發(fā)布時間：2018-05-02 14:37

  本文選題：微位移 + 定位平臺��； 參考：《哈爾濱工業(yè)大學》2015年碩士論文

【摘要】：在集成電路制造業(yè)、精密加工行業(yè)以及精密測量行業(yè)對多自由度精密定位平臺的需求和要求都不斷增加,對精密定位平臺的定位精度、自由度維數(shù)、分辨力以及加速度等性能都提出了更高的要求。本文設計了一種改進Y形磁懸浮精密定位平臺解決了氣浮型定位平臺不能在真空環(huán)境下工作的問題,同時保證了較高的運動性能。首先,綜合國內外已有的磁懸浮定位平臺提出了改進Y形磁懸浮微位移精密定位平臺,用Halbach永磁陣列取代單個磁鋼,將提供懸浮力和驅動力的線圈固定在同一平面上,增加了定位平臺的行程同時也加大了控制難度。同時對定位平臺動子進行了仿真,仿真結果表明動子的一階固有頻率為446.77Hz,加載后動子中央最大形變量為59nm。其次,對定位平臺驅動單元的通電線圈建立了電磁力解析模型。通過對線圈的一維至三維建模獲得了通電線圈在Halbach永磁陣列空間磁場中的受力解析模型;根據解析模型的結果,結合本課題所采用的線圈陣列是一維2相線圈陣列,解算得到了各通電線圈的電流分配結果;然后對定位平臺進行了位置解耦,最終得到了各線圈電流和個自由度位移之間的對應關系。再次,設計了系統(tǒng)運動控制板卡,板卡的主要資源有由DSP和FPGA組成的主控單元、3路模擬量輸入接口、6路模擬量輸出接口以及3路光柵尺信號輸入接口,并編寫了系統(tǒng)的運動控制程序以及人機交互上位機;對定位平臺在運動過程中可能會產生的系統(tǒng)誤差進行了定量分析,并給出了補償措施。最后,搭建了實驗平臺,對本文所設計的改進Y形磁懸浮精密定位平臺樣機進行了整機實驗。實驗表明定位平臺樣機的閉環(huán)定位噪聲為±0.5μm;定位平臺動子z向平動的位移分辨力優(yōu)于2μm,定位平臺動子繞y軸轉動的角位移分辨力優(yōu)于5″,繞x軸轉動的角位移分辨力優(yōu)于7″;定位平臺動子空載最大加速度可達9.734m/s2,當動子負載2kg時定位平臺的最大加速度為6.502m/s2。
[Abstract]:In the integrated circuit manufacturing industry, precision machining industry and precision measurement industry, the demand and requirements for the multi-degree-of-freedom precision positioning platform are increasing, and the positioning accuracy, the degree of freedom dimension, the precision of the precision positioning platform, the dimension of the degree of freedom, Higher resolution and acceleration are required. In this paper, an improved Y-shaped maglev precision positioning platform is designed to solve the problem that the air-floated positioning platform can not work in vacuum environment, and at the same time, it can guarantee higher motion performance. Firstly, an improved Y-shaped maglev micro-displacement positioning platform is proposed based on the existing maglev positioning platform at home and abroad. The single magnetic steel is replaced by Halbach permanent magnet array, and the coil providing the levitation force and driving force is fixed on the same plane. It increases the travel of the positioning platform and increases the difficulty of control. The simulation results show that the first order natural frequency of the mover is 446.77 Hz and the maximum deformation of the center of the manipulator after loading is 59 nm. Secondly, an analytical model of electromagnetic force is established for the electrified coil of the driving unit of the positioning platform. Through the one-dimensional to three-dimensional modeling of the coil, the force analysis model of the electrified coil in the space magnetic field of the Halbach permanent magnet array is obtained, and according to the results of the analytical model, the coil array used in this paper is one-dimensional and two-phase coil array. The results of the current distribution of the coils are obtained, and then the position decoupling of the positioning platform is carried out, and the corresponding relationship between the current of each coil and the displacement of the individual degrees of freedom is obtained. Thirdly, the system motion control board is designed. The main resource of the card is the main control unit composed of DSP and FPGA. The main control unit consists of three analog input interface and six analog output interface and three grating scale signal input interface. The system motion control program and man-machine interaction host computer are written, and the system errors that may occur in the motion process of the positioning platform are quantitatively analyzed, and the compensation measures are given. Finally, the experimental platform is built, and the prototype of the improved Y-shape magnetic levitation precision positioning platform designed in this paper is tested. The experimental results show that the closed loop positioning noise of the platform prototype is 鹵0.5 渭 m, the displacement resolution of the z direction translation of the positioning platform mover is better than 2 渭 m, and the angular displacement resolution of the positioning platform mover is better than 5 ". The angular displacement resolution of rotation around the x axis is better than 7 ", the maximum no-load acceleration of the moving platform can reach 9.734 m / s ~ (2), and the maximum acceleration of the positioning platform is 6.502m / s ~ (2) when the mover loads 2kg.
【學位授予單位】：哈爾濱工業(yè)大學
【學位級別】：碩士
【學位授予年份】：2015
【分類號】：TN305.7

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本文編號：1834319