本文關(guān)鍵詞： 光波導(dǎo) 深紫外激光加工 高溫 雙參數(shù)測(cè)　出處：《電子科技大學(xué)》2016年碩士論文　論文類型：學(xué)位論文

【摘要】：近年來激光自動(dòng)化制造技術(shù)的快速發(fā)展為人們研制新一代光學(xué)傳感器提供了新的技術(shù)選項(xiàng)。發(fā)展基于激光加工工藝在光學(xué)波導(dǎo)結(jié)構(gòu)上制作傳感器件的新技術(shù)是未來光學(xué)傳感領(lǐng)域的一個(gè)重要的發(fā)展方向。本文利用電磁理論研究了在二氧化硅材料的波導(dǎo)結(jié)構(gòu)上制作的微干涉結(jié)構(gòu)的設(shè)計(jì)工作,使用有限元分析方法和傳輸矩陣?yán)碚摲謩e給出了相關(guān)干涉結(jié)構(gòu)傳感特性的數(shù)值計(jì)算結(jié)果,利用深紫外激光技術(shù)制作相關(guān)傳感器并研究了它們的傳感特性。主要研究?jī)?nèi)容如下:1.從電磁理論入手,分別在理論上研究了條形光波導(dǎo)和光纖這兩種光波導(dǎo)結(jié)構(gòu)的電磁場(chǎng)傳輸特性;使用有限元計(jì)算方法,計(jì)算出了三層對(duì)稱平板光波導(dǎo)上的琺珀干涉儀的電場(chǎng)分布情況和反射光譜圖。利用薄膜光學(xué)的傳輸矩陣?yán)碚撚?jì)算出了光纖光柵結(jié)構(gòu)的反射光譜圖。2.采用157nm深紫外激光加工工藝,并采用該工藝在商用光學(xué)分路器上制作了基于邁克爾遜干涉結(jié)構(gòu)的折射率傳感器。首先從理論上給出了這種傳感器的傳感特性,接著給出了傳感器反射光譜圖以及傳感特性數(shù)值仿真的結(jié)果。再?gòu)膶?shí)驗(yàn)的角度對(duì)傳感器的傳感特性進(jìn)行了驗(yàn)證。結(jié)果表明采用157nm激光加工工藝可以快速制作出性能良好的光學(xué)器件。3.為在高溫環(huán)境下精確測(cè)量外界物理量,結(jié)合157nm與248nm激光加工工藝提出了基于光纖琺珀腔與再生光柵空間復(fù)合結(jié)構(gòu)的光學(xué)傳感器。首先從理論上分別分析了光纖琺珀干涉儀和光纖光柵集成結(jié)構(gòu)的傳感原理,介紹了使用開放型琺珀腔測(cè)量空氣壓力的方法,與傳統(tǒng)光纖琺珀非膜片壓力傳感器相比,其靈敏度提高了近一百倍。并且這種傳感器的壓力溫度交叉敏感系數(shù)非常弱,能夠有效的剔除環(huán)境溫度對(duì)氣體壓強(qiáng)測(cè)量結(jié)果的影響。運(yùn)用數(shù)值計(jì)算給出了這種結(jié)構(gòu)傳感器的反射光譜和應(yīng)變/溫度或者壓力/溫度雙物理參量測(cè)量的傳感特性計(jì)算結(jié)果。分別在實(shí)驗(yàn)上驗(yàn)證了傳感器從室溫到高溫環(huán)境(超過600℃)中的溫度響應(yīng),壓力響應(yīng)以及應(yīng)變響應(yīng)等傳感特性。本論文從數(shù)值計(jì)算和實(shí)驗(yàn)測(cè)試兩個(gè)角度分析了光波導(dǎo)結(jié)構(gòu)上微干涉儀的光學(xué)性能,基本上實(shí)現(xiàn)了157nm深紫外激光在光學(xué)波導(dǎo)結(jié)構(gòu)中微干涉結(jié)構(gòu)的快速制作。
[Abstract]:In recent years, the rapid development of laser automatic manufacturing technology provides a new technical option for the development of a new generation of optical sensors. In this paper, we use electromagnetic theory to study the design of micro-interference structure on the waveguide structure of silicon dioxide. Using the finite element analysis method and the transfer matrix theory, the numerical calculation results of the sensing characteristics of the related interference structures are presented, respectively. The related sensors are fabricated by using deep ultraviolet laser technology and their sensing characteristics are studied. The main research contents are as follows: 1. Starting with electromagnetic theory, The electromagnetic field propagation characteristics of two optical waveguide structures, stripe waveguide and optical fiber, are studied theoretically, and the finite element method is used. The electric field distribution and reflectance spectrum of Fabry-Perot interferometer on a three-layer symmetrical planar waveguide are calculated. The reflection spectrum of fiber grating structure is calculated by using the transfer matrix theory of thin film optics. The 157nm deep ultraviolet laser processing technology is used. The refractive index sensor based on Michelson interference structure is fabricated on the commercial optical shunt by this process. The sensing characteristics of the sensor are given theoretically. Then, the reflection spectrum of the sensor and the numerical simulation results of the sensing characteristics are given, and the sensing characteristics of the sensor are verified from the point of view of experiment. The results show that the 157nm laser processing technology can be used to produce the sensor property quickly. Good optical device .3.In order to accurately measure the external physical quantity in the high temperature environment, Combined with 157nm and 248nm laser processing technology, an optical sensor based on fiber Fabry-Perot cavity and space composite structure of regenerated grating is proposed. Firstly, the sensing principle of the integrated structure of fiber Fabry-Perot interferometer and fiber grating is analyzed theoretically. The method of measuring air pressure with open Fabry-Perot cavity is introduced. Compared with the conventional fiber-optic non-diaphragm pressure sensor, the sensitivity of the sensor is increased by nearly 100 times, and the cross-sensitivity coefficient of pressure and temperature of this kind of sensor is very weak. The effect of ambient temperature on the gas pressure measurement results can be eliminated effectively. The sensing characteristics of the sensing spectrum of the structure sensor and the measurement of strain / temperature or pressure / temperature double physical parameters are given by numerical calculation. The temperature response of the sensor from room temperature to high temperature (above 600 鈩，

本文編號(hào)：1502700