本文關(guān)鍵詞： 微波真空電子器件 電子轟擊 材料出氣 放氣速率 電離規(guī)管　出處：《真空科學(xué)與技術(shù)學(xué)報》2017年04期 　論文類型：期刊論文

【摘要】：固體材料在大氣中會溶解、吸附一些氣體,當(dāng)材料置于真空環(huán)境下,就會因氣體解溶、解吸、電子轟擊等而發(fā)生放氣。電真空微波器件廣泛應(yīng)用于加速器、衛(wèi)星通信、可控?zé)岷司圩�、全球定位及未來軍事前沿的高功率微波武器等方�?其制造過程中非常關(guān)鍵的步驟是真空獲得。為提高微波電真空器件研制過程中的管內(nèi)真空水平,本文研制了高精度真空材料放氣測試裝置。系統(tǒng)采用小孔流導(dǎo)法測試出氣率,極限真空低于5.0×10~(-7)Pa。利用本裝置進行了電子轟擊材料出氣的試驗研究。實驗表明無氧銅在脈沖電子束轟擊下出氣速率與電壓、頻率、脈寬成正比;電子轟擊的材料暴露大氣后,在電子束轟擊下出氣速率在短時間內(nèi)迅速降低到以前的放氣率水平。采用四級質(zhì)譜儀對電子轟擊時真空室內(nèi)的殘余氣體成分進行了分析,其主要成分為H_2(2),其它成份依次為H_2O(18),N_2(28),和CO_2(44)。對電子轟擊材料出氣機理進行了分析。金屬電離規(guī)管進行的電子轟擊除氣實驗研究也證明了這些實驗結(jié)果。因此利用熱陰極或電子槍作為電子發(fā)射源,對微波電真空器件收集極、陽極等金屬材料進行電子轟擊除氣,將是制造長壽命高可靠微波電真空器件所必要且可行的方法。
[Abstract]:The solid material dissolves in the atmosphere and adsorbs some gases. When the material is placed in a vacuum environment, the gas desorption, desorption, electron bombardment and so on will result in the release of gas. The electro vacuum microwave devices are widely used in accelerators, satellite communications, etc. In such aspects as controllable thermonuclear fusion, global positioning and future military frontier high-power microwave weapons, the key step in the manufacturing process is the acquisition of vacuum. In this paper, a high precision vacuum material degassing test device is developed. The system uses the small hole flow conductivity method to measure the gas output rate. The limit vacuum is less than 5.0 脳 10 ~ (10) ~ (-7) Pa. The experimental study on the exhalation of materials by electron bombardment has been carried out. The experimental results show that the gas output rate of oxygen free copper under pulsed electron beam bombardment is proportional to the voltage, frequency and pulse width, and the electron bombarded material is exposed to the atmosphere. The exhalation rate under electron beam bombardment decreased rapidly to the previous exhalation rate in a short time. The residual gas composition in the vacuum chamber during electron bombardment was analyzed by using a four-stage mass spectrometer. The main components are H2O 2G, and the other components are H _ S _ 2O _ (18) / N _ T _ (22) T _ (28) and CO ~ (2 +) _ (44). The mechanism of exhalation of electronic bombardment materials is analyzed. The experimental results of electron bombardment degassing by metal ionization regulation also prove these experimental results. A pole or an electron gun as an electron emitter, Electron bombardment of metal materials such as collector and anode of microwave vacuum devices will be a necessary and feasible method to manufacture long life and high reliability microwave vacuum devices.
【作者單位】： 中國科學(xué)院電子學(xué)研究所;
【基金】：國家973項目(批準(zhǔn)號2013 CB 328901)
【分類號】：TN104

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