本文關(guān)鍵詞： 雙溫模型 多脈沖激光燒蝕 高深徑比　出處：《上海交通大學(xué)》2015年碩士論文　論文類型：學(xué)位論文

【摘要】：過去二十年以來,由于飛秒激光與材料相互作用有著能量快速沉積和減小不必要的熱損傷區(qū)域等優(yōu)點(diǎn),飛秒激光燒蝕深小孔加工得到了人們的許多關(guān)注和研究。受到傳統(tǒng)高斯光束瑞利長度的限制,實(shí)現(xiàn)高深徑比的小孔是微孔加工的瓶頸。在我們已經(jīng)在之前的模型中研究了單脈沖激光燒蝕金屬鋁的雙溫模型。但是,對于加工高深徑比的小孔,單脈沖雙溫模型并不能給我們提供有效的數(shù)據(jù),因此我們提出了改進(jìn)的三維雙溫模型用于研究多脈沖飛秒激光燒蝕小孔。我們計(jì)算了多脈沖激光燒蝕閾值并研究了激光能流密度、脈沖次數(shù)、腰斑半徑等參數(shù)對小孔形貌的影響規(guī)律,為微加工實(shí)現(xiàn)提供理論依據(jù)。得出激光能流密度和脈沖次數(shù)主要影響燒蝕小孔的深度,對孔徑的影響作用比較緩慢。而腰斑半徑則主要影響燒蝕小孔的孔徑大小,幾乎成線性的關(guān)系,對燒蝕小孔的深度則沒有影響。另外,本文還進(jìn)行了飛秒激光燒蝕金屬鋁和聚苯乙烯薄膜的實(shí)驗(yàn),探討了真空度對小孔濺射物的影響,利用定制的真空腔環(huán)境使得飛秒激光燒蝕小孔周圍濺射物減少,并計(jì)算了多脈沖燒蝕金屬鋁的燒蝕閾值,與模擬結(jié)果大致相同。還在研究了激光能流密度和脈沖次數(shù)對小孔深徑比的影響。在飛秒激光燒蝕聚苯乙烯薄膜實(shí)驗(yàn)中,研究了激光重復(fù)頻率、材料表面水膜和腰斑聚焦位置對小孔形貌的影響。以及激光能量密度和脈沖次數(shù)等各激光加工參數(shù)對小孔深徑比的影響。最后,理論分析了平凸錐透鏡產(chǎn)生貝塞爾光束的性質(zhì),實(shí)驗(yàn)上采用錐角1°的平凸錐透鏡搭建了貝塞爾光束飛秒激光微加工平臺(tái),為后續(xù)加工出高深徑比的小孔做好準(zhǔn)備。
[Abstract]:Over the past two decades, the femtosecond laser interaction with materials has the advantages of rapid energy deposition and the reduction of unnecessary thermal damage zones. The fabrication of deep holes by femtosecond laser ablation has attracted much attention and research, which is limited by the Rayleigh length of traditional Gao Si beam. The hole with high aspect ratio is the bottleneck of microhole machining. In the previous model, we have studied the double temperature model of single pulse laser ablation of metal aluminum. However, for the processing of small hole with high depth to diameter ratio, The monopulse double temperature model can't provide us with valid data. Therefore, an improved three-dimensional dual-temperature model is proposed to study the ablation of holes by multi-pulse femtosecond laser. We calculate the threshold of multi-pulse laser ablation and study the laser energy flow density and pulse number. The influence of the parameters such as the waist spot radius on the pore morphology provides a theoretical basis for the realization of micromachining. It is concluded that the laser energy flow density and the number of pulses mainly affect the depth of the ablation hole. The effect on pore diameter is slow, while the radius of waist spot mainly affects the aperture size of the ablative hole, which is almost linear, but has no effect on the depth of the ablated hole. The experiments of femtosecond laser ablation of aluminum and polystyrene films are also carried out. The effect of vacuum on the microporous sputtering is discussed, and the amount of sputtering around the holes is reduced by using the customized vacuum cavity environment. The ablation threshold of multi-pulse ablative aluminum is calculated, and the results are approximately the same as the simulation results. The effects of laser energy flux density and pulse number on the ratio of depth to diameter of small holes are also studied. In the experiment of femtosecond laser ablation of polystyrene films, The effects of laser repetition rate, water film on the surface of the material and the focusing position of the waist spot on the morphology of the pore are studied. The effects of laser processing parameters such as laser energy density and pulse number on the ratio of depth to diameter of the small hole are also studied. The properties of Bezier beam produced by flat convex conical lens are analyzed theoretically. In the experiment, a beisel beam femtosecond laser micromachining platform is built by using a flat convex conical lens with a cone angle of 1 擄, which is ready for the subsequent fabrication of small holes with high aspect ratio.
【學(xué)位授予單位】：上海交通大學(xué)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2015
【分類號】：TN249

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