本文選題：熱釋電探測(cè)器 + 鉭酸鋰　； 參考：《電子科技大學(xué)》2017年碩士論文

【摘要】：基于鉭酸鋰的熱釋電探測(cè)器由于其具有能在常溫下工作、光譜響應(yīng)范圍寬,熱釋電系數(shù)大、價(jià)格便宜和器件制備簡單等特點(diǎn),廣泛用于非接觸式溫度測(cè)量設(shè)備、運(yùn)動(dòng)檢測(cè)器和氣體分析儀中。而鉭酸鋰敏感元是其核心,它的優(yōu)劣直接決定著器件的性能。本論文主要對(duì)鉭酸鋰敏感元的制備進(jìn)行了較為系統(tǒng)的研究,研究的具體內(nèi)容包括熱釋電探測(cè)器理論分析、鉭酸鋰晶體拋磨工藝、紅外吸收層的制備與表征以及熱釋電探測(cè)器性能的測(cè)試。首先,分析了熱釋電探測(cè)器的原理和基本性能參數(shù),接著采用了機(jī)械研磨法和化學(xué)機(jī)械拋光法分別對(duì)鉭酸鋰晶片進(jìn)行了減薄與拋光,分別研究了研磨液濃度、主軸轉(zhuǎn)速、壓力對(duì)減薄速率的影響和溫度、氧化劑濃度、溶液的pH值對(duì)化學(xué)機(jī)械拋光速率的影響,并優(yōu)化了減薄拋光工藝參數(shù),對(duì)晶片表面形貌作了表征。然后,采用了高壓靜電噴涂法制備油墨-炭黑紅外吸收層,并進(jìn)行了吸收層的表征和吸收率的測(cè)試。研究了電壓和噴涂高度對(duì)吸收層質(zhì)量的影響,當(dāng)電壓16kV,噴涂距離為3cm時(shí),噴涂量為5μl時(shí)吸收層表面較為均勻平整,厚度為2μm左右,粗糙度為500nm。通過紅外吸收率的測(cè)試,發(fā)現(xiàn)油墨-炭黑吸收層對(duì)近紅外光的吸收率非常高,達(dá)到了90%以上。最后,對(duì)熱釋電探測(cè)器進(jìn)行了封裝與性能測(cè)試,測(cè)量了不同粗糙度的鉭酸鋰晶片的介電常數(shù)和和介電損耗,對(duì)不同鉭酸鋰厚度、不同入射功率、不同表面粗糙度、不同調(diào)制頻率下的電壓響應(yīng)進(jìn)行了測(cè)試,并通過熱學(xué)仿真分析響應(yīng)電壓波形,同時(shí)測(cè)試比較了不同表面粗糙度敏感元、不同頻率下的噪聲。隨著鉭酸鋰晶片厚度的減小響應(yīng)率逐漸增大,當(dāng)厚度達(dá)到50μm時(shí),器件響應(yīng)率達(dá)到了4.62×103V/W。器件的響應(yīng)隨著入射光的功率成正比,在低頻時(shí)探測(cè)器的電壓響應(yīng)隨著頻率的升高而增大,在一定頻率范圍內(nèi)探測(cè)器的電壓響應(yīng)與頻率無關(guān),在高頻時(shí),器件的電壓響應(yīng)隨著頻率升高逐漸減小。敏感元表面經(jīng)過拋光后的器件噪聲明顯減小,粗糙度為Ra 50nm的敏感元器件噪聲低到2μV/Hz,通過計(jì)算可得探測(cè)器的等效噪聲光功率為4.3×10-10W/Hz1/2,比探測(cè)率為3.3×108cm·Hz1/2/W,符合高性能熱釋電探測(cè)器對(duì)敏感元的要求。
[Abstract]:The pyroelectric detector based on lithium tantalate is widely used in non-contact temperature measurement equipment, motion detector and gas analyzer because of its ability to work at normal temperature, wide spectrum response range, high pyroelectric coefficient, cheap price and simple device preparation, and the lithium tantalate sensitive element is the core of the thermoluminescence detector. In this paper, the preparation of the lithium tantalate sensitive element is systematically studied in this paper, including the theoretical analysis of pyroelectric detector, the polishing process of lithium tantalate crystal, the preparation and characterization of the infrared absorption layer and the test of the performance of the pyroelectric detector. First, the principle of pyroelectric detector is analyzed. The basic performance parameters, then the thinning and polishing of lithium tantalate wafers were carried out by mechanical grinding and chemical mechanical polishing. The influence of grinding fluid concentration, spindle speed, pressure on thinning rate and temperature, concentration of oxidant, pH value of solution on the mechanical polishing rate of chemical mechanical polishing were studied respectively, and the thinning polishing was optimized. The surface morphology of the wafer was characterized by the process parameters. Then, the ink carbon black infrared absorption layer was prepared by high voltage electrostatic spraying, and the absorption layer was characterized and the absorption rate was tested. The influence of the voltage and spraying height on the absorption layer quality was studied. When the voltage 16kV, spraying distance was 3cm, the coating surface was 5 U L. It is more uniform and smooth, the thickness is about 2 mu m, and the roughness is 500nm. through the infrared absorption test. It is found that the absorption rate of the ink carbon black absorption layer is very high and up to 90%. Finally, the package and performance test of the pyroelectric detector are carried out, and the dielectric constant and the dielectric constant of the lithium tantalate wafer with different roughness are measured and the dielectric constant is measured. The electric loss is tested on the voltage response of different lithium tantalate thickness, different incident power, different surface roughness and different modulation frequency, and the response voltage waveform is analyzed by thermal simulation. At the same time, the noise of different surface roughness sensitive element and different frequency is tested and compared. With the thickness of lithium tantalate wafer decreasing, the response rate is reduced. When the thickness reaches 50 m, the response rate of the device reaches 4.62 x 103V/W., and the response of the device is proportional to the power of the incident light. The voltage response of the detector increases with the increase of frequency at low frequency. The voltage response of the detector is not related to the frequency in a certain frequency range. At high frequency, the voltage response of the device is along with the frequency. The increase gradually decreases. The noise of the device on the surface of the sensitive element decreases obviously. The noise of the sensitive component with the roughness of Ra 50nm is low to 2 V/Hz, and the equivalent noise power of the detector is 4.3 x 10-10W/Hz1/2 by calculation, and the specific detection rate is 3.3 x 108CM. Hz1/2/W, which is in line with the requirements of the high performance pyroelectric detector to the sensitive element.

【學(xué)位授予單位】：電子科技大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2017
【分類號(hào)】：TN215

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