本文選題：注塑成型 + 平板微制件��； 參考：《大連理工大學(xué)》2015年碩士論文

【摘要】：聚合物平板微器件在生命科學(xué)和光學(xué)領(lǐng)域有廣泛用途。如微流控芯片、導(dǎo)光板等。由于微注塑成型具有成型周期短、自動(dòng)化程度高等優(yōu)點(diǎn),已經(jīng)成為微流控芯片最主要的加工方法之一。用戶對(duì)聚合物平板微器件有整形的新需求。除此之外,注塑成型后對(duì)于有些平板微器件存在的平面度過(guò)大可能會(huì)影響后續(xù)器件封裝鍵合及使用,本文針對(duì)上述需求和問(wèn)題,以一種聚合物平板微器件-微流控芯片為對(duì)象,在對(duì)注塑工藝進(jìn)行優(yōu)化的基礎(chǔ)上,研究聚合物平板微器件的二次整形方法,成果適用于聚合物平板微器件的中小批量制造領(lǐng)域。主要研究?jī)?nèi)容包括以下幾個(gè)方面：研制了一套包含澆注機(jī)構(gòu)、模溫控制系統(tǒng)和頂出機(jī)構(gòu)的微注塑模具,其中微鑲件采用模具鋼為材料,利用微銑削和微細(xì)電火花技術(shù)加工出多尺度、變截面的微結(jié)構(gòu),微鑲件采用雙螺紋結(jié)構(gòu)安裝在定模架上。在此基礎(chǔ)上,選擇最佳注塑工藝參數(shù),制得微溝道填充率接近1、平面度約為27.111μm的平板微制件。提出了一種基于視覺(jué)對(duì)準(zhǔn)的銑削整形方法,采用非接觸對(duì)刀方式對(duì)注塑成型制件外輪廓進(jìn)行二次銑削整形,整形指標(biāo)為外輪廓中心平面相對(duì)于微溝道中心平面的對(duì)稱度,銑削整形后制件外輪廓中心平面相對(duì)于微溝道中心平面的對(duì)稱度控制在0.4mm內(nèi),滿足實(shí)際使用要求。理論研究了熱壓溫度和壓力的耦合場(chǎng)對(duì)銑削整形器件的平面變形的影響,對(duì)銑削整形的器件進(jìn)行熱壓整平實(shí)驗(yàn),采用干涉法測(cè)量器件平面度和器件部分區(qū)域的不平度,實(shí)驗(yàn)結(jié)果表明：器件平面度由熱壓整平前的27.111μm降低至4.341μm,器件部分區(qū)域不平度由熱壓整平前的16.471 μm/mm降低至3.430μm/mm,可有效改善器件的平面變形。采用紫外膠連等方法,將加工的微器件組成微流控芯片,并搭建了芯片流量測(cè)試實(shí)驗(yàn)裝置,對(duì)芯片進(jìn)行流量測(cè)試和疲勞測(cè)試。實(shí)驗(yàn)結(jié)果表明：采用提出方法制造的微流控芯片,芯片使用60小時(shí)未發(fā)生漏液現(xiàn)象,流量線性回歸方程的R2為0.837。
[Abstract]:Polymer flat-plate microdevices are widely used in life sciences and optics. Such as microfluidic chip, light guide plate and so on. Microinjection molding has become one of the most important processing methods for microfluidic chips because of its advantages of short forming cycle and high automation. Users have a new demand for polymer flat-plate microdevices. In addition, after injection molding, it may affect the packaging bonding and use of some flat plate microdevices after injection molding. In view of the above requirements and problems, this paper takes a polymer flat plate microdevice-microfluidic chip as an object. Based on the optimization of injection molding process, the secondary shaping method of polymer flat microdevices is studied. The results are applicable to the field of medium and small batch manufacturing of polymer flat microdevices. The main research contents include the following aspects: a set of micro-injection moulds including pouring mechanism, mold temperature control system and ejection mechanism are developed, in which the micro-inserts are made of die steel. The multi-scale and variable cross-section microstructures were fabricated by using micro-milling and micro-EDM technology. The micro-inserts were installed on the die frame with double-thread structure. On the basis of this, the best injection molding process parameters are selected, and the micro-groove filling ratio is close to 1, and the planeness is about 27.111 渭 m. A new milling and shaping method based on visual alignment is proposed, in which the external contour of injection molding parts is second milling and shaping by non-contact cutter. The shaping index is the symmetry degree of the center plane of the outer contour relative to the center plane of the micro-channel. The symmetry between the center plane of the outer contour and the center plane of the micro-channel after milling and shaping is controlled in 0.4mm to meet the practical requirements. The effect of the coupling field of hot pressing temperature and pressure on the plane deformation of milling and shaping device is studied theoretically. The flatness of the device and the unevenness of part of the device are measured by interferometry. The experimental results show that the planeness of the device is reduced from 27.111 渭 m to 4.341 渭 m before hot pressing, and the unevenness of part of the device is reduced from 16.471 渭 m/mm to 3.430 渭 m / mm, which can effectively improve the plane deformation of the device. The microfluidic chip was made up of the fabricated microdevices by means of ultraviolet glue connection, and a flow test device was built to test the flow rate and fatigue of the chip. The experimental results show that the microfluidic chip fabricated by the proposed method has no leakage for 60 hours, and the R2 of the linear flow regression equation is 0.837.
【學(xué)位授予單位】：大連理工大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2015
【分類號(hào)】：TQ320.662;TN492

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本文編號(hào)：1862344