本文選題：檢測 + 激光跟蹤儀��； 參考：《中國科學院長春光學精密機械與物理研究所》2017年碩士論文

【摘要】：大口徑非球面鏡以其優(yōu)異的光學特性,在天文觀測、空間探測、目標識別等領(lǐng)域的應用越來越廣泛。在大口徑非球面鏡制造的研磨階段,由于粗糙度值較大,通常采用輪廓測量的方式進行面形檢測;傳統(tǒng)的三坐標輪廓測量儀受測量范圍的限制,很難滿足大口徑非球面鏡的檢測需求,并且檢測過程中需要來回搬運被測件,操作困難。激光跟蹤儀具有測量范圍大、響應速度快、檢測范圍廣、并能夠提供在位測量等諸多優(yōu)點,在大口徑非球面鏡輪廓檢測中具有明顯的優(yōu)勢。本論文對基于激光跟蹤儀的大口徑非球面鏡研磨階段面形檢測技術(shù)展開研究,分析測量系統(tǒng)的誤差分布,針對測角誤差,提出誤差補償方案,提高系統(tǒng)檢測精度;開發(fā)設(shè)計大口徑非球面鏡立式自動檢測系統(tǒng),提高檢測效率,降低檢測成本,實現(xiàn)大口徑非球面鏡的快速高精度面形檢測,彌補現(xiàn)有檢測方式在研磨階段檢測的不足,并對進一步的加工提供指導意見。論文的主要研究工作從以下幾個方面展開:1分析了激光跟蹤儀的結(jié)構(gòu)及工作原理,并分析了其對大口徑非球面鏡檢測的原理,討論測量誤差對面形檢測結(jié)果的影響。并對激光跟蹤儀測量系統(tǒng)的測距誤差,測角誤差,幾何誤差,靶球誤差及環(huán)境誤差等主要誤差進行了分析。2針對激光跟蹤儀在大口徑非球面鏡檢測中對測量精度影響較大的角度誤差進行分析,提出一種通過標定測角誤差信息,利用S多項式擬合,以矯正測角誤差的方法。對標定實驗中的采樣方案進行討論,根據(jù)不同頻段的角度誤差,提出了不同的采樣方案,滿足不同的精度需求。并討論分析了標定實驗中的采樣位置誤差和隨機誤差對測量結(jié)果的影響。搭建檢測平臺,并對激光跟蹤儀角度誤差進行標定,得到角度誤差分布。3研究了激光跟蹤儀對大口徑非球面鏡研磨階段面形自動檢測技術(shù)。設(shè)計研制了二維平移機構(gòu),并對其作用面積進行最優(yōu)化求解;開發(fā)了自動測量控制程序,實現(xiàn)了激光跟蹤儀對大口徑非球面鏡的自動面形在位檢測。并對4m量級反射鏡的檢測結(jié)果進行角度誤差的矯正,并于非接觸式探頭測量結(jié)果進行比較,具有較好的一致性,RMS偏差小于10%。
[Abstract]:Because of its excellent optical properties, large aperture non-spherical mirror has been widely used in astronomical observation, space detection, target recognition and so on. In the grinding stage of large-caliber non-spherical mirror, due to the large roughness value, the profile measurement is usually used to detect the surface shape, and the traditional 3D profilometer is limited by the measuring range. It is difficult to meet the test requirement of large aperture non-spherical mirror, and it is difficult to move the tested parts back and forth in the process of detection. Laser tracker has many advantages, such as large measurement range, fast response speed, wide detection range, and can provide in-situ measurement. It has obvious advantages in large aperture non-spherical mirror profile detection. In this paper, the measurement technology of large aperture non-spherical mirror grinding stage based on laser tracker is studied, the error distribution of measuring system is analyzed, and the scheme of error compensation is put forward to improve the accuracy of the system. This paper develops and designs a vertical automatic testing system for large aperture non-spherical mirror, which can improve the detection efficiency, reduce the detection cost, realize the rapid and high precision surface shape detection of the large aperture non-spherical mirror, and make up for the shortcomings of the existing testing methods in the grinding stage. And provide guidance for further processing. The main research work of this paper is to analyze the structure and working principle of the laser tracker from the following aspects: 1. The principle of the laser tracker is analyzed, and the influence of the measurement error on the measurement result is discussed. The ranging error, angle measuring error and geometric error of the laser tracker measuring system are also discussed. The main errors, such as target ball error and environment error, are analyzed. 2. Aiming at the angle error of laser tracker which has a great influence on the measurement accuracy in the detection of large aperture non-spherical mirror, a kind of angle measurement error information through calibration is put forward. S-polynomial fitting is used to correct the angle measurement error. The sampling scheme in calibration experiment is discussed. According to the angle error of different frequency bands, different sampling schemes are proposed to meet different precision requirements. The effects of sampling position error and random error on the measurement results are discussed and analyzed. The angle error of laser tracker is calibrated, and the angle error distribution of laser tracker is obtained. 3. The automatic testing technology of laser tracker for the grinding stage of large caliber non-spherical mirror is studied. The two-dimensional translation mechanism is designed and developed, and its working area is solved optimally, and the automatic measurement control program is developed to realize the automatic in-situ detection of the large aperture non-spherical mirror by laser tracker. The angle error of the 4 m mirror is corrected and compared with that of the non-contact probe. The RMS deviation is less than 10.
【學位授予單位】：中國科學院長春光學精密機械與物理研究所
【學位級別】：碩士
【學位授予年份】：2017
【分類號】：TH744.5

【參考文獻】

相關(guān)期刊論文 前10條

1 王孝坤;;利用三坐標測量儀拼接檢測大口徑非球面面形[J];紅外與激光工程;2014年10期

2 張峰;;納米級面形精度光學平面鏡加工[J];中國光學;2014年04期

3 薛棟林;;大口徑標準球面鏡組研制與應用[J];中國激光;2014年06期

4 師途;楊甬英;張磊;劉東;;非球面光學元件的面形檢測技術(shù)[J];中國光學;2014年01期

5 王孝坤;;大口徑碳化硅反射鏡面形子孔徑拼接干涉檢測[J];激光與光電子學進展;2013年05期

6 李森;閆國鋒;劉寧;;激光跟蹤儀坐標測量精度分析[J];北京測繪;2013年02期

7 張志宇;李銳鋼;鄭立功;張學軍;;離軸非球面SiC反射鏡的精密銑磨加工技術(shù)[J];機械工程學報;2013年17期

8 王孝坤;;激光跟蹤儀檢驗非球面面形的方法[J];光子學報;2012年04期

9 李杰;伍凡;吳時彬;匡龍;林常青;;使用激光跟蹤儀測量研磨階段離軸非球面面形[J];光學學報;2012年01期

10 王小鵬;朱日宏;王雷;許榮國;;數(shù)字刀口儀定量檢驗非球面光學元件面形[J];光學學報;2011年01期

相關(guān)博士學位論文 前3條

1 羅霄;采用平轉(zhuǎn)動應力盤技術(shù)加工超大口徑非球面的研究[D];中國科學院研究生院（長春光學精密機械與物理研究所）;2011年

2 賈立德;光學非球面坐標測量關(guān)鍵技術(shù)研究[D];國防科學技術(shù)大學;2008年

3 周維虎;大尺寸空間坐標測量系統(tǒng)精度理論若干問題的研究[D];合肥工業(yè)大學;2000年

相關(guān)碩士學位論文 前6條

1 黃瑛;基于夏克—哈特曼波前傳感的膜基反射鏡面形檢測[D];蘇州大學;2014年

2 李萬紅;激光跟蹤儀高精度測角誤差補償技術(shù)研究[D];合肥工業(yè)大學;2014年

3 王建明;三坐標輪廓測量儀檢測非球面研究[D];蘇州大學;2013年

4 柯瑞;空間反射鏡鏡片及其支撐結(jié)構(gòu)分析與設(shè)計[D];哈爾濱工業(yè)大學;2010年

5 焦悅;二次曲面鏡面面形檢測技術(shù)研究[D];長春理工大學;2010年

6 王振桓;旋轉(zhuǎn)變壓器/感應同步器/圓光柵組合測角系統(tǒng)研究[D];哈爾濱工業(yè)大學;2008年

，

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