本文選題：二氧化錫薄膜 + 摻雜��； 參考：《燕山大學學報》2017年04期

【摘要】：采用噴霧熱解法制備了氟摻雜的二氧化錫(fluorine-doped tin oxide,FTO)薄膜,氟源分別為NH_4F、SnF_2、CF_3COOH和HF。采用X射線衍射儀、掃描電子顯微鏡對薄膜微觀結(jié)構(gòu)和表面形貌進行了表征;用四探針電阻儀、霍爾效應儀和紫外分光光度計對薄膜的光電性能進行了分析。結(jié)果表明,不同氟源制備的FTO薄膜均為沿(200)方向擇優(yōu)生長的四方金紅石結(jié)構(gòu),摻雜后薄膜的表面形貌較未摻雜時變化較大,由多角狀和棱柱狀顆粒相間分布變?yōu)橥耆深惤鹱炙铑w粒堆積而成。四種氟源中,以SnF_2為氟源制備的FTO薄膜的光電性能優(yōu)于其它氟源,薄膜的最佳電阻率達5.06×10~(-4)Ωcm,載流子濃度為4.850×10~(20)cm~(-3),光學帶隙為4.03 eV。不同氟源對FTO薄膜可見光區(qū)透過率影響不大,薄膜的平均透過率均大于83%。不同氟源FTO薄膜的性能差異主要由氟的摻雜量決定的。
[Abstract]:The fluorine doped tin oxide (fluorine-doped tin oxide, FTO) film was prepared by spray pyrolysis. The fluorine source was NH_4F, SnF_2, CF_3COOH and HF. using X ray diffractometer. The microstructure and surface morphology of the film were characterized by scanning electron microscope. The film was made by four probe resistance apparatus, Holzer effect instrument and ultraviolet spectrophotometer. The results show that the FTO films prepared by different fluorine sources are tetragonal rutile structures with preferred growth in the direction of (200). After doping, the surface morphology of the films varies greatly, and the interphase distribution of polyangular and prism particles becomes completely from the Pyramid like particles. In four kinds of fluorine sources, The photoelectric properties of FTO films prepared by SnF_2 for fluorine source are superior to other fluorine sources. The optimum resistivity of the films is 5.06 x 10~ (-4) Omega cm, the carrier concentration is 4.850 x 10~ (20) cm~ (-3), and the optical band gap is 4.03 eV. different fluorine sources have little influence on the transmittance of the visible region of FTO thin film, and the average transmittance of thin film is greater than that of 83%. fluorine source FTO thin film. The difference is mainly determined by the amount of fluorine doping.
【作者單位】： 燕山大學材料科學與工程學院;唐山學院環(huán)境與化學工程系;燕山大學國防科學技術(shù)學院;
【基金】：國家重點研發(fā)計劃資助項目(2016YFB0303902) 河北省應用基礎研究計劃重點基礎研究資助項目(17961109D) 國家自然科學基金資助項目(51602278) 河北省自然科學基金資助項目(E2016203149)
【分類號】：TN304
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本文編號：1934599