本文選題：太赫茲 + 可重構(gòu)超材料�。� 參考：《桂林電子科技大學(xué)》2017年碩士論文

【摘要】：太赫茲濾波器可以濾除不需要的頻率和噪聲,以提高太赫茲系統(tǒng)的性能。超材料是一種具有特殊電磁響應(yīng)特性的人工復(fù)合材料或結(jié)構(gòu)。目前,商業(yè)化的太赫茲濾波器只能選擇特定頻率的太赫茲波,其阻帶或通帶中心頻率位置和幅值都不可調(diào)節(jié),從而大大限制了濾波器的適用范圍。因此,太赫茲可調(diào)濾波器是當(dāng)前太赫茲領(lǐng)域急需要的一個重要功能器件。本論文主要開展基于靜電驅(qū)動可重構(gòu)超材料的太赫茲可調(diào)濾波器研究,具體內(nèi)容如下:(1)基于微機電系統(tǒng)的靜電梳齒驅(qū)動器研究。重點研究了驅(qū)動器各個結(jié)構(gòu)參數(shù)對驅(qū)動器最大位移量的影響。靜電梳齒驅(qū)動器與可動框架通過彈簧結(jié)構(gòu)相連。當(dāng)在靜電梳齒驅(qū)動器上施加直流電壓時,靜電梳齒驅(qū)動器會帶動可動框架移動。在30V的直流電壓下,驅(qū)動器最大位移量可達到3微米。(2)基于靜電驅(qū)動可重構(gòu)超材料的可調(diào)太赫茲帶阻濾波器研究。設(shè)計了一種由倒梯形環(huán)結(jié)構(gòu)和一字型結(jié)構(gòu)組成的可調(diào)太赫茲濾波器。當(dāng)兩者間距為3微米時,阻帶的中心頻率位于1.25THz;當(dāng)兩者間距為0(接觸)時,阻帶的中心頻率為0.98THz,阻帶中心頻率的調(diào)制度達到21.6%。利用時域有限積分方法研究了該濾波器的濾波機理和濾波器結(jié)構(gòu)參數(shù)對濾波特性的影響。(3)基于靜電驅(qū)動可重構(gòu)超材料的可調(diào)太赫茲帶通濾波器研究。設(shè)計了一種可調(diào)帶通濾波器,該濾波器中央單元由一個可動橫桿和兩個開口環(huán)構(gòu)成。當(dāng)可動橫桿位于兩個開口環(huán)中間時,濾波器有兩個通帶,各通帶的中心頻率分別為0.65THz和0.95THz。當(dāng)可動橫桿接近下開口環(huán)時,高頻通帶的透射幅值會逐漸減小直至變?yōu)?。利用時域有限積分方法研究了該濾波器的濾波機理和濾波器結(jié)構(gòu)參數(shù)對濾波特性的影響。并用絕緣體上硅(Silicon-On-Isolator:SOI)體硅工藝加工出了樣片,用太赫茲時域光譜系統(tǒng)對濾波器性能進行了測試。結(jié)果表明,驅(qū)動電壓U=120V時,高通帶中心頻率處的透射幅值接近于0,仿真結(jié)果與實驗結(jié)果基本一致。
[Abstract]:Terahertz filters can filter unwanted frequencies and noises to improve the performance of terahertz systems. Metamaterials are artificial composites or structures with special electromagnetic response. At present, the commercial THz filter can only select the terahertz wave at a specific frequency. The position and amplitude of the center frequency of the stopband or passband can not be adjusted, which greatly limits the application range of the filter. Therefore, terahertz tunable filter is an important functional device which is urgently needed in the field of terahertz. This thesis mainly focuses on the research of THz tunable filter based on electrostatic drive reconfigurable supermaterial. The main contents are as follows: (1) Electrostatic comb driver based on MEMS. The effect of structural parameters on the maximum displacement of the driver is studied. Electrostatic comb driver and movable frame are connected by spring structure. When the DC voltage is applied on the electrostatic comb driver, the electrostatic comb driver will move the movable frame. At a DC voltage of 30 V, the maximum displacement of the driver can reach 3 micron. 2) A tunable terahertz band-stop filter based on electrostatic driven reconfigurable supermaterial is studied. A tunable terahertz filter consisting of an inverted trapezoid ring structure and a glyph structure is designed. When the distance between them is 3 渭 m, the center frequency of the stopband is 1.25THz. when the distance between them is 0 (contact), the central frequency of the stopband is 0.98 THZ, and the regulation of the central frequency of the stopband reaches 21.6b. The filtering mechanism of the filter and the influence of the filter structure parameters on the filter characteristics are studied by using the time-domain finite integral method. The tunable terahertz band-pass filter based on electrostatic driven reconfigurable supermaterial is studied. A tunable bandpass filter is designed. The central unit of the filter consists of a movable crossbar and two open loops. When the movable crossbar is in the middle of two open rings, the filter has two passbands, each of which has a central frequency of 0.65THz and 0.95THZ respectively. When the movable cross bar approaches the lower opening ring, the transmission amplitude of the high frequency passband will gradually decrease to 0. The filtering mechanism of the filter and the influence of the filter structure parameters on the filter characteristics are studied by using the time-domain finite integral method. Samples have been fabricated by using Silicon-On-Isolator: SOI bulk silicon process on insulators. The performance of the filter has been tested by terahertz time-domain spectroscopy system. The results show that the transmission amplitude at the center frequency of the high pass band is close to 0 when the driving voltage is U _ (120V), and the simulation results are in good agreement with the experimental results.
【學(xué)位授予單位】：桂林電子科技大學(xué)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2017
【分類號】：TN713

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