本文選題：原子力顯微鏡　切入點(diǎn)：AFM振動(dòng)輔助加工　出處：《哈爾濱工業(yè)大學(xué)》2017年碩士論文　論文類型：學(xué)位論文

【摘要】：原子力顯微鏡(AFM)已經(jīng)成為加工微納米溝槽的一種重要加工工具。目前可以利用AFM直接刻劃進(jìn)行溝槽的加工,但這種加工方式在提高微納米溝槽的加工尺度,提高加工效率,增強(qiáng)加工得到溝槽形貌尺寸可控性方面仍有一定的難度。工作臺(tái)和AFM相結(jié)合的刻劃方式也僅僅提高了加工尺度,而基于振動(dòng)的AFM機(jī)械刻劃這一加工方式不僅提高了加工尺度,還提高了加工效率,增強(qiáng)了加工得到溝槽尺寸的可控性,在一定程度上減小了探針的磨損。本文對(duì)基于振動(dòng)的AFM機(jī)械刻劃這一加工方式進(jìn)行進(jìn)一步研究,在其基礎(chǔ)上設(shè)計(jì)一種名為AFM振動(dòng)輔助加工的加工方法。這種加工方法使探針?biāo)矫鎯?nèi)沒(méi)有運(yùn)動(dòng),利用振動(dòng)平臺(tái)和定位平臺(tái)提供樣品在水平面內(nèi)的圓周運(yùn)動(dòng)和勻速直線進(jìn)給運(yùn)動(dòng),其中振動(dòng)平臺(tái)用來(lái)提供樣品水平面內(nèi)一定頻率和幅值的圓周運(yùn)動(dòng),定位平臺(tái)用來(lái)提供樣品水平面內(nèi)的進(jìn)給運(yùn)動(dòng),該加工方法類似于傳統(tǒng)的銑削。本文對(duì)該加工方法加工過(guò)程,各加工參數(shù)對(duì)加工結(jié)果的影響,以及加工過(guò)程中探針磨損進(jìn)行研究,主要包括以下幾個(gè)方面:首先,搭建了AFM振動(dòng)輔助加工系統(tǒng),分析了加工系統(tǒng)中振動(dòng)平臺(tái)和定位平臺(tái)的運(yùn)動(dòng)特性。研究了該加工方式的加工機(jī)理,并分析了控制系統(tǒng)參數(shù)對(duì)加工得到溝槽形貌的影響。然后,通過(guò)實(shí)驗(yàn)研究和理論分析的方法具體研究了振動(dòng)平臺(tái)圓周運(yùn)動(dòng)頻率、振動(dòng)平臺(tái)圓周運(yùn)動(dòng)幅值、定位平臺(tái)進(jìn)給速度、定位平臺(tái)進(jìn)給方向和AFM在樣品表面施加的垂直荷載這五個(gè)工藝參數(shù)對(duì)加工得到溝槽形貌特征的影響。最后,分析了探針不同磨損狀態(tài)的探針對(duì)加工得到溝槽形貌的影響,研究了加工過(guò)程中探針的磨損狀態(tài),并分析了不同作用力對(duì)探針磨損的影響。
[Abstract]:AFM (atomic force microscope) has become an important tool for machining micro and nano grooves. At present, AFM can be used to directly depict grooves, but this kind of machining method can improve the machining scale and efficiency of micro and nano grooves. It is still difficult to obtain the controllability of groove shape and size in enhanced machining. The combination of worktable and AFM can only improve the machining scale, but the vibration-based AFM mechanical characterization not only improves the machining scale, but also improves the machining scale. The machining efficiency is also improved, the controllability of groove size is enhanced, and the wear of probe is reduced to a certain extent. In this paper, the machining method of AFM mechanical scribing based on vibration is further studied. On the basis of this method, a machining method called AFM vibration assisted machining is designed, which makes the probe horizontal plane without movement, and provides the circular motion of the sample in the horizontal plane and the uniform velocity linear feed motion by using the vibration platform and the positioning platform. The vibration platform is used to provide the circular motion of a certain frequency and amplitude in the horizontal plane of the sample, and the positioning platform is used to provide the feed motion in the horizontal plane of the sample, which is similar to the traditional milling method. The effects of machining parameters on machining results and probe wear during machining are studied, including the following aspects: firstly, a AFM vibration aided machining system is built. The motion characteristics of vibration platform and positioning platform in machining system are analyzed. The machining mechanism of the machining method is studied, and the influence of control system parameters on the groove morphology is analyzed. The frequency of circular motion of vibration platform, the amplitude of circular motion of vibration platform, the feed velocity of positioning platform are studied by means of experimental research and theoretical analysis. The influence of the feeding direction of the positioning platform and the vertical load imposed by AFM on the surface of the sample is analyzed. Finally, the influence of the probe with different wear states on the grooves morphology is analyzed. The wear state of the probe during machining was studied, and the influence of different forces on the wear of the probe was analyzed.
【學(xué)位授予單位】：哈爾濱工業(yè)大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2017
【分類號(hào)】：TN05

【參考文獻(xiàn)】

相關(guān)期刊論文 前6條

1 周輝;楊海峰;;光刻與微納制造技術(shù)的研究現(xiàn)狀及展望[J];微納電子技術(shù);2012年09期

2 陳元芳;鮮楊;金鐵玉;宮敬禹;;電子束加工技術(shù)及其應(yīng)用[J];現(xiàn)代制造工程;2009年08期

3 蔣洪奎;范真;姚湯偉;朱春耕;;掃描探針機(jī)械刻蝕及DPN新技術(shù)[J];機(jī)床與液壓;2006年07期

4 宋曉輝;李艷寧;匡登峰;劉慶綱;胡小唐;;大氣狀態(tài)下AFM陽(yáng)極氧化加工Si的研究[J];壓電與聲光;2006年02期

5 馬向國(guó);顧文琪;;聚焦離子束加工技術(shù)及其應(yīng)用[J];微納電子技術(shù);2005年12期

6 鄭麗芬,胡曉東,胡小唐;基于AFM電場(chǎng)誘導(dǎo)氧化的納米加工[J];航空精密制造技術(shù);2003年05期

相關(guān)博士學(xué)位論文 前1條

1 謝逸群;利用探針在金屬表面進(jìn)行單原子操縱的理論研究[D];復(fù)旦大學(xué);2008年

相關(guān)碩士學(xué)位論文 前1條

1 朱吉牧;基于原子力顯微鏡的納米加工技術(shù)及軟件系統(tǒng)研究[D];浙江大學(xué);2005年

，

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