleration characteristics of the mechanism are studied, and the acceleration of the positioning platform is planned according to the requirements of the task. The workspace of the positioning platform is analyzed. Based on the Jacobian matrix, the kinematics characteristics of high-speed and high-precision planar positioning platform such as dexterity and singularity are studied, and the singularity characteristics of the mechanism are analyzed, which is the theoretical basis for avoiding the singular bit type in the later stage. Based on the Jacobian matrix, the performance index of dexterity is established, and the distribution characteristics of dexterity of positioning platform under different configurations are studied, and the appropriate mechanism configuration is selected. Based on Lagrange method, the rigid body dynamics model of high speed and high precision plane positioning platform is established, and its dynamic characteristics are analyzed numerically by MATLAB. On the basis of rigid body dynamics, the elastic dynamics of the robot is established, and the numerical solution of dynamic response of the terminal positioning platform is obtained by using the precise integration method, and the influence of the elastic deformation of the positioning platform on the positioning accuracy is studied. The characteristic of its natural frequency is studied to avoid the exciting frequency. The chaos theory is studied and applied to the optimization of robot parameters. By comparing and studying the ergodicity of several typical chaotic sequences, the index of ergodicity is put forward, the advantages and disadvantages of each chaotic sequence are compared, and the sequences suitable for chaos optimization are selected. This paper analyzes and studies the existing chaos optimization algorithm, analyzes its defects, and puts forward corresponding improvement measures for the defects such as easy to fall into the local optimal solution and invariant search space, so as to improve the accuracy and efficiency of the algorithm. The improved chaotic algorithm is used to optimize the dimension parameters of the mechanism.
【學位授予單位】：哈爾濱工業(yè)大學
【學位級別】：碩士
【學位授予年份】：2015
【分類號】：TN405

【參考文獻】

相關期刊論文 前2條

1 陳興俊,胡松,姚漢民,劉業(yè)異;生物芯片掃描儀高速掃描臺研究[J];微納電子技術;2002年09期

2 謝暉,孫立寧,榮偉彬,陳立國;MEMS微裝配機器人系統(tǒng)的研究[J];機械與電子;2005年03期

相關博士學位論文 前1條

1 節(jié)德剛;宏/微驅動高速高精度定位系統(tǒng)的研究[D];哈爾濱工業(yè)大學;2006年

相關碩士學位論文 前1條

1 李嵩;少自由度并聯(lián)機構基本型的分析與綜合[D];重慶大學;2007年

，

本文編號：2039889