本文選題：氣液固三相磨粒流 + 高速旋流流場��； 參考：《浙江工業(yè)大學(xué)》2015年碩士論文

【摘要】：氣液固三相磨粒流拋光加工,是一種利用處于湍流狀態(tài)的氣液固三相高速旋流磨粒流對大面積平面工件表面進(jìn)行精密拋光加工的一種新方法。本論文通過對磨粒流在不同入射角狀態(tài)下的流場特性進(jìn)行數(shù)值模擬,分析運(yùn)動規(guī)律,得出最佳結(jié)構(gòu)設(shè)計(jì)參數(shù)。基于數(shù)值模擬結(jié)果,設(shè)計(jì)拋光加工工具并搭建實(shí)驗(yàn)裝置平臺,進(jìn)行加工實(shí)驗(yàn)研究。主要內(nèi)容如下:(1)以大平面光學(xué)及半導(dǎo)體器件表面的精密加工制造難題作為研究背景,在對國內(nèi)外各類已有加工方法進(jìn)行調(diào)研的基礎(chǔ)上,指出流體加工方法的優(yōu)勢所在。綜述當(dāng)前流體加工方法的發(fā)展概況及優(yōu)缺點(diǎn),基于氣泡潰滅理論,提出了氣液固三相磨粒流拋光加工新方法。(2)基于Realizable k-ε湍流模型與Mixture模型,建立了氣液固三相磨粒流拋光加工過程的理論分析模型。通過對磨粒流在不同入射角狀態(tài)下的流場特性進(jìn)行數(shù)值模擬,分析其運(yùn)動規(guī)律,得到磨粒流入射流道的最佳結(jié)構(gòu)設(shè)計(jì)參數(shù),為拋光加工工具的設(shè)計(jì)加工提供指導(dǎo)。(3)搭建實(shí)驗(yàn)裝置平臺,基于數(shù)值仿真分析結(jié)果,選擇合適的磨粒流配比及加工工藝方案。分別進(jìn)行添加微米級氣泡的氣液固三相磨粒流、添加毫米級氣泡的氣液固三相磨粒流以及不添加氣泡的液固兩相磨粒流拋光加工實(shí)驗(yàn),實(shí)驗(yàn)結(jié)果表明:添加微氣泡的氣液固三相磨粒流拋光加工中,高速旋流流場中的微氣泡潰滅對周圍磨粒產(chǎn)生一定的加速推動作用,其對工件表面的拋光加工效率最高,經(jīng)10小時(shí)加工后工件表面的粗糙度、均勻性也最好。
[Abstract]:Gas-liquid-solid three-phase abrasive flow polishing is a new method for precision polishing of large area planar workpiece surface by using gas-liquid-solid three-phase high-speed swirl abrasive flow in turbulent state. In this paper, the flow field characteristics of abrasive flow at different incident angles are numerically simulated, the motion law is analyzed, and the optimum structural design parameters are obtained. Based on the numerical simulation results, the polishing tool was designed and the experimental platform was set up. The main contents are as follows: (1) based on the research background of large plane optics and precision manufacturing problems of semiconductor devices, the advantages of fluid processing methods are pointed out on the basis of investigation of all kinds of existing machining methods at home and abroad. Based on the theory of bubble collapse, a new method of gas-liquid-solid three-phase abrasive flow polishing is proposed, which is based on Realizable k- 蔚 turbulence model and Mixture model. The theoretical analysis model of gas-liquid-solid three-phase abrasive flow polishing process is established. Through the numerical simulation of the flow field characteristics of the abrasive particle flow at different incident angles and the analysis of its motion law, the optimum structural design parameters of the abrasive particles flowing into the jet channel are obtained. To provide guidance for the design and machining of polishing tools, an experimental platform is set up. Based on the results of numerical simulation, appropriate abrasive flow ratio and processing technology are selected. Experiments were carried out on gas-liquid-solid three-phase abrasive flow with micron size bubble, gas-liquid-solid three-phase abrasive particle flow with millimeter bubble and liquid-solid two-phase abrasive flow polishing without adding bubble, respectively. The experimental results show that in the gas-liquid-solid three-phase abrasive flow polishing process with microbubbles, the micro-bubble collapse in the high-speed swirl flow field has a certain accelerating effect on the surrounding abrasive particles, and the polishing efficiency on the workpiece surface is the highest. After 10 hours of processing, the workpiece surface roughness, uniformity is also the best.
【學(xué)位授予單位】：浙江工業(yè)大學(xué)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2015
【分類號】：TN305.2

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