本文選題：納米位移檢測 + 激光外差干涉�。� 參考：《中北大學》2017年碩士論文

【摘要】：激光外差干涉非接觸式的特點使其成為無損檢測領域重要的組成部分,對于某些特殊行業(yè)來說,能夠?qū)崿F(xiàn)納米級別的高精度檢測顯得尤為重要。本文旨在設計并實現(xiàn)納米級激光外差干涉檢測系統(tǒng),首先對激光外差干涉檢測原理進行闡述,對光路結構進行優(yōu)化,實現(xiàn)差分雙光路。分析了光路系統(tǒng)非線性誤差來源,將具體誤差歸為兩類進行數(shù)學推導,建立起誤差模型并進行仿真,對光路系統(tǒng)所用的主要器件進行性能測試及分析。其次,介紹了目前常用的幾種激光外差干涉信號處理方法,選擇使用FPGA對納米級激光外差干涉檢測系統(tǒng)進行信號處理,設計出所需的三個模塊,分別進行仿真驗證。最后將采集到的信號處理完并在整體仿真圖中顯示出來。通過壓電陶瓷靜態(tài)實驗、動態(tài)實驗的數(shù)據(jù)分析,證明了系統(tǒng)抗噪性能的優(yōu)越,動態(tài)實驗中對振動信號解調(diào)得到的電壓信噪比達到32.1dB,干擾信號強度不到主頻信號的2.6%,對振動信息(位移信息)解調(diào)的還原度高。在脈沖激光器激勵實驗中,樣品與整形后的脈沖點光源距離50mm處,在寬頻范圍內(nèi)檢測到4.59nm,2.18nm兩個主要位移,對應振動頻率分別為1.7MHz、7.4MHz,證明了樣品內(nèi)部存在缺陷。樣品距整形后點光源距離分別80mm、60mm處,FPGA解調(diào)出的主要位移分別為104.8058nm、18.037nm。
[Abstract]:The non-contact laser heterodyne interference makes it an important part in the field of nondestructive testing. For some special industries, it is very important to realize high-precision detection at nanometer level. The purpose of this paper is to design and implement the laser heterodyne interferometric detection system. Firstly, the principle of laser heterodyne interference detection is expounded, the structure of the optical path is optimized, and the differential double optical path is realized. The source of nonlinear error of optical path system is analyzed, the concrete error is classified into two kinds of mathematical derivation, the error model is established and simulated, and the performance of the main devices used in optical circuit system is tested and analyzed. Secondly, several commonly used methods of laser heterodyne interference signal processing are introduced. FPGA is chosen to process the signal of nanometer level laser heterodyne interferometry detection system. Three modules are designed and simulated respectively. Finally, the collected signal is processed and displayed in the overall simulation diagram. The static and dynamic experiments of piezoelectric ceramics show that the anti-noise performance of the system is superior. In dynamic experiment, the signal to noise ratio (SNR) of the vibration signal demodulated is 32.1dB, the interference signal intensity is less than 2.6dB of the main frequency signal, and the reduction degree of the vibration information (displacement information) demodulation is high. In the experiment of pulse laser excitation, two main shifts at 4.59 nm ~ 2.18 nm and corresponding vibration frequency of 1.7 MHz ~ (7.4 MHz) were detected in the wide frequency range from the sample to the pulse point light source (50mm) after shaping. It is proved that there are defects in the sample. The main displacement demodulated by FPGA is 104.8058nm ~ 18.037nm respectively at the distance of 80mm ~ 60mm from the sample to the point light source after shaping.
【學位授予單位】：中北大學
【學位級別】：碩士
【學位授予年份】：2017
【分類號】：TN24

【參考文獻】

相關期刊論文 前10條

1 朱祥;張志偉;張文靜;魏玉蕓;戴一帆;;光學外差干涉法檢測激光超聲振動[J];科學技術與工程;2016年29期

2 耿榮生;景鵬;;蓬勃發(fā)展的我國無損檢測技術[J];機械工程學報;2013年22期

3 馮媛媛;李武軍;于金濤;;聲光調(diào)制器偏振衍射特性的分析[J];西安工業(yè)大學學報;2013年06期

4 榮烈潤;;納米測量技術的現(xiàn)在與未來[J];金屬加工(冷加工);2013年08期

5 苗匯靜;孫桂華;王立新;;通用有源濾波器設計[J];電子器件;2012年05期

6 范志新;;偏光片知識講座 第三講 偏光元件原理[J];現(xiàn)代顯示;2012年04期

7 嚴一民;姚列明;霍中生;;布喇格衍射光強與偏轉(zhuǎn)角度特性研究[J];實驗科學與技術;2011年02期

8 趙思維;嚴利平;楊濤;周硯江;陳本永;;基于DSP的激光外差干涉信號處理方法[J];浙江理工大學學報;2011年02期

9 呂朝輝;;納米材料在食品安全分析中的應用研究[J];科技傳播;2010年10期

10 左全生;;帶通濾波電路的相頻特性研究[J];常州工學院學報;2010年01期

，

本文編號：1805988