本文選題：表面等離子體共振 + 磁控射頻濺射　； 參考：《中國科學(xué)技術(shù)大學(xué)》2015年博士論文

【摘要】：表面等離子體共振技術(shù)(SPR)作為一種高折射率靈敏度的光學(xué)探測技術(shù),在各種領(lǐng)域都得到廣泛的推廣使用。利用表面等離子體共振技術(shù)的優(yōu)勢,可以對一些光功能材料進(jìn)行研究,并能拓展光功能材料的使用領(lǐng)域。本論文主要對表面等離子體共振技術(shù)進(jìn)行了研究,并將其推廣到紫外探測領(lǐng)域。本論文的主要工作和研究成果如下： 1、利用射頻磁控濺射鍍膜系統(tǒng)在高折射率棱鏡底面鍍制金膜,制作了Kreschmann式SPR探測結(jié)構(gòu),然后搭建了SPR角度掃描平臺。掃描平臺使用兩個步進(jìn)電機控制的轉(zhuǎn)臺,系統(tǒng)的角度掃描分辨率可達(dá)0.0020,利用編寫的控制軟件可以實現(xiàn)SPR曲線的實時觀測記錄,整個平臺的搭建為之后的SPR探測研究提供了基礎(chǔ)。 2、提出了一種利用氟代偶氮苯聚合物作為傳感材料的新式SPR紫外探測技術(shù)。由于不同強度紫外光照射下,氟代偶氮苯聚合物的光致順反異構(gòu)速率不同,導(dǎo)致聚合物折射率變化速率不同,進(jìn)而影響了SPR系統(tǒng)反射光強度變化速率,通過測量反射光強度變化速率就能得到紫外光的強度信息,這種方法同傳統(tǒng)的單純測量穩(wěn)定狀態(tài)下反射光強度的方法相比,所需的測量時間短,可以低于1分鐘。這種方法的紫外測量靈敏度為4.43(mv/s)/(mw/cm2),在縮短了測量時間的情況下也保證了較高的測量精度。 3、設(shè)計了一種新的紫外光分布成像系統(tǒng)。本系統(tǒng)是基于Kreschmann結(jié)構(gòu)的SPR探測技術(shù),使用氟代偶氮苯聚合物作為敏感材料。紫外光照射區(qū)域的偶氮苯聚合物薄膜折射率降低,導(dǎo)致這部分對應(yīng)的反射光強度增強,而未照到部分的反射光強保持不變。通過提取紫外光照射前后采集到的反射光圖像之間的變化,可以得到紫外光分布的圖像。使用不同形狀的光闌來改變紫外光的分布情況,測試了系統(tǒng)的可行性。 4、提出了一種雙入射角式SPR探測方法。傳統(tǒng)的單入射角強度調(diào)制式SPR探測方法是以選定的單個入射角處的反射光強度作為系統(tǒng)的輸出量,而雙入射角式SPR方法是利用兩個選定的入射角處的反射光強度的差值作為系統(tǒng)的輸出量,可以充分利用采集到的SPR數(shù)據(jù),有效提高了探測靈敏度。利用不同濃度的NaCl溶液對這種探測方法進(jìn)行了檢測,發(fā)現(xiàn)折射率探測靈敏度比傳統(tǒng)的單入射角式SPR探測系統(tǒng)提高了59%,折射率探測精度達(dá)到8.25×10-6RIU。同傳統(tǒng)的單入射角式SPR方法相比,雙入射角式SPR探測的方法沒有增加系統(tǒng)的復(fù)雜度,利用原有的結(jié)構(gòu)就能實現(xiàn)很好的探測效果。
[Abstract]:Surface Plasmon Resonance (SPR), as an optical detection technique with high refractive index sensitivity, has been widely used in various fields.With the advantage of surface plasmon resonance (SPR) technology, some optical functional materials can be studied, and the application fields of optical functional materials can be expanded.In this paper, surface plasmon resonance (SPR) technology is studied and extended to UV detection.The main work and research results of this thesis are as follows:1. Using RF magnetron sputtering system to fabricate gold film on the bottom of high refractive index prism, Kreschmann type SPR detection structure is fabricated, and then the SPR angle scanning platform is built.The scanning platform uses two turntables controlled by stepper motors and the angular scanning resolution of the system can reach 0.0020. The real-time observation and recording of SPR curves can be realized by using the control software written. The whole platform provides a foundation for the later research of SPR detection.2. A novel SPR UV detection technique using fluoroazobenzene polymer as sensing material is proposed.Because of the different photoinduced isomerization rate of fluoroazobenzene polymer under different ultraviolet light intensity, the change rate of refractive index of polymer is different, and the change rate of reflected light intensity of SPR system is affected.The intensity information of ultraviolet light can be obtained by measuring the change rate of reflected light intensity. Compared with the traditional method of measuring the intensity of reflected light in stable state, the measuring time is shorter and can be less than one minute.The UV measurement sensitivity of this method is 4.43 mv / s / mw / cm ~ (2), and the measurement time is shortened and the measurement accuracy is high.3. A new UV distribution imaging system is designed.This system is based on Kreschmann structure of SPR detection technology, using fluoroazobenzene polymer as a sensitive material.The refractive index of azobenzene polymer film decreases in the ultraviolet region, which leads to the enhancement of the corresponding reflected light intensity, while the reflection intensity of the unilluminated part remains unchanged.The distribution of ultraviolet light can be obtained by extracting the changes of reflected light images before and after UV irradiation.The feasibility of the system is tested by changing the distribution of ultraviolet light with different apertures.4. A double incident angle SPR detection method is proposed.The traditional single incident angle intensity modulation SPR detection method takes the reflected light intensity at the selected single incident angle as the output of the system.The double incident angle SPR method uses the difference of reflected light intensity at two selected incident angles as the output of the system, which can make full use of the collected SPR data and effectively improve the detection sensitivity.The sensitivity of refractive index detection is 59% higher than that of traditional single incident angle SPR detection system, and the precision of refractive index detection is 8.25 脳 10 ~ (-6) RIU.Compared with the traditional single incident angle SPR method, the double incident angle SPR detection method does not increase the complexity of the system, and the original structure can achieve a good detection effect.
【學(xué)位授予單位】：中國科學(xué)技術(shù)大學(xué)
【學(xué)位級別】：博士
【學(xué)位授予年份】：2015
【分類號】：TN23

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