本文選題：激光波前 + 二維光柵��； 參考：《西安工業(yè)大學(xué)》2015年碩士論文

【摘要】：作為高精度測(cè)試裝置的激光器,其設(shè)計(jì)和加工精度、輸出參數(shù)的準(zhǔn)確度、與設(shè)計(jì)值的偏差程度、工作期間的穩(wěn)定性將直接傳遞到被測(cè)件的測(cè)量中,因此激光器自身輸出參數(shù)的測(cè)試顯得尤為重要。本文采用四波橫向剪切干涉法對(duì)激光束參數(shù)進(jìn)行檢測(cè)研究,其具有分辨率高、操作性強(qiáng)、穩(wěn)定性好、對(duì)振動(dòng)不敏感以及結(jié)構(gòu)緊湊等優(yōu)點(diǎn)。在對(duì)目前常用的波前檢測(cè)方法進(jìn)行深入研究及討論的基礎(chǔ)上,本文詳細(xì)論述了四波橫向剪切干涉的基本工作原理。實(shí)現(xiàn)該原理的二維衍射光柵作為其關(guān)鍵器件,它是在傳統(tǒng)的哈特曼波前傳感器掩膜板的基礎(chǔ)上加工了具有一定相位差值的相位光柵。四波橫向剪切干涉系統(tǒng)由一個(gè)二維衍射光柵和一個(gè)CCD相機(jī)組成。當(dāng)光束通過二維衍射光柵后,在CCD相機(jī)的接收屏就會(huì)產(chǎn)生剪切光斑,從而形成干涉圖�？臻g載頻法對(duì)實(shí)驗(yàn)裝置沒有特殊要求,可在動(dòng)態(tài)測(cè)量中進(jìn)行相位與光強(qiáng)的提取。借助于干涉圖的處理技術(shù),對(duì)其進(jìn)行相位提取,相位解包,可得到兩個(gè)正交方向的差分信息,采用Zernike多項(xiàng)式最小二乘法擬合波面,可獲得原始波前。為了驗(yàn)證本課題中方案的可行性,本文采用了四波橫向剪切干涉測(cè)波前,實(shí)驗(yàn)中對(duì)532nm半導(dǎo)體激光器進(jìn)行測(cè)試,并對(duì)測(cè)量數(shù)據(jù)與激光器標(biāo)稱參數(shù)對(duì)比；并且分別利用四波橫向剪切干涉法與ZYGO-GPI干涉儀對(duì)被測(cè)件進(jìn)行比對(duì)測(cè)試,可以得到四波橫向剪切干涉法的測(cè)試精度為RMS15nm,重復(fù)性精度為8nm。實(shí)驗(yàn)結(jié)果表明,四波前橫向剪切干涉法可以精確、快速地測(cè)試激光波前信息,為波面檢測(cè)提供了很好的研究方法。
[Abstract]:As a high precision measuring device, the design and machining accuracy, the accuracy of output parameters, the deviation from the design value, the stability of the laser during work will be transferred directly to the measurement of the tested parts. Therefore, the measurement of laser output parameters is particularly important. In this paper, four-wave transverse shear interferometry is used to detect laser beam parameters. It has the advantages of high resolution, strong maneuverability, good stability, insensitivity to vibration and compact structure. Based on the deep research and discussion of the commonly used wave-front detection methods, the basic principle of four-wave transverse shearing interference is discussed in detail in this paper. The two-dimensional diffraction grating which realizes this principle is the key device. It is based on the traditional mask plate of the Hartmann wavefront sensor to fabricate the phase grating with a certain phase difference value. The four wave transverse shear interferometry system consists of a two-dimensional diffraction grating and a CCD camera. When a beam passes through a two-dimensional diffraction grating, a shearing spot will be produced on the receiving screen of the CCD camera, thus forming an interferogram. The spatial carrier frequency method has no special requirement for the experimental device, and it can be used to extract the phase and light intensity in the dynamic measurement. With the help of the interferogram processing technique, the phase extraction and phase unwrapping can get the difference information of two orthogonal directions. The Zernike polynomial least square method is used to fit the wavefront, and the original wavefront can be obtained. In order to verify the feasibility of the scheme, the four-wave transverse shear interferometry is used to measure the 532nm semiconductor laser in the experiment, and the measured data are compared with the nominal parameters of the laser. The four wave transverse shear interferometry and the ZYGO-GPI interferometer are used to compare and test the measured samples. The accuracy of the four wave transverse shear interferometry is RMS 15nm and the repeatability is 8 nm. The experimental results show that the four-wave front transverse shearing interferometry can accurately and quickly test the laser wavefront information, which provides a good research method for wave surface detection.
【學(xué)位授予單位】：西安工業(yè)大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2015
【分類號(hào)】：TN248

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本文編號(hào)：1913089