本文關(guān)鍵詞： 大行程旋轉(zhuǎn)平臺 非共振壓電電機 精密定位 光波導封裝　出處：《光學精密工程》2016年11期 　論文類型：期刊論文

【摘要】：針對目前光波導封裝使用的精密定位平臺行程小,結(jié)構(gòu)與控制系統(tǒng)復雜的問題,提出了非共振型壓電電機驅(qū)動的大行程精密旋轉(zhuǎn)定位平臺。該平臺通過壓電電機的連續(xù)作動和步進作動兩種工作模式來滿足大行程和高精度要求。首先對該精密旋轉(zhuǎn)定位平臺進行動力學建模,確定了系統(tǒng)運動方程。然后,分析其作動機理,研究影響旋轉(zhuǎn)平臺轉(zhuǎn)速的不同因素。最后,實驗研究該精密旋轉(zhuǎn)定位平臺的速度、步距、分辨率與負載特性,確定平臺連續(xù)作動與步進作動的驅(qū)動方式。實驗結(jié)果表明,在直流偏置為60V,峰峰電壓為120V,頻率為180 Hz的正弦波電壓激勵下,該精密旋轉(zhuǎn)定位平臺最大轉(zhuǎn)速可達47 963.2μrad/s,分辨率和最大負載分別為3μrad和60g。與現(xiàn)有的大行程精密定位旋轉(zhuǎn)平臺相比,設(shè)計的平臺具有行程大,精度高,結(jié)構(gòu)簡單,穩(wěn)定可控,且裝配調(diào)試方便,易于批量化生產(chǎn)等優(yōu)勢。
[Abstract]:Aiming at the problems of small stroke and complex structure and control system of precision positioning platform used in optical waveguide packaging, A precision rotary positioning platform with large stroke driven by non-resonant piezoelectric motor is proposed. The platform can satisfy the requirements of long stroke and high precision through the continuous actuation and step actuation of the piezoelectric motor. Rotating positioning platform for dynamic modeling, The motion equation of the system is determined. Then, the motive theory is analyzed, and the different factors affecting the rotational speed of the rotating platform are studied. Finally, the speed, step distance, resolution and load characteristics of the precision rotary positioning platform are studied experimentally. The experimental results show that the DC bias is 60 V, the peak voltage is 120 V, and the frequency is 180 Hz. The maximum rotational speed of the precision rotary positioning platform can reach 47,963.2 渭 radr / s, the resolution and the maximum load are 3 渭 rad and 60 g respectively. Compared with the existing large-stroke precision positioning and rotating platform, the designed platform has the advantages of large stroke, high precision, simple structure, stable and controllable. And easy to assemble and debug, easy to batch production and other advantages.
【作者單位】： 南京航空航天大學機械結(jié)構(gòu)力學及控制國家重點實驗室;華僑大學精密測量技術(shù)及儀器研究中心;
【基金】：國家自然科學基金資助項目(No.51375224);國家自然科學基金重大研究計劃資助項目(No.91223201);國家自然科學基金青年基金資助項目(No.51405420) 江蘇省自然科學基金青年基金資助項目(No.BK20140474) 江蘇高校優(yōu)勢學科建設(shè)工程資助項目
【分類號】：TN252
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本文編號：1505724