本文關鍵詞： 多軸鏡組 光束平行性 分光效率　出處：《哈爾濱工業(yè)大學》2016年碩士論文　論文類型：學位論文

【摘要】：近年來,激光干涉測量技術由于具有精度高、速度快和測量范圍大等優(yōu)勢,在科學研究和工業(yè)生產(chǎn)之中廣泛應用,尤其是具有多軸測量能力的激光干涉儀,是以光刻機為代表的微電子加工裝備和高端超精密加工裝備中核心系統(tǒng)。多軸激光干涉儀中集眾多光學器件于一體的干涉鏡組是其核心部件,通過對光學器件的集成,縮小了系統(tǒng)體積并避免了裝調(diào)過程,給應用帶來方便,但干涉鏡組定型后不易調(diào)節(jié),裝配定型過程中會引入的分光不平行及分光效率不理想,成為激光干涉儀重要的誤差源,限制了激光干涉儀角度測量和長度測量精度的提高。本課題主要針對上述問題,對干涉鏡組分光不平行及分光效率不理想的檢測方法開展研究;在討論了已有鏡組分光平行性檢測及分光效率檢測方法的優(yōu)缺點的基礎上;研究了基于差動離焦檢測的平行性檢測方法,以及基于非飽和狀態(tài)CCD檢測光強的分光效率檢測方法,建立相關測量模型,提出了可以兼顧平行性與分光效率的整體檢測方案,最終搭建檢測系統(tǒng)并完成了對鏡組分光平行性及分光效率兩個參數(shù)的檢測。課題的主要研究內(nèi)容如下:(1)提出了一種針對多軸鏡組分光平行性的檢測方法,通過兩個對稱于準直物鏡焦平面放置的CCD,檢測鏡組分光光束的空間位置以實現(xiàn)平行性的檢測;基于非飽和狀態(tài)CCD檢測等效光強,實現(xiàn)鏡組分光效率的檢測,建立起了適用于單軸及多軸差分鏡組的檢測模型;并在平行性及分光效率檢測模型的基礎上設計出一套可兼顧檢測兩個參數(shù)的整體檢測方案。(2)對CCD軸向位置誤差、傾角誤差、分光棱鏡位置誤差對平行性檢測的影響規(guī)律進行了系統(tǒng)分析,得出引起平行性檢測誤差的各器件安裝誤差容限,在平行性檢測相對誤差小于2%時,CCD位置誤差為(-0.01mm,0.01mm),傾角誤差為(-10°,10°);同時得出最佳的系統(tǒng)安裝方案。(3)針對上述檢測方案,完成了系統(tǒng)硬件及軟件的設計,針對建立的檢測模型及測量精度與測量范圍需求,逐一進行了關鍵器件選型,并設計制作了分光棱鏡、CCD裝配的機械結構;使用LabVIEW設計了系統(tǒng)軟件,包括控制、采集、數(shù)據(jù)處理功能,可實現(xiàn)了平行性及分光效率的多軸兼顧測量。(4)搭建了測量系統(tǒng),對系統(tǒng)性能進行了實驗;實驗表明,搭建的系統(tǒng)可以完成鏡組分光效率的檢測,分光效率檢測的重復性為0.4%;實驗還表明,搭建的系統(tǒng)可以實現(xiàn)多軸光束的平行性同時測量,避免了分時測量的誤差,采用自準直儀進行比較測試,分光平行性與傳統(tǒng)聚焦檢測方法相比,平行性檢測的穩(wěn)定性由0.6″提升至0.1″,分辨力達到0.2″,測量重復性為0.04″,上述指標滿足高精度多軸鏡組對平行性和分光效率的檢測需求。
[Abstract]:In recent years, because of its high precision laser interferometry technology, fast speed and wide measurement range and other advantages, is widely used in scientific research and industrial production, especially with multi axis laser interferometer measurement capability, is the core system of ultra precision machining in lithography machine as the representative of the microelectronic processing equipment and high-end equipment. Axis laser interferometer in many optical devices in an interference lens group is the core component, through the integration of optical devices, reduce the volume of the system and avoid the alignment process, bring convenience to the application, but the group after setting mirror interference is not easy to adjust, assembly shaping process will introduce the light and not parallel optical efficiency is not ideal, has become an important source of error of laser interference instrument, limits the laser interferometer angle measurement and length measurement precision is improved. This topic mainly aiming at the above problems, the interference component of optical mirror Study on detection method of parallel and light efficiency is not ideal; based on the existing advantages and disadvantages of optical lens is divided into parallel detection and optical efficiency of the detection method; research parallel detection method based on the differential detection of focus from, and based on the optical efficiency of detection method of unsaturated CCD photometric detection the establishment of measurement model proposed can be both parallel and light efficiency of the whole detection scheme, and ultimately build detection system and completed the light extraction efficiency and parallel detection of two parameters of lens group. The main research contents of this paper are as follows: (1) put forward a multi axis the mirror component light parallel detection method, through two symmetrical to the collimating lens focal plane placed CCD, space position detection mirror component of light beam to achieve the detection of parallelism; based on non saturation light intensity detection CCD equivalent, realize Detection of mirror component light efficiency, set up suitable for single and multi axis differential group shot detection model; and a design can take into account the overall detection method of two parameters based on parallel and light efficiency detection model. (2) on the CCD axial position error, angle error the law, prism position error of parallelism detection was analyzed. It is concluded that the installation error tolerance device parallel error detection, in parallel detection of the relative error is less than 2%, the position error is CCD (-0.01mm, 0.01mm), as the angle error (-10 degrees, 10 degrees); at the same time the best installation program system. (3) according to the above detection scheme, completed the design of hardware and software of the system, to establish the detection model and the measurement precision and measurement range requirements, one by one key component selection, design and making the prism assembly CCD Mechanical structure; system design using LabVIEW software, including acquisition, control, data processing function, can realize the parallel and light efficiency of multi axis balance measurement. (4) to build a measurement system, the performance of the system experiment; experimental results show that the built system can complete mirror component light detection efficiency the repeatability, optical efficiency of detection was 0.4%; the experiments also showed that the built system can realize multi axis parallel beam measurement at the same time, the error measurement is avoided, the autocollimator comparison test, splitting parallel with the traditional focus detection method, parallel detection stability by 0.6 "to enhance the resolution of 0.1", 0.2 ", 0.04" measurement repeatability, the above indexes meet the high precision multi axis mirror group on the test requirements of parallelism and light efficiency.

【學位授予單位】：哈爾濱工業(yè)大學
【學位級別】：碩士
【學位授予年份】：2016
【分類號】：TN249

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