本文選題：檢測(cè) + 激光跟蹤儀�。� 參考：《中國(guó)科學(xué)院長(zhǎng)春光學(xué)精密機(jī)械與物理研究所》2017年碩士論文

【摘要】：大口徑非球面鏡以其優(yōu)異的光學(xué)特性,在天文觀測(cè)、空間探測(cè)、目標(biāo)識(shí)別等領(lǐng)域的應(yīng)用越來(lái)越廣泛。在大口徑非球面鏡制造的研磨階段,由于粗糙度值較大,通常采用輪廓測(cè)量的方式進(jìn)行面形檢測(cè);傳統(tǒng)的三坐標(biāo)輪廓測(cè)量?jī)x受測(cè)量范圍的限制,很難滿足大口徑非球面鏡的檢測(cè)需求,并且檢測(cè)過(guò)程中需要來(lái)回搬運(yùn)被測(cè)件,操作困難。激光跟蹤儀具有測(cè)量范圍大、響應(yīng)速度快、檢測(cè)范圍廣、并能夠提供在位測(cè)量等諸多優(yōu)點(diǎn),在大口徑非球面鏡輪廓檢測(cè)中具有明顯的優(yōu)勢(shì)。本論文對(duì)基于激光跟蹤儀的大口徑非球面鏡研磨階段面形檢測(cè)技術(shù)展開(kāi)研究,分析測(cè)量系統(tǒng)的誤差分布,針對(duì)測(cè)角誤差,提出誤差補(bǔ)償方案,提高系統(tǒng)檢測(cè)精度;開(kāi)發(fā)設(shè)計(jì)大口徑非球面鏡立式自動(dòng)檢測(cè)系統(tǒng),提高檢測(cè)效率,降低檢測(cè)成本,實(shí)現(xiàn)大口徑非球面鏡的快速高精度面形檢測(cè),彌補(bǔ)現(xiàn)有檢測(cè)方式在研磨階段檢測(cè)的不足,并對(duì)進(jìn)一步的加工提供指導(dǎo)意見(jiàn)。論文的主要研究工作從以下幾個(gè)方面展開(kāi):1分析了激光跟蹤儀的結(jié)構(gòu)及工作原理,并分析了其對(duì)大口徑非球面鏡檢測(cè)的原理,討論測(cè)量誤差對(duì)面形檢測(cè)結(jié)果的影響。并對(duì)激光跟蹤儀測(cè)量系統(tǒng)的測(cè)距誤差,測(cè)角誤差,幾何誤差,靶球誤差及環(huán)境誤差等主要誤差進(jìn)行了分析。2針對(duì)激光跟蹤儀在大口徑非球面鏡檢測(cè)中對(duì)測(cè)量精度影響較大的角度誤差進(jìn)行分析,提出一種通過(guò)標(biāo)定測(cè)角誤差信息,利用S多項(xiàng)式擬合,以矯正測(cè)角誤差的方法。對(duì)標(biāo)定實(shí)驗(yàn)中的采樣方案進(jìn)行討論,根據(jù)不同頻段的角度誤差,提出了不同的采樣方案,滿足不同的精度需求。并討論分析了標(biāo)定實(shí)驗(yàn)中的采樣位置誤差和隨機(jī)誤差對(duì)測(cè)量結(jié)果的影響。搭建檢測(cè)平臺(tái),并對(duì)激光跟蹤儀角度誤差進(jìn)行標(biāo)定,得到角度誤差分布。3研究了激光跟蹤儀對(duì)大口徑非球面鏡研磨階段面形自動(dòng)檢測(cè)技術(shù)。設(shè)計(jì)研制了二維平移機(jī)構(gòu),并對(duì)其作用面積進(jìn)行最優(yōu)化求解;開(kāi)發(fā)了自動(dòng)測(cè)量控制程序,實(shí)現(xiàn)了激光跟蹤儀對(duì)大口徑非球面鏡的自動(dòng)面形在位檢測(cè)。并對(duì)4m量級(jí)反射鏡的檢測(cè)結(jié)果進(jìn)行角度誤差的矯正,并于非接觸式探頭測(cè)量結(jié)果進(jìn)行比較,具有較好的一致性,RMS偏差小于10%。
[Abstract]:Because of its excellent optical properties, large aperture non-spherical mirror has been widely used in astronomical observation, space detection, target recognition and so on. In the grinding stage of large-caliber non-spherical mirror, due to the large roughness value, the profile measurement is usually used to detect the surface shape, and the traditional 3D profilometer is limited by the measuring range. It is difficult to meet the test requirement of large aperture non-spherical mirror, and it is difficult to move the tested parts back and forth in the process of detection. Laser tracker has many advantages, such as large measurement range, fast response speed, wide detection range, and can provide in-situ measurement. It has obvious advantages in large aperture non-spherical mirror profile detection. In this paper, the measurement technology of large aperture non-spherical mirror grinding stage based on laser tracker is studied, the error distribution of measuring system is analyzed, and the scheme of error compensation is put forward to improve the accuracy of the system. This paper develops and designs a vertical automatic testing system for large aperture non-spherical mirror, which can improve the detection efficiency, reduce the detection cost, realize the rapid and high precision surface shape detection of the large aperture non-spherical mirror, and make up for the shortcomings of the existing testing methods in the grinding stage. And provide guidance for further processing. The main research work of this paper is to analyze the structure and working principle of the laser tracker from the following aspects: 1. The principle of the laser tracker is analyzed, and the influence of the measurement error on the measurement result is discussed. The ranging error, angle measuring error and geometric error of the laser tracker measuring system are also discussed. The main errors, such as target ball error and environment error, are analyzed. 2. Aiming at the angle error of laser tracker which has a great influence on the measurement accuracy in the detection of large aperture non-spherical mirror, a kind of angle measurement error information through calibration is put forward. S-polynomial fitting is used to correct the angle measurement error. The sampling scheme in calibration experiment is discussed. According to the angle error of different frequency bands, different sampling schemes are proposed to meet different precision requirements. The effects of sampling position error and random error on the measurement results are discussed and analyzed. The angle error of laser tracker is calibrated, and the angle error distribution of laser tracker is obtained. 3. The automatic testing technology of laser tracker for the grinding stage of large caliber non-spherical mirror is studied. The two-dimensional translation mechanism is designed and developed, and its working area is solved optimally, and the automatic measurement control program is developed to realize the automatic in-situ detection of the large aperture non-spherical mirror by laser tracker. The angle error of the 4 m mirror is corrected and compared with that of the non-contact probe. The RMS deviation is less than 10.
【學(xué)位授予單位】：中國(guó)科學(xué)院長(zhǎng)春光學(xué)精密機(jī)械與物理研究所
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2017
【分類號(hào)】：TH744.5

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