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  本文選題：應(yīng)力負(fù)載效應(yīng)　切入點：薄膜體聲波諧振器　出處：《西南科技大學(xué)》2017年碩士論文　論文類型：學(xué)位論文

【摘要】：近年來隨著薄膜體聲波諧振器(FBAR)的發(fā)展,FBAR不僅在射頻器件中表現(xiàn)出優(yōu)秀的應(yīng)用價值,在傳感器領(lǐng)域的應(yīng)用潛力也逐漸被挖掘出來,如FBAR微質(zhì)量傳感器、FBAR微加速度計、FBAR壓力傳感器等。FBAR微加速度計和FBAR壓力傳感器屬于FBAR力學(xué)傳感器一類,關(guān)于這類FBAR傳感器的研究普遍存在一個問題——FBAR的敏感機理不詳,也就是FBAR的應(yīng)力負(fù)載效應(yīng)的原因不詳。針對這個問題展開了本文的工作,一方面深入研究FBAR的應(yīng)力負(fù)載效應(yīng),另一方面,找到一種FBAR力學(xué)傳感器的靈敏度計算方法。研究了FBAR的應(yīng)力負(fù)載效應(yīng)。從線性電彈理論出發(fā)推導(dǎo)了初應(yīng)力下FBAR的阻抗表達式,研究了FBAR的諧振頻率與初應(yīng)力的關(guān)系,并通過ANSYS有限元軟件仿真FBAR受集中力下諧振頻率的變化,發(fā)現(xiàn)這兩種情況下,FBAR的諧振頻率偏移方向相反。通過第一性原理計算研究了Al N晶體的受不同壓力下材料常數(shù)的變化,并通過理想FBAR的諧振頻率計算方法粗略分析了不同受力條件下FBAR的諧振頻率偏移情況,發(fā)現(xiàn)不同受力條件下FBAR的諧振頻率變化趨勢相同。提出了FBAR力學(xué)傳感器靈敏度的計算模型或者方法。提出一種基于Mason模型的多尺度計算方法,采用第一性原理計算的壓力與彈性常數(shù)之間的關(guān)系作為“橋梁”,連接Mason模型和結(jié)構(gòu)力學(xué)有限元模型,采用微分-綜合方法計算FBAR力學(xué)傳感器的靈敏度。并在此基礎(chǔ)上對該方法進行了改進,采用特征頻率法求解FBAR的諧振頻率,并用能量加權(quán)平均法求解FBAR結(jié)構(gòu)中的平均壓力和厚度方向的平均應(yīng)變用于修正FBAR的材料參數(shù)和幾何結(jié)構(gòu),進而計算FBAR力學(xué)傳感器的靈敏度。討論了基于電彈體非線性理論推導(dǎo)的攝動積分法。介紹了純彈性攝動下FBAR的諧振頻率偏移量的計算方法,考慮到純彈性攝動計算方法的不足,沒有考慮壓電材料的壓電和介電攝動,因此列出了考慮完整攝動的攝動積分方程。
[Abstract]:In recent years, with the development of thin film bulk acoustic resonator (FBARs), FBAR not only shows excellent application value in RF devices, but also has the potential of application in sensor field. For example, FBAR micro-mass sensor, FBAR micro-accelerometer, FBAR pressure sensor and so on. FBAR micro-accelerometer and FBAR pressure sensor belong to the FBAR mechanical sensor class. There is a general problem in the study of this kind of FBAR sensor, that is, the sensitive mechanism of FBAR is unknown. That is, the reason for the stress load effect of FBAR is unknown. The work of this paper is carried out in this paper. On the one hand, the stress load effect of FBAR is deeply studied, on the other hand, A method for calculating the sensitivity of FBAR mechanical sensor is found. The stress load effect of FBAR is studied. The impedance expression of FBAR under initial stress is derived from the linear electroelastic theory, and the relationship between the resonant frequency of FBAR and the initial stress is studied. ANSYS finite element software is used to simulate the change of resonant frequency of FBAR under concentrated force. It is found that the deviation direction of resonance frequency of FBAR is opposite in these two cases. The variation of material constants of AlN crystal under different pressures is studied by first-principle calculation. The resonance frequency offset of FBAR under different forces is roughly analyzed by the resonance frequency calculation method of ideal FBAR. It is found that the variation trend of resonance frequency of FBAR is the same under different loading conditions. A model or method for calculating the sensitivity of FBAR mechanical sensors is proposed. A multi-scale calculation method based on Mason model is proposed. The relationship between the pressure and elastic constants calculated by first principles is used as a "bridge" to connect the Mason model with the finite element model of structural mechanics. The sensitivity of FBAR mechanical sensor is calculated by differential-synthesis method, and the method is improved. The characteristic frequency method is used to solve the resonance frequency of FBAR. The average pressure and the average strain in the thickness direction of FBAR structure are solved by the energy weighted averaging method to modify the material parameters and geometric structure of FBAR. Then the sensitivity of the FBAR mechanical sensor is calculated. The perturbation integral method based on the nonlinear theory of the electro-elastic body is discussed. The calculation method of the resonance frequency offset of the FBAR under pure elastic perturbation is introduced, taking into account the shortcomings of the pure elastic perturbation calculation method. The piezoelectric and dielectric perturbation of piezoelectric materials is not considered, so the perturbation integral equations with holonomic perturbation are listed.
【學(xué)位授予單位】：西南科技大學(xué)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2017
【分類號】：TP212;TN65

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本文編號：1576992