本文選題：光柵尺 + 激光干涉比長(zhǎng)儀��； 參考：《中國(guó)計(jì)量學(xué)院》2015年碩士論文

【摘要】：光柵尺作為位移傳感器,已廣泛應(yīng)用于精密測(cè)量?jī)x器中,隨著對(duì)測(cè)量精度要求的不斷提高,對(duì)光柵尺的質(zhì)量也提出了更高的要求。光柵的刻劃質(zhì)量直接影響其產(chǎn)生的莫爾條紋信號(hào)質(zhì)量,而柵距誤差是評(píng)價(jià)光柵刻劃質(zhì)量的重要指標(biāo),因此精確測(cè)量光柵的柵距,對(duì)于提高光柵產(chǎn)品的質(zhì)量具有重要意義。激光干涉比長(zhǎng)儀是檢定線紋尺的最高等別裝置,主要針對(duì)刻線間距為0.1mm和1mm的標(biāo)準(zhǔn)線紋尺進(jìn)行測(cè)量,而對(duì)于間距小于0.02mm的光柵類特殊線紋尺,難以實(shí)現(xiàn)直接測(cè)量。為了滿足工業(yè)上對(duì)于光柵檢測(cè)的需求,本文設(shè)計(jì)了基于高倍率雙狹縫光電顯微鏡的測(cè)量系統(tǒng),可直接應(yīng)用在激光干涉比長(zhǎng)儀上對(duì)微密刻線間距進(jìn)行動(dòng)態(tài)測(cè)量,從而實(shí)現(xiàn)了對(duì)光柵類特殊線紋尺線間距的檢定。本文的主要研究?jī)?nèi)容有:(1)設(shè)計(jì)雙光路刻線信號(hào)采集系統(tǒng)對(duì)光柵的刻線進(jìn)行動(dòng)態(tài)瞄準(zhǔn),應(yīng)用光電倍增管實(shí)現(xiàn)對(duì)光柵微密刻線像的光電轉(zhuǎn)換;(2)設(shè)計(jì)信號(hào)處理電路,對(duì)兩路光電信號(hào)進(jìn)行處理,提取刻線瞄準(zhǔn)位置并輸出脈沖信號(hào)進(jìn)行指示;(3)搭建雙頻激光干涉測(cè)量系統(tǒng)對(duì)刻線間距進(jìn)行測(cè)量;采用熱電偶等傳感器構(gòu)建一套高精度溫度、濕度、壓力補(bǔ)償系統(tǒng),對(duì)空氣折射率進(jìn)行實(shí)時(shí)補(bǔ)償,提高激光干涉儀測(cè)量精度;(4)搭建實(shí)驗(yàn)平臺(tái),對(duì)多種規(guī)格的光柵樣板進(jìn)行測(cè)量,驗(yàn)證瞄準(zhǔn)讀數(shù)系統(tǒng)的測(cè)量能力。
[Abstract]:As a displacement sensor, grating ruler has been widely used in precision measuring instruments. With the continuous improvement of measurement accuracy, the quality of grating ruler is also required to be higher. The marking quality of grating directly affects the quality of moire fringe signal produced by grating, and the raster distance error is an important index to evaluate the quality of grating marking. Therefore, it is important to accurately measure the grating spacing to improve the quality of grating products. The laser interferometer is the most advanced device for calibrating the linear ruler. It is mainly aimed at measuring the standard stripe ruler with 0.1mm and 1mm spacing, but it is difficult to realize the direct measurement for the special linear ruler of grating whose spacing is less than that of 0.02mm. In order to meet the demand of grating detection in industry, a measuring system based on high rate double slit photoelectric microscope is designed in this paper, which can be directly used in the dynamic measurement of the distance between micro-dense lines on the laser interferometer. Thus, the calibration of the special linear stripe distance between gratings is realized. The main research contents of this paper are as follows: (1) designing a double optical circuit signal acquisition system to dynamically aim the grating line, and using a photomultiplier tube to realize the photoelectric conversion of the grating microdense line image. (2) designing the signal processing circuit. Two optoelectronic signals are processed, the aiming position of the cutting line is extracted and the pulse signal is outputted to indicate the laser interference. A double frequency laser interferometry system is built to measure the distance between the lines, and a set of high precision temperature, humidity and humidity are constructed by using thermocouple and other sensors. The pressure compensation system, which compensates the refractive index of air in real time, improves the measuring precision of laser interferometer, sets up the experimental platform, measures the grating template of various specifications, and verifies the measuring ability of the aiming reading system.
【學(xué)位授予單位】：中國(guó)計(jì)量學(xué)院
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2015
【分類號(hào)】：TH744.5

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