本文選題：并聯(lián)機構(gòu)　切入點：柔性鉸鏈　出處：《浙江大學》2015年碩士論文　論文類型：學位論文

【摘要】：在精密位姿調(diào)節(jié)裝置需求日益迫切的今天,隨著并聯(lián)機構(gòu)技術(shù)和微位移技術(shù)的進步,精密位姿調(diào)節(jié)并聯(lián)機構(gòu)成為了精密位姿調(diào)節(jié)裝置的重要研究方向。在浸沒式光刻機中,需要一種微米級的三自由度精密位姿調(diào)節(jié)裝置對浸沒單元位姿進行調(diào)節(jié),本文研究的基于柔性鉸鏈的并聯(lián)機構(gòu)就是這樣一種精密調(diào)節(jié)裝置。本文研究內(nèi)容包括4方面：1)對3.PSR-V并聯(lián)機構(gòu)進行了運動學建模,給出了其運動學正逆解的詳細推導過程。特別地,提出了已知z、y、β的運動學逆解求解方法,為一些特殊測量方式的控制提供了逆解方法,并仿真驗證了各運動學模型的正確性。2)基于偽剛體模型,建立起直圓型柔性鉸鏈的剛度和精度模型；提出了柔性鉸鏈的評價標準并建立相應的數(shù)學模型；提出了轉(zhuǎn)動副并聯(lián)柔性鉸鏈結(jié)構(gòu),并建立了相應剛度模型,顯著提高了柔性鉸鏈縱向剛度和扭轉(zhuǎn)剛度；仿真分析驗證了柔性鉸鏈剛度模型的正確性。3)面向應用,對直圓型柔性鉸鏈、并聯(lián)柔性鉸鏈及并聯(lián)機構(gòu)的其他運動副進行了優(yōu)化設(shè)計,并對基于柔性鉸鏈的并聯(lián)機構(gòu)的各尺寸進行了優(yōu)化配置；對動平臺和基于柔性鉸鏈的并聯(lián)機構(gòu)的測試表明并聯(lián)機構(gòu)具有優(yōu)秀的剛度性能和動態(tài)性能。4)對基于柔性鉸鏈的并聯(lián)機構(gòu)進行后處理。在誤差分析的基礎(chǔ)上,利用矢量法建立起基于柔性鉸鏈的并聯(lián)機構(gòu)的誤差模型；設(shè)計參數(shù)識別策略成功的將多目標優(yōu)化問題轉(zhuǎn)變成單目標優(yōu)化問題；提出帶變異的粒子群算法,并結(jié)合參數(shù)識別策略和誤差模型對基于柔性鉸鏈的并聯(lián)機構(gòu)進行參數(shù)識別；精度性能測試顯示基于柔性鉸鏈的并聯(lián)機構(gòu)開環(huán)重復定位精度(z,α,β)分別達到了(-0.5～1.0um, ±0.01rad,±0.03mard),證明基于柔性鉸鏈的并聯(lián)機構(gòu)是一種微米級的精密位姿調(diào)節(jié)并聯(lián)機構(gòu),滿足浸沒式光刻中浸沒單元的位姿調(diào)節(jié)要求。
[Abstract]:With the development of parallel mechanism technology and micro-displacement technology, precision position and attitude adjusting parallel mechanism has become an important research direction of precision position and attitude adjusting device. A three degree-of-freedom precise position and attitude adjusting device with micron size is needed to adjust the position and attitude of the immersion unit. The parallel mechanism based on flexure hinge in this paper is such a kind of precision adjusting device. In this paper, the kinematics modeling of 3.PSR-V parallel mechanism is carried out, which includes four aspects: 1. In this paper, the detailed derivation process of the kinematics inverse solution is given. In particular, a method for solving the kinematics inverse solution of known zky, 尾 is presented, which provides an inverse solution method for the control of some special measurement methods. Based on the pseudo-rigid body model, the stiffness and precision model of the straight circular flexure hinge is established, and the evaluation standard of the flexure hinge is put forward and the corresponding mathematical model is established. The parallel flexure hinge structure of rotating pair is proposed, and the corresponding stiffness model is established, which improves the longitudinal and torsional stiffness of the flexure hinge significantly, and the simulation results verify the correctness of the flexure hinge stiffness model. This paper optimizes the design of straight circular flexure hinge, parallel flexure hinge and other kinematic pairs of parallel mechanism, and optimizes the configuration of each dimension of parallel mechanism based on flexure hinge. The test of the moving platform and the parallel mechanism based on the flexure hinge shows that the parallel mechanism has excellent stiffness performance and dynamic performance. 4) the post-processing of the parallel mechanism based on the flexure hinge is carried out. The error model of the parallel mechanism based on flexure hinge is established by using vector method; the multi-objective optimization problem is successfully transformed into a single-objective optimization problem by designing parameter identification strategy; the particle swarm optimization algorithm with mutation is proposed. The parameter identification strategy and error model are used to identify the parameters of the parallel mechanism based on flexure hinge. The precision performance test shows that the open-loop repeat positioning accuracy of the parallel mechanism based on flexure hinge is up to -0.5um, 鹵0.01rad, 鹵0.03mardn, respectively. It is proved that the parallel mechanism based on flexure hinge is a micrometer precision position-attitude adjusting parallel mechanism. It meets the requirements of position and pose adjustment of immersion units in immersion lithography.
【學位授予單位】：浙江大學
【學位級別】：碩士
【學位授予年份】：2015
【分類號】：TN305.7

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