本文關(guān)鍵詞： 差動共焦 曲率半徑測量 光學(xué)設(shè)計 機械設(shè)計　出處：《北京理工大學(xué)》2015年碩士論文　論文類型：學(xué)位論文

【摘要】：在現(xiàn)代光學(xué)測量領(lǐng)域中，曲率半徑是光學(xué)透鏡最基本的參數(shù)之一，其精度將直接影響透鏡的焦距、像差等光學(xué)參數(shù)，進而影響光學(xué)系統(tǒng)的綜合性能。因此，，高精度的曲率半徑測量一直以來都是光學(xué)測量領(lǐng)域的一個難題。特別是在航天相機、光刻機物鏡等高性能光學(xué)系統(tǒng)中，其對透鏡表面曲率半徑的測量精度提出了越發(fā)嚴格的要求。 為解決透鏡曲率半徑的高精度測量難題，我們曾提出一種激光差動共焦曲率半徑高精度測量方法。該技術(shù)基于差動共焦探測系統(tǒng)的軸向光強響應(yīng)絕對零點精確對應(yīng)差動共焦探測系統(tǒng)物鏡聚焦焦點這一特性，利用差動共焦探測系統(tǒng)軸向光強響應(yīng)曲線的過零點精確瞄準定位被測透鏡的貓眼位置和共焦位置，并利用測長激光干涉儀精確測得這兩點之間的距離，繼而實現(xiàn)曲率半徑的高精度測量。與已有的曲率半徑測量方法相比，該方法結(jié)構(gòu)簡單、定焦靈敏度高、抗環(huán)境干擾能力強。本論文基于所提出的差動共焦曲率半徑測量方法，針對大曲率半徑測量需求，開展了系統(tǒng)關(guān)鍵元件的設(shè)計、光路的搭建、測量仿真、誤差分析等研究工作。論文的主要研究內(nèi)容包括： 1）曲率半徑測量原理分析：基于差動共焦層析成像特性，以及其對物鏡焦點的精確捕獲能力，研究差動共焦曲率半徑測量原理，設(shè)計差動共焦曲率半徑測量方法，分析像差、調(diào)整偏差對曲率半徑測量結(jié)果的影響。 2）差動共焦曲率半徑測量系統(tǒng)的光學(xué)系統(tǒng)研究：在光學(xué)設(shè)計仿真軟件Zemax中建立系統(tǒng)仿真模型，確定系統(tǒng)各光學(xué)元件參數(shù)以及系統(tǒng)的外形尺寸，完成系統(tǒng)中關(guān)鍵器件焦距為4.5m準直鏡的設(shè)計，分析分光棱鏡在會聚光路中對測量結(jié)果的影響。 3）系統(tǒng)的機械結(jié)構(gòu)設(shè)計：在機械設(shè)計軟件Solidworks中完成系統(tǒng)的機械結(jié)構(gòu)設(shè)計，包括各光學(xué)元件的固定結(jié)構(gòu)、系統(tǒng)測量的調(diào)整結(jié)構(gòu)以及整個系統(tǒng)的裝配。 4）實驗驗證及誤差分析：驗證原理方法的正確性與可行性，并對該系統(tǒng)中可能存在的誤差源進行了分析。初步實驗結(jié)果表明，該系統(tǒng)測量精度高，單透鏡曲率半徑測量相對誤差小于7ppm。該技術(shù)的研究為透鏡曲率半徑的測量提供了有效的方法，可解決目前較大曲率半徑高精度測量的難題。
[Abstract]:In the field of modern optical measurement, the radius of curvature is one of the most basic parameters of optical lens. Its precision will directly affect the optical parameters such as focal length, aberration and so on, and then affect the comprehensive performance of optical system. High precision curvature radius measurement has always been a difficult problem in the field of optical measurement, especially in high performance optical systems such as space camera, lithography objective lens, etc. The precision of measuring curvature radius of lens surface is more and more strict. In order to solve the problem of measuring the curvature radius of lens with high precision, We have proposed a high precision method for measuring the radius of laser differential confocal curvature. This technique is based on the characteristic that the axial intensity response of the differential confocal detection system corresponds to the focusing focus of the objective lens of the differential confocal detection system exactly at 00:00. The position of cat's eye and the position of confocal of the measured lens are accurately located by using the axial intensity response curve of the differential confocal detection system at 00:00, and the distance between these two points is accurately measured by using the length measuring laser interferometer. Compared with the existing curvature radius measurement methods, this method is simple in structure, high in focusing sensitivity and strong in resisting environmental interference. This paper is based on the proposed differential confocal curvature radius measurement method. In order to meet the need of large curvature radius measurement, the design of key components of the system, the construction of optical path, the measurement simulation, the error analysis and so on are carried out. The main contents of this paper are as follows:. 1) the principle of curvature radius measurement: based on the characteristics of differential confocal tomography and its ability to capture the objective focus accurately, the principle of differential confocal curvature radius measurement is studied, the method of differential confocal curvature radius measurement is designed, and the aberration is analyzed. The effect of the adjustment deviation on the measurement results of curvature radius. 2) the optical system of differential confocal curvature radius measurement system: the system simulation model is established in the optical design simulation software Zemax, and the parameters of the optical components and the system shape are determined. The design of the key device focal length 4.5m collimation mirror is completed, and the influence of the splitter prism on the measurement results in the convergent optical path is analyzed. 3) Mechanical structure design of the system: the mechanical structure design of the system is completed in the mechanical design software Solidworks, including the fixed structure of each optical element, the adjusting structure of the system measurement and the assembly of the whole system. 4) Experimental verification and error analysis: the correctness and feasibility of the principle and method are verified, and the possible error sources in the system are analyzed. The preliminary experimental results show that the measurement accuracy of the system is high. The relative error of single lens curvature radius measurement is less than 7 ppm.The research of this technique provides an effective method for lens curvature radius measurement and can solve the problem of large curvature radius and high precision measurement.
【學(xué)位授予單位】：北京理工大學(xué)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2015
【分類號】：TH744.5

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