發(fā)布時(shí)間：2018-04-26 12:15

  本文選題：納米位移檢測(cè) + 激光外差干涉�。� 參考：《中北大學(xué)》2017年碩士論文

【摘要】：激光外差干涉非接觸式的特點(diǎn)使其成為無(wú)損檢測(cè)領(lǐng)域重要的組成部分,對(duì)于某些特殊行業(yè)來(lái)說(shuō),能夠?qū)崿F(xiàn)納米級(jí)別的高精度檢測(cè)顯得尤為重要。本文旨在設(shè)計(jì)并實(shí)現(xiàn)納米級(jí)激光外差干涉檢測(cè)系統(tǒng),首先對(duì)激光外差干涉檢測(cè)原理進(jìn)行闡述,對(duì)光路結(jié)構(gòu)進(jìn)行優(yōu)化,實(shí)現(xiàn)差分雙光路。分析了光路系統(tǒng)非線性誤差來(lái)源,將具體誤差歸為兩類進(jìn)行數(shù)學(xué)推導(dǎo),建立起誤差模型并進(jìn)行仿真,對(duì)光路系統(tǒng)所用的主要器件進(jìn)行性能測(cè)試及分析。其次,介紹了目前常用的幾種激光外差干涉信號(hào)處理方法,選擇使用FPGA對(duì)納米級(jí)激光外差干涉檢測(cè)系統(tǒng)進(jìn)行信號(hào)處理,設(shè)計(jì)出所需的三個(gè)模塊,分別進(jìn)行仿真驗(yàn)證。最后將采集到的信號(hào)處理完并在整體仿真圖中顯示出來(lái)。通過(guò)壓電陶瓷靜態(tài)實(shí)驗(yàn)、動(dòng)態(tài)實(shí)驗(yàn)的數(shù)據(jù)分析,證明了系統(tǒng)抗噪性能的優(yōu)越,動(dòng)態(tài)實(shí)驗(yàn)中對(duì)振動(dòng)信號(hào)解調(diào)得到的電壓信噪比達(dá)到32.1dB,干擾信號(hào)強(qiáng)度不到主頻信號(hào)的2.6%,對(duì)振動(dòng)信息(位移信息)解調(diào)的還原度高。在脈沖激光器激勵(lì)實(shí)驗(yàn)中,樣品與整形后的脈沖點(diǎn)光源距離50mm處,在寬頻范圍內(nèi)檢測(cè)到4.59nm,2.18nm兩個(gè)主要位移,對(duì)應(yīng)振動(dòng)頻率分別為1.7MHz、7.4MHz,證明了樣品內(nèi)部存在缺陷。樣品距整形后點(diǎn)光源距離分別80mm、60mm處,FPGA解調(diào)出的主要位移分別為104.8058nm、18.037nm。
[Abstract]:The non-contact laser heterodyne interference makes it an important part in the field of nondestructive testing. For some special industries, it is very important to realize high-precision detection at nanometer level. The purpose of this paper is to design and implement the laser heterodyne interferometric detection system. Firstly, the principle of laser heterodyne interference detection is expounded, the structure of the optical path is optimized, and the differential double optical path is realized. The source of nonlinear error of optical path system is analyzed, the concrete error is classified into two kinds of mathematical derivation, the error model is established and simulated, and the performance of the main devices used in optical circuit system is tested and analyzed. Secondly, several commonly used methods of laser heterodyne interference signal processing are introduced. FPGA is chosen to process the signal of nanometer level laser heterodyne interferometry detection system. Three modules are designed and simulated respectively. Finally, the collected signal is processed and displayed in the overall simulation diagram. The static and dynamic experiments of piezoelectric ceramics show that the anti-noise performance of the system is superior. In dynamic experiment, the signal to noise ratio (SNR) of the vibration signal demodulated is 32.1dB, the interference signal intensity is less than 2.6dB of the main frequency signal, and the reduction degree of the vibration information (displacement information) demodulation is high. In the experiment of pulse laser excitation, two main shifts at 4.59 nm ~ 2.18 nm and corresponding vibration frequency of 1.7 MHz ~ (7.4 MHz) were detected in the wide frequency range from the sample to the pulse point light source (50mm) after shaping. It is proved that there are defects in the sample. The main displacement demodulated by FPGA is 104.8058nm ~ 18.037nm respectively at the distance of 80mm ~ 60mm from the sample to the point light source after shaping.
【學(xué)位授予單位】：中北大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2017
【分類號(hào)】：TN24

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