發(fā)布時間：2018-02-11 09:11

  本文關鍵詞： 光波導 深紫外激光加工 高溫 雙參數(shù)測　出處：《電子科技大學》2016年碩士論文　論文類型：學位論文

【摘要】：近年來激光自動化制造技術的快速發(fā)展為人們研制新一代光學傳感器提供了新的技術選項。發(fā)展基于激光加工工藝在光學波導結構上制作傳感器件的新技術是未來光學傳感領域的一個重要的發(fā)展方向。本文利用電磁理論研究了在二氧化硅材料的波導結構上制作的微干涉結構的設計工作,使用有限元分析方法和傳輸矩陣理論分別給出了相關干涉結構傳感特性的數(shù)值計算結果,利用深紫外激光技術制作相關傳感器并研究了它們的傳感特性。主要研究內容如下:1.從電磁理論入手,分別在理論上研究了條形光波導和光纖這兩種光波導結構的電磁場傳輸特性;使用有限元計算方法,計算出了三層對稱平板光波導上的琺珀干涉儀的電場分布情況和反射光譜圖。利用薄膜光學的傳輸矩陣理論計算出了光纖光柵結構的反射光譜圖。2.采用157nm深紫外激光加工工藝,并采用該工藝在商用光學分路器上制作了基于邁克爾遜干涉結構的折射率傳感器。首先從理論上給出了這種傳感器的傳感特性,接著給出了傳感器反射光譜圖以及傳感特性數(shù)值仿真的結果。再從實驗的角度對傳感器的傳感特性進行了驗證。結果表明采用157nm激光加工工藝可以快速制作出性能良好的光學器件。3.為在高溫環(huán)境下精確測量外界物理量,結合157nm與248nm激光加工工藝提出了基于光纖琺珀腔與再生光柵空間復合結構的光學傳感器。首先從理論上分別分析了光纖琺珀干涉儀和光纖光柵集成結構的傳感原理,介紹了使用開放型琺珀腔測量空氣壓力的方法,與傳統(tǒng)光纖琺珀非膜片壓力傳感器相比,其靈敏度提高了近一百倍。并且這種傳感器的壓力溫度交叉敏感系數(shù)非常弱,能夠有效的剔除環(huán)境溫度對氣體壓強測量結果的影響。運用數(shù)值計算給出了這種結構傳感器的反射光譜和應變/溫度或者壓力/溫度雙物理參量測量的傳感特性計算結果。分別在實驗上驗證了傳感器從室溫到高溫環(huán)境(超過600℃)中的溫度響應,壓力響應以及應變響應等傳感特性。本論文從數(shù)值計算和實驗測試兩個角度分析了光波導結構上微干涉儀的光學性能,基本上實現(xiàn)了157nm深紫外激光在光學波導結構中微干涉結構的快速制作。
[Abstract]:In recent years, the rapid development of laser automatic manufacturing technology provides a new technical option for the development of a new generation of optical sensors. In this paper, we use electromagnetic theory to study the design of micro-interference structure on the waveguide structure of silicon dioxide. Using the finite element analysis method and the transfer matrix theory, the numerical calculation results of the sensing characteristics of the related interference structures are presented, respectively. The related sensors are fabricated by using deep ultraviolet laser technology and their sensing characteristics are studied. The main research contents are as follows: 1. Starting with electromagnetic theory, The electromagnetic field propagation characteristics of two optical waveguide structures, stripe waveguide and optical fiber, are studied theoretically, and the finite element method is used. The electric field distribution and reflectance spectrum of Fabry-Perot interferometer on a three-layer symmetrical planar waveguide are calculated. The reflection spectrum of fiber grating structure is calculated by using the transfer matrix theory of thin film optics. The 157nm deep ultraviolet laser processing technology is used. The refractive index sensor based on Michelson interference structure is fabricated on the commercial optical shunt by this process. The sensing characteristics of the sensor are given theoretically. Then, the reflection spectrum of the sensor and the numerical simulation results of the sensing characteristics are given, and the sensing characteristics of the sensor are verified from the point of view of experiment. The results show that the 157nm laser processing technology can be used to produce the sensor property quickly. Good optical device .3.In order to accurately measure the external physical quantity in the high temperature environment, Combined with 157nm and 248nm laser processing technology, an optical sensor based on fiber Fabry-Perot cavity and space composite structure of regenerated grating is proposed. Firstly, the sensing principle of the integrated structure of fiber Fabry-Perot interferometer and fiber grating is analyzed theoretically. The method of measuring air pressure with open Fabry-Perot cavity is introduced. Compared with the conventional fiber-optic non-diaphragm pressure sensor, the sensitivity of the sensor is increased by nearly 100 times, and the cross-sensitivity coefficient of pressure and temperature of this kind of sensor is very weak. The effect of ambient temperature on the gas pressure measurement results can be eliminated effectively. The sensing characteristics of the sensing spectrum of the structure sensor and the measurement of strain / temperature or pressure / temperature double physical parameters are given by numerical calculation. The temperature response of the sensor from room temperature to high temperature (above 600 鈩，

本文編號：1502700