本文選題：高速 + 高精度��； 參考：《廣東工業(yè)大學(xué)》2016年碩士論文

【摘要】：隨著微電子技術(shù)的發(fā)展,高精度、高速度、高加速已成為現(xiàn)代微電子加工指標要求。要滿足高速、高精度的運動平臺加工性能要求,在對運動系統(tǒng)中機械結(jié)構(gòu)優(yōu)化的同時,改善控制技術(shù),提高驅(qū)動性能也迫在眉睫。本文針對高速、高精度的運動平臺,為滿足運動平臺的高速、高精度要求,提出了一種基于運動平臺模型識別和動力學(xué)響應(yīng)等效的運動參數(shù)優(yōu)化方法,這種方法將被用于提高運動平臺的精度,減小平臺定位時間和減輕振動。文中通過分析常用的運動控制系統(tǒng),采用半閉環(huán)、位置控制的運動方案,選用了大族直線電機平臺、大族伺服驅(qū)動器和NI PXI-7350運動控制卡搭建了運動控制系統(tǒng),建立了研究對象。直線運動平臺是多組件間相互作用的運動平臺,在運動中,各組件的振動會對平臺的運動和定位產(chǎn)生影響,使定位精度難以提高；因此,本文通過對直線運動平臺進行動力學(xué)響應(yīng)分析,研究電機平臺在運動中存在不同階次的模態(tài)響應(yīng)；經(jīng)過模態(tài)分解,分離平臺存在的多模態(tài)響應(yīng),并研究產(chǎn)生模態(tài)響應(yīng)各組件之間相互關(guān)系,建立了運動平臺的等效簡化模型。對于等效模型的參數(shù)識別,文中采用實驗?zāi)B(tài)測試的方法獲得了等效模型實際的頻率；考慮到平臺在運動結(jié)束時,產(chǎn)生的是有阻尼自由振動,將等效模型的運動等效為單自由度系統(tǒng)運動,通過單自由度振動指數(shù)衰減法,計算出運動平臺系統(tǒng)的物理參數(shù),即等效剛度、等效阻尼和等效質(zhì)量,從而建立起了一個完整的等效模型。運動參數(shù)優(yōu)化是運動曲線參數(shù)化的目標,運動規(guī)劃是運動參數(shù)優(yōu)化的前提,本文選取了工業(yè)控制中常用的、具代表性的S型速度曲線,通過運動規(guī)劃,設(shè)定的運動參數(shù)為加加速度G1、G2、G3、G4,通過等效模型仿真的參數(shù)優(yōu)化,設(shè)定定位精度為3微米,在滿足定位時間最短的條件下,優(yōu)化出最優(yōu)運動參數(shù)G1、G2、G3、G4。同時為了驗證優(yōu)化參數(shù)的實際效果,把優(yōu)化參數(shù)設(shè)置在搭建好的運動控制系統(tǒng)中,通過實際運行測試,比較優(yōu)化和實際運行結(jié)果。驗證了參數(shù)優(yōu)化方法確實能有效的減小定位時間,減輕振動,提高運動精度。
[Abstract]:With the development of microelectronics technology, high precision, high speed and high acceleration have become the requirements of modern microelectronic machining. In order to meet the requirements of machining performance of high speed and high precision motion platform, it is urgent to improve the control technology and drive performance while optimizing the mechanical structure in the motion system. In order to meet the requirement of high speed and high precision for high speed and high precision motion platform, a motion parameter optimization method based on motion platform model recognition and equivalent dynamic response is proposed in this paper. This method will be used to improve the accuracy of the platform, reduce the positioning time and reduce the vibration. By analyzing the motion control system in common use, the motion control system is constructed by using the motion scheme of semi-closed loop and position control, the platform of the large family linear motor, the large family servo driver and the NI PXI-7350 motion control card, and the research object is established. The linear motion platform is a moving platform that interacts with multiple components. In motion, the vibration of each component will have an impact on the motion and positioning of the platform, which makes the positioning accuracy difficult to improve. In this paper, by analyzing the dynamic response of the linear motion platform, we study the modal response of the motor platform with different order in motion, and separate the multi-modal response of the platform by mode decomposition. The equivalent simplified model of the motion platform is established by studying the relationship among the components that generate the modal response. For the parameter identification of the equivalent model, the actual frequency of the equivalent model is obtained by using the method of experimental modal test, considering that the free vibration with damping is generated at the end of the motion of the platform. The motion of the equivalent model is equivalent to the motion of the system with single degree of freedom. The physical parameters of the motion platform system, namely equivalent stiffness, equivalent damping and equivalent mass, are calculated by the method of vibration exponential attenuation of the single degree of freedom. Thus a complete equivalent model is established. Motion parameter optimization is the goal of motion curve parameterization, and motion planning is the premise of motion parameter optimization. The kinematic parameter is G1G2G2G3G4 with acceleration. Through the parameter optimization of equivalent model simulation, the positioning precision is set to 3 micron. Under the condition of the shortest positioning time, the optimal motion parameter G1G2G2G3G4 is optimized. At the same time, in order to verify the actual effect of the optimization parameters, the optimized parameters are set up in a well-built motion control system, and the results of the optimization and the actual operation are compared through the actual running tests. It is proved that the parameter optimization method can effectively reduce the positioning time, reduce vibration and improve the motion accuracy.
【學(xué)位授予單位】：廣東工業(yè)大學(xué)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2016
【分類號】：TN05

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